Configuration Options

Description
  dual-zone pressure controller with mass flow meter DPC Pressure Controller, Dual-Zone, 10-100 Torr Full Scale, Mass Flow Meter

Specifications

  • Type
    Dual Pressure Controller
  • Control Method
    Absolute pressure capacitance manometer
  • Pressure Range
    10, 20, 50, 100 Torr
  • Fitting Type
    Swagelok® 4 VCR® male compatible
  • Pressure Control Accuracy
    ±0.5% of Reading
  • Transducer Over Pressure Limit
    45 psia or 200% Full Scale, whichever is greater
  • Control Mode
    Analog Integral Adjustments: 10 positions (0 through 9)
    Analog Proportional Adjustments: 10 positions (0 through 9)
  • Zero Temperature Coefficient
    Pressure: ≤0.02% Full Scale/°C
    Flow: ≤0.05% Full Scale/°C
  • Span Temperature Coefficient
    Pressure: ≤0.04% Reading/°C
    Flow: ≤0.08% Reading/°C
  • Control Range
    10-100% Full Scale
  • Operating Temperature
    15 to 50°C (59 to 122°F)
  • Storage Temperature
    -20 to 80°C (-4 to 176°F)
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • External Leak Integrity
    <10-9 scc/sec He
  • Leak Integrity Through Closed Valve
    <1% Full Scale
  • Flow Measurement Range
    10, 20, 50, 100 sccm
  • Maximum Inlet Pressure
    45 psia
  • Flow Accuracy
    ±1.0% of Full Scale
  • Wetted Materials
    316L Stainless Steel, Inconel®, Nickel, Elgiloy®, Viton®
  • Surface Finish
    Ra ≤10 µinches, electropolished
  • Set Point
    Stability: ≤0.1% set point
    Control Time to Set Point: ≤2.0 seconds (typical)
  • Power Required
    DeviceNet: 11-25 VDC
    Analog: ±15 VDC ±5%, 500 mA, maximum during first five seconds at start up, 400 mA at steady state
  • Connector-Interface
    DeviceNet: 5-pin sealed microconnector with DeviceNet pin assignments
    Analog: 15 pin D male (one per channel)
  • DeviceNet Communication Rate
    125 - 500 Kbps (user selectable)
  • MAC ID Switches
    DeviceNet: 2, one for each pressure control channel (4 MAC ID switches)
  • Indicators
    DeviceNet: LED Network Status (green/red) LED Module Status (green/red)
  • Meter Warm-up Time
    1 hour
  • Stability at set point
    <0.1% set point
  • Input-Output Signals
    Analog Output: 0 to 5 VDC (flow), 0 to 10 VDC (pressure)
    Analog Pressure Set Point Input: 0 to 10 VDC
  • Cable Length
    100 feet (maximum)
  • Weight
    10.5 lbs. (4.8 Kg)
  • Dimensions
    10.46 in (including fittings) x 3.36 in x 5.35 in
    26.56 cm (including fittings) x 8.53 cm x 13.59 cm

Features

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