• Type
    Digital Pressure Transducer
  • Sensor Type
    Capacitance Manometer with Etch Baffle Sensor
  • Measurement Type
  • Sensor Temperature
    Controlled to 45°C
  • Full Scale Pressure Ranges
    0.1, 0.25, 1, 2, 10, 20, 100, 500, 1000 Torr
  • Communication Protocol
  • Analog Output
    0 - 10 VDC into > 10 kΩ load
  • Analog Connector
    9-pin or 15-pin D-subminiature
  • Digital Connector
    RJ45 receptacle
  • Accuracy
    0.10% Reading for ranges of 1 Torr or higher
    0.15% Reading for 0.1 and 0.25 Torr ranges
  • Resolution
    0.001% Full Scale
  • Zero Temperature Coefficient
    0.002% Full Scale/°C for all models of 1 Torr and higher
    0.005% Full Scale/°C for 0.1 Torr range
  • Span Temperature Coefficient
    0.02% of Reading/°C
  • Operating Temperature Range
    15° to 40°C
  • Volume
    6.3 cc
  • Warm-up Time
    2 Hours for greater than 1 Torr Full Scale
    4 Hours for less than 1 Torr Full Scale
  • Overpressure Limit
    45 psia (310 kPa) or 120% of Full Scale, whichever is higher
  • Materials Exposed to Process Gases
  • Power Requirements
    ±15 VDC ±5% or 24 VDC ±5% @ 300 mA
  • Indicators
    Multicolor status LED and two (2) green LEDs for Ethernet communications status
  • Compliance
    CE, SEMI S2-93


Baratron® Capacitance Manometer Technology

Capacitance manometers are electro-mechanical gauges that can measure both pressure and vacuum. The capacitance gauge translates a pressure-modulated movement in a thin diaphragm into an electrical signal proportional to the pressure. The pressure sensor is the thin diaphragm that is exposed to the pressure or vacuum being measured via the inlet tube. An electrode is mounted in the reference cavity behind the diaphragm. Pressure differences between the process and the reference cavity deflect the diaphragm slightly, changing the distance between it and the electrode. Variations in this distance produce variations in the capacitance between the diaphragm and the electrode creating an electrical signal that is proportional to the pressure change. Since differences in the capacitance signal are produced by physical changes within the manometer and not by changes in the gas properties, pressure measurements by the capacitance manometer are independent of the composition of the gas being measured.

Gas independent pressure measurement with a Baratron® capacitance manometer. Schematic shows the internal components and functional zones.

Percent of Reading Accuracy

Accuracy is specified as a percent of Reading, not Full Scale, as seen in some of the lower performance devices. Percent of Reading accuracy provides you with an even more accurate output signal in the lower scale of the pressure range, where it is needed most.

Internally Heated to 45°C

These capacitance manometers are temperature controlled to 45°C for improved accuracy. Unheated versions are exposed to ambient temperature variations which can degrade the sensor accuracy. These devices have the sensor enclosed in a volume that is maintained at a constant temperature above ambient. This solution improves the manometer’s accuracy and repeatability and lowers instrument drift by reducing or eliminating process contamination within the manometer. Heated manometers are recommended for applications that require maximum accuracy and repeatability, operate above ambient temperature and for those processes that employ hot gases.

The pressure sensor is located inside a 45°C constant temperature oven for improved pressure measurement accuracy.

Absolute Pressure Measurement

These Baratron® pressure transducers are referenced to vacuum for absolute pressure measurement. Applications include: vacuum furnaces, freeze-drying of fruits and vegetables, gas lasers, automotive component testing, bottle coatings, and vacuum distillation.

All-Inconel® Wetted Surfaces

These pressure transducers feature all Inconel® construction of the pressure sensor allowing it to operate without damage in virtually any chemical environment, including exposure to halogens, deionized water and steam, and ozone.

0 to 10 VDC Proportional Analog Output

These Baratron® capacitance manometers feature a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements.

Ethernet Communications

These Ethernet-enabled Baratron® capacitance manometers can now network with Ethernet hubs and other devices for local or network diagnostics without disassembly or removal from the host system. Like other MKS Ethernet-equipped products, they include an embedded Internet browser software that allows it to communicate with any Windows®-based PC. Since the Ethernet port operates in parallel to the standard analog communications, the device can be diagnosed on a real-time basis during processing which is a huge benefit for users who perform their own system analysis and troubleshooting. Ethernet communications are real-time and can be run in parallel with analog communications, allowing in-situ diagnostics of device and process without cable disconnection.

Embedded Graphical User Interface

The embedded Graphical User Interface (GUI) is capable of very detailed analyses of both the Baratron capacitance manometer and the chamber that it is mounted on. Upon initially connecting a Windows PC, the user will see the Device Status screen, which gives a quick “at-a-glance” summary of the Baratron including the pressure, status, and general product information. The user can then move to the Plot screen that shows a real-time plot of the actual pressure that the Baratron sees in the process chamber. This is a particularly powerful function that can be used for detailed process and system diagnostics. Since this mode can display transient pressure changes occurring as fast as 100 milliseconds, it can be used to troubleshoot and diagnose a wide variety of process system issues. Examples include improper isolation valve operation, pressure control instabilities, DC or RF power supply variations, process chemistry issues, and even vacuum pump operation. The Baratron manometer GUI also continuously tracks its own function in areas such as temperature, current draw, and microprocessor operation - and reports back to you via the GUI the problem and when it happened. That helps you to to get the processing system back on-line and generating revenue faster.

9-pin and 15-pin Type "D" Pin-outs

Pin 15-pin Type "D" 9-pin Type "D"
1 Reserved Pressure Signal
2 Pressure Signal Reserved
3 Reserved Reserved
4 Reserved +15 VDC or +24 VDC
5 Power Return -15 VDC
6 -15 VDC Reserved
7 +15 VDC or +24 VDC Reserved
8 Reserved Pressure Common
9 Reserved Power Common
10 Reserved N/A
11 +15 VDC or +24 VDC N/A
12 Pressure Common N/A
13 Reserved N/A
14 Reserved N/A
15 Chassis Ground N/A

Recommended for Etch Processes

MKS has implemented solutions within the manometer’s pressure sensing element to minimize the effects of process byproducts and process gases. For processes that generate large quantities of condensable byproducts, MKS recommends the etch baffle sensor that significantly reduces the ability of byproducts to reach the sensor, minimizing process-induced zero drift. For very low pressure processes where fluorine burn-in is the main issue, MKS recommends the fluorine friendly (FF) sensor offering the ultimate in short- and long-term stability in fluorine chemistry.

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