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Description
  dual-zone pressure controller with mass flow meter DPC Pressure Controller, Dual-Zone, 10-100 Torr Full Scale, Mass Flow Meter

Specifications

  • Type
    Dual Pressure Controller
  • Control Method
    Absolute pressure capacitance manometer
  • Pressure Range
    10, 20, 50, 100 Torr
  • Fitting Type
    Swagelok® 4 VCR® male compatible
  • Pressure Control Accuracy
    ±0.5% of Reading
  • Transducer Over Pressure Limit
    45 psia or 200% Full Scale, whichever is greater
  • Control Mode
    Analog Integral Adjustments: 10 positions (0 through 9)
    Analog Proportional Adjustments: 10 positions (0 through 9)
  • Zero Temperature Coefficient
    Pressure: ≤0.02% Full Scale/°C
    Flow: ≤0.05% Full Scale/°C
  • Span Temperature Coefficient
    Pressure: ≤0.04% Reading/°C
    Flow: ≤0.08% Reading/°C
  • Control Range
    10-100% Full Scale
  • Operating Temperature
    15 to 50°C (59 to 122°F)
  • Storage Temperature
    -20 to 80°C (-4 to 176°F)
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • External Leak Integrity
    <10-9 scc/sec He
  • Leak Integrity Through Closed Valve
    <1% Full Scale
  • Flow Measurement Range
    10, 20, 50, 100 sccm
  • Maximum Inlet Pressure
    45 psia
  • Flow Accuracy
    ±1.0% of Full Scale
  • Wetted Materials
    316L Stainless Steel, Inconel®, Nickel, Elgiloy®, Viton®
  • Surface Finish
    Ra ≤10 µinches, electropolished
  • Set Point
    Stability: ≤0.1% set point
    Control Time to Set Point: ≤2.0 seconds (typical)
  • Power Required
    DeviceNet: 11-25 VDC
    Analog: ±15 VDC ±5%, 500 mA, maximum during first five seconds at start up, 400 mA at steady state
  • Connector-Interface
    DeviceNet: 5-pin sealed microconnector with DeviceNet pin assignments
    Analog: 15 pin D male (one per channel)
  • DeviceNet Communication Rate
    125 - 500 Kbps (user selectable)
  • MAC ID Switches
    DeviceNet: 2, one for each pressure control channel (4 MAC ID switches)
  • Indicators
    DeviceNet: LED Network Status (green/red) LED Module Status (green/red)
  • Meter Warm-up Time
    1 hour
  • Stability at set point
    <0.1% set point
  • Input-Output Signals
    Analog Output: 0 to 5 VDC (flow), 0 to 10 VDC (pressure)
    Analog Pressure Set Point Input: 0 to 10 VDC
  • Cable Length
    100 feet (maximum)
  • Weight
    10.5 lbs. (4.8 Kg)
  • Dimensions
    10.46 in (including fittings) x 3.36 in x 5.35 in
    26.56 cm (including fittings) x 8.53 cm x 13.59 cm

Features

Backside Wafer Cooling

The DPC has been designed to reduce the overall cost of ownership of pressure control subsystems for backside wafer cooling, specifically for the latest two-zone electrostatic chucks.

Two Zone Backside Wafer Cooling

Operation

DPC Functional Schematic

The DPC consists of three sections – an inlet subassembly, a pressure control/flow metering subassembly, and an outlet subassembly. Pressurized helium gas is fed into the inlet subassembly. A pneumatic valve is then opened and the gas flow is split to two channels.

In the pressure control section, Baratron® Capacitance Manometers measure pressure for each of the two zones. These pressures are compared to the pressure set points and an appropriate signal adjusts the position of the solenoid control valve to bring actual pressures into agreement with the set points. At the same time, mass flow is monitored on each channel by MKS Mass-Flo® meters calibrated for helium, which is the typical gas used for backside wafer cooling.

Downstream of the pressure control section, the outlet subassembly directs flow to the electrostatic chuck and provides a controlled “bleed” to vacuum through fixed orifices. 

The purpose of the bleed is to insure that the pressure control system is not “dead-ended”. Since leak past the wafer is typically very low, the controlled bleed provides additional pressure relief for faster response to set point. Two different orifice sizes are used depending on the Full Scale range of the flow sensors. A smaller orifice size is used on units with 10 and 20 sccm FS flow sensors, and a larger orifice size is used on units with 50 and 100 sccm FS flow sensors.

Communication and Control

Both analog and DeviceNet™ versions of the DPC are available. For the analog version, power is supplied at ±15 VDC. The pressure set point and readout signals are 0-10 VDC and the flow sensor readout signal is 0-5 VDC. Ten-position gain and integral (P&I) term rotary switches provide a wide dynamic range for tuning pressure control performance. P&I switches are provided for each channel for independent tuning.

The digital DPC features digital control electronics and DeviceNet-compliant communication. The DPC DeviceNet profile for each channel basically adds an S-Analog Sensor object for mass flow sensing to the Process Control Valve object. Each channel has its own distinct MAC ID that is user-settable by two switches per DeviceNet specification. To optimize pressure control performance, users may adjust gain, integral and differential (P, I, D) constants for each channel using the DeviceNet communications protocol.

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