Specifications

  • Type
    Digital Pressure Transducer
  • Sensor Type
    Capacitance Manometer with Etch Baffle Sensor
  • Measurement Type
    Absolute
  • Sensor Temperature
    Controlled to 100°C
  • Full Scale Pressure Ranges
    0.1, 0.25, 1, 2, 10, 20, 100, 500, 1000 Torr
  • Accuracy
    0.25% of Reading for ranges of 1 Torr or higher
    0.50% of Reading for 0.1 and 0.25 Torr ranges
  • Resolution
    0.001% Full Scale
  • Communication Protocol
    Ethernet
  • Analog Output
    0 to 10 VDC into > 10 kΩ load
  • Analog Connector
    9-pin or 15-pin D-subminiature
  • Digital Connector
    RJ45 receptacle
  • Zero Temperature Coefficient
    0.002% Full Scale/°C for all models of 1 Torr and higher
    0.01% Full Scale/°C for 0.1 Torr range
  • Span Temperature Coefficient
    0.02% of Reading/°C
  • Operating Temperature Range
    15° to 50°C
  • Volume
    6.3 cc
  • Warm-up Time
    2 Hours for greater than 1 Torr Full Scale
    4 Hours for less than 1 Torr Full Scale
  • Overpressure Limit
    45 psia (310 kPa) or 120% of Full Scale, whichever is higher
  • Materials Exposed to Process Gases
    Inconel®
  • Power Requirements
    ±15 VDC ±5% or 24 VDC ±5% @ 600 mA
  • Indicators
    Multicolor status LED and two (2) green LEDs for Ethernet communications status
  • Compliance
    CE, SEMI S2-93

Resources

Manuals
Literature

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