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Product Options

  E27F Heated Capacitance Manometer, 0.1 - 100 Torr, Heated to 45°C, Etch Sensor


  • Type
    Vacuum Pressure Transducer
  • Sensor Type
    Capacitance Manometer with Etch Baffle Sensor
  • Measurement Type
  • Sensor Temperature
    Controlled to 45°C
  • Full Scale Pressure Ranges
    0.02, 0.05, 0.1, 0.25, 1, 2, 10, 20, and 100 Torr
  • Analog Output
    0 - 10 VDC into >10K Ω load
  • Analog Connector
    15-pin D-sub
  • Accuracy
    0.12% of Reading
    0.15% for 0.25, 0.1, and 0.05 Torr
    0.25% for 0.02 Torr
  • Zero Temperature Coefficient
    0.002% of Full Scale/°C for 1-100 Torr ranges
    0.005% Full Scale /°C for 0.25 and 0.1 Torr
    0.015% Full Scale /°C for 0.05 Torr
    0.03% Full Scale /°C for 0.02 Torr
  • Span Temperature Coefficient
    0.02% of Reading/°C
  • Operating Temperature Range
    15° to 40°C
  • Volume
    6.3 cc
  • Warm-up Time
    hours for 1 Torr and higher, 4 hours for <1 Torr
  • Overpressure Limit
    45 psia (310 kPa) or 120% Full Scale , whichever is greater
  • Materials Exposed to Process Gases
  • Power Requirements
    ±15 VDC ±5% @ 0.25 Amps (maximum)
  • Compliance


Baratron® Capacitance Manometer Technology

Capacitance manometers are electro-mechanical gauges that can measure both pressure and vacuum. The capacitance gauge translates a pressure-modulated movement in a thin diaphragm into an electrical signal proportional to the pressure. The pressure sensor is the thin diaphragm that is exposed to the pressure or vacuum being measured via the inlet tube. An electrode is mounted in the reference cavity behind the diaphragm. Pressure differences between the process and the reference cavity deflect the diaphragm slightly, changing the distance between it and the electrode. Variations in this distance produce variations in the capacitance between the diaphragm and the electrode creating an electrical signal that is proportional to the pressure change. Since differences in the capacitance signal are produced by physical changes within the manometer and not by changes in the gas properties, pressure measurements by the capacitance manometer are independent of the composition of the gas being measured.

Gas independent absolute pressure measurement with a Baratron® capacitance manometer. Schematic shows the internal components and functional zones.

Percent of Reading Accuracy

Accuracy is specified as a percent of Reading, not Full Scale, as seen in some of the lower performance devices. Percent of Reading accuracy provides you with an even more accurate output signal in the lower scale of the pressure range, where it is needed most.

Internally Heated to 45°C

These capacitance manometers are temperature controlled to 45°C for improved accuracy. Unheated versions are exposed to ambient temperature variations which can degrade the sensor accuracy. These devices have the sensor enclosed in a volume that is maintained at a constant temperature above ambient. This solution improves the manometer’s accuracy and repeatability and lowers instrument drift by reducing or eliminating process contamination within the manometer. Heated manometers are recommended for applications that require maximum accuracy and repeatability, operate above ambient temperature and for those processes that employ hot gases.

The pressure sensor is located inside a 45°C constant temperature oven for improved pressure measurement accuracy.

Absolute Pressure Measurement

These Baratron® pressure transducers are referenced to vacuum for absolute pressure measurement. Applications include: vacuum furnaces, freeze-drying of fruits and vegetables, gas lasers, automotive component testing, bottle coatings, and vacuum distillation.

All-Inconel® Wetted Surfaces

These pressure transducers feature all Inconel® construction of the pressure sensor allowing it to operate without damage in virtually any chemical environment, including exposure to halogens, deionized water and steam, and ozone.

0 to 10 VDC Proportional Analog Output

These Baratron® capacitance manometers feature a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements.

15-pin D-subminiature Connector

Pin Description
2 Signal Output
5 Power Common
6 -15 VDC
7 +15 VDC
12 Signal Common
15 Chassis Ground

Recommended for Etch Processes

MKS has implemented solutions within the manometer’s pressure sensing element to minimize the effects of process byproducts and process gases. For processes that generate large quantities of condensable byproducts, MKS recommends the etch baffle sensor that significantly reduces the ability of byproducts to reach the sensor, minimizing process-induced zero drift. For very low pressure processes where fluorine burn-in is the main issue, MKS recommends the fluorine friendly (FF) sensor offering the ultimate in short- and long-term stability in fluorine chemistry.

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