The E28E Ethernet-enabled Baratron® adds the ability to network with Ethernet hubs and other devices for local or network diagnostics without disassembly or removal from the host system. Temperature controlled to 100°C these capacitance manometers with etch sensor provide high accuracy pressure measurements with full scale ranges from 0.1 to 1000 Torr.
|Compare||Model||Drawings, CAD & Specs||Availability||Price|
|E28E.1TCEF1B1 Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 100°C, 8 VCR-F, Ethernet RJ45, DB15, 0.5%/Rdg Accuracy, Vertical Calibration, Torr Units||
|E28E.1TCEF5B1 Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 100°C, 8 VCR-F, Ethernet RJ45, DB15, 0.5%/Rdg Accuracy, Horizontal Calibration, Torr Units||
|E28E.1TGAF1B1 Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 100°C, NW16 ISO-KF, Ethernet RJ45, DB15, 0.5%/Rdg Accuracy, Vertical Calibration, Torr Units||$3,200||
|E28E01TBAE1B1 Heated Capacitance Manometer w/Etch Sensor, 1 Torr, 100°C, 0.5 in. Tube, Ethernet RJ45, DB9, 0.25%/Rdg Accuracy, Vertical Calibration, Torr Units||
|E28E01TCEE1B1 Heated Capacitance Manometer w/Etch Sensor, 1 Torr, 100°C, 8 VCR-F, Ethernet RJ45, DB15, 0.25%/Rdg Accuracy, Vertical Calibration, Torr Units||$3,200||
|E28E01TGAE1A1 Heated Capacitance Manometer w/Etch Sensor, 1 Torr, 100°C, NW16 ISO-KF, Ethernet RJ45, DB9, 0.25%/Rdg Accuracy, Vertical Calibration, Torr Units||
|E28E11TBAE1A1 Heated Capacitance Manometer w/Etch Sensor, 10 Torr, 100°C, 0.5 in. Tube, Ethernet RJ45, DB9, 0.25%/Rdg Accuracy, Vertical Calibration, Torr Units||
|E28E11TCEE1B1 Heated Capacitance Manometer w/Etch Sensor, 10 Torr, 100°C, 8 VCR-F, Ethernet RJ45, DB15, 0.25%/Rdg Accuracy, Vertical Calibration, Torr Units||
|E28E11TGAE1B1 Heated Capacitance Manometer w/Etch Sensor, 10 Torr, 100°C, NW16 ISO-KF, Ethernet RJ45, DB15, 0.25%/Rdg Accuracy, Vertical Calibration, Torr Units||$3,200||
The following options are available for the E28E Baratron® Heated Capacitance Manometers
|Configuration Option||Option Code|
|E28E Absolute Capacitance Manometers||E28E|
|Full Scale Range|
|Units of Measurement|
|1/2 in. OD tube||BA|
|8 VCR female||CE|
|8 VCR male||CF|
|8 VCR female, short tube||CR|
|8 VCO® female||DA|
|1.33 in. OD CF||HA|
|Standard sensor, standard inlet tube length||S|
|Etch sensor (range ≤ 100 Torr only), standard inlet tube length||E|
|¼ in. dia. tube (CD fitting only)||V|
|Analog Electrical Connector|
|15-pin D-subminiature, thread lock||B|
|15-pin D-subminiature, slide lock||P|
|9-pin D-subminiature, thread lock||A|
|9-pin D-subminiature, slide lock||Z|
|Digital Electrical Connector|
|Ethernet RJ45 jack, diagnostics||1|
Capacitance manometers are electro-mechanical gauges that can measure both pressure and vacuum. The capacitance gauge translates a pressure-modulated movement in a thin diaphragm into an electrical signal proportional to the pressure. The pressure sensor is the thin diaphragm that is exposed to the pressure or vacuum being measured via the inlet tube. An electrode is mounted in the reference cavity behind the diaphragm. Pressure differences between the process and the reference cavity deflect the diaphragm slightly, changing the distance between it and the electrode. Variations in this distance produce variations in the capacitance between the diaphragm and the electrode creating an electrical signal that is proportional to the pressure change. Since differences in the capacitance signal are produced by physical changes within the manometer and not by changes in the gas properties, pressure measurements by the capacitance manometer are independent of the composition of the gas being measured.
These capacitance manometers are temperature controlled to 100°C for improved accuracy. Unheated versions are exposed to ambient temperature variations which can degrade the sensor accuracy. These devices have the sensor enclosed in a volume that is maintained at a constant temperature above ambient. This solution improves the manometer’s accuracy and repeatability and lowers instrument drift by reducing or eliminating process contamination within the manometer. Heated manometers are recommended for applications that require maximum accuracy and repeatability, operate above ambient temperature and for those processes that employ hot gases.
These Baratron® pressure transducers are referenced to vacuum for absolute pressure measurement. Applications include: vacuum furnaces, freeze-drying of fruits and vegetables, gas lasers, automotive component testing, bottle coatings, and vacuum distillation.
These pressure transducers feature all Inconel® construction of the pressure sensor allowing it to operate without damage in virtually any chemical environment, including exposure to halogens, deionized water and steam, and ozone.
These Baratron® capacitance manometers feature a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements.
These Ethernet-enabled Baratron® capacitance manometers can now network with Ethernet hubs and other devices for local or network diagnostics without disassembly or removal from the host system. Like other MKS Ethernet-equipped products, they include an embedded Internet browser software that allows it to communicate with any Windows®-based PC. Since the Ethernet port operates in parallel to the standard analog communications, the device can be diagnosed on a real-time basis during processing which is a huge benefit for users who perform their own system analysis and troubleshooting. Ethernet communications are real-time and can be run in parallel with analog communications, allowing in-situ diagnostics of device and process without cable disconnection.
The embedded Graphical User Interface (GUI) is capable of very detailed analyses of both the Baratron capacitance manometer and the chamber that it is mounted on. Upon initially connecting a Windows PC, the user will see the Device Status screen, which gives a quick “at-a-glance” summary of the Baratron including the pressure, status, and general product information. The user can then move to the Plot screen that shows a real-time plot of the actual pressure that the Baratron sees in the process chamber. This is a particularly powerful function that can be used for detailed process and system diagnostics. Since this mode can display transient pressure changes occurring as fast as 100 milliseconds, it can be used to troubleshoot and diagnose a wide variety of process system issues. Examples include improper isolation valve operation, pressure control instabilities, DC or RF power supply variations, process chemistry issues, and even vacuum pump operation. The Baratron manometer GUI also continuously tracks its own function in areas such as temperature, current draw, and microprocessor operation - and reports back to you via the GUI the problem and when it happened. That helps you to to get the processing system back on-line and generating revenue faster.
|Pin||15-pin Type "D"||9-pin Type "D"|
|4||Reserved||+15 VDC or +24 VDC|
|5||Power Return||-15 VDC|
|7||+15 VDC or +24 VDC||Reserved|
|11||+15 VDC or +24 VDC||N/A|
MKS has implemented solutions within the manometer’s pressure sensing element to minimize the effects of process byproducts and process gases. For processes that generate large quantities of condensable byproducts, MKS recommends the etch baffle sensor that significantly reduces the ability of byproducts to reach the sensor, minimizing process-induced zero drift. For very low pressure processes where fluorine burn-in is the main issue, MKS recommends the fluorine friendly (FF) sensor offering the ultimate in short- and long-term stability in fluorine chemistry.