Product Options

Description
  DA03A Capacitance Manometer, EtherCAT, Heated to 150 or 160°C

Specifications

  • Type
    Pressure Transducer
  • Sensor Type
    Capacitance Manometer
  • Measurement Type
    Absolute
  • Full Scale Pressure Ranges
    1, 2, 3, 5, 10, 20, 100, 1000 Torr
  • Full Scale Range
    0.01% of Full Scale
  • Sensor Temperature
    Controlled to 150°C or 160°C
  • Accuracy
    0.25% of Reading
  • Communication Protocol
    EtherCAT®
  • Analog Output
    0 to 10 VDC into >10 ohm load
  • Analog Connector
    15-pin D-subminiture
  • Trip Relays
    Two internally mounted process pressure trip relays independently adjustable from 0.5% to 100% of full scale range
  • Zero Temperature Coefficient
    150°C Versions: 0.004% FS/°C (0.008% Full Scale/°C for 1 Torr range)
    160°C Versions: 0.008% FS/°C (0.016% Full Scale/°C for 1 Torr range)
  • Span Temperature Coefficient
    0.02% Reading/°C
  • Response Time
    50 msec
  • Warm-up Time
    4 hours
  • Internal Volume
    6.3 cc
  • Ambient Operating Temperature
    15° to 50°C
  • Overpressure Limit
    45 psia
  • Materials Exposed to Process Gases
    Inconel® and Incoloy® nickel alloys
  • Power Requirements
    +24 VDC or ±15 VDC, 1 amp at start up
  • Ambient Airflow Requirements
    50 ft/min for ambient temperatures of 45-50°C
  • Compliance
    CE compliant to EMC Directive 2014/30/EU
    Fully compliant to RoHS Directive 2011-65-EU

Features

Baratron® Capacitance Manometer Technology

Capacitance manometers are electro-mechanical gauges that can measure both pressure and vacuum. The capacitance gauge translates a pressure-modulated movement in a thin diaphragm into an electrical signal proportional to the pressure. The pressure sensor is the thin diaphragm that is exposed to the pressure or vacuum being measured via the inlet tube. An electrode is mounted in the reference cavity behind the diaphragm. Pressure differences between the process and the reference cavity deflect the diaphragm slightly, changing the distance between it and the electrode. Variations in this distance produce variations in the capacitance between the diaphragm and the electrode creating an electrical signal that is proportional to the pressure change. Since differences in the capacitance signal are produced by physical changes within the manometer and not by changes in the gas properties, pressure measurements by the capacitance manometer are independent of the composition of the gas being measured.

Gas independent absolute pressure measurement with a Baratron® capacitance manometer. Schematic shows the internal components and functional zones.

Percent of Reading Accuracy

Accuracy is specified as a percent of Reading, not Full Scale, as seen in some of the lower performance devices. Percent of Reading accuracy provides you with an even more accurate output signal in the lower scale of the pressure range, where it is needed most.

Internally Heated to 150°C or 160°C

These capacitance manometers are temperature controlled to 150°C or 160°C for improved accuracy. Unheated sensors are exposed to ambient temperature variations which can degrade the sensor accuracy. These devices have the sensor enclosed in a volume that is maintained at a constant temperature above ambient. This solution improves the manometer’s accuracy and repeatability and lowers instrument drift by reducing or eliminating process contamination within the manometer permitting use in the most demanding vacuum processes in semiconductor manufacturing, such as metal etching and nitride film chemical vapor deposition (CVD).

The pressure sensor is located inside a 150°C or 160°C constant temperature oven for improved pressure measurement accuracy.

Absolute Pressure Measurement

These Baratron® pressure transducers are referenced to vacuum for absolute pressure measurement. Applications include: vacuum furnaces, freeze-drying of fruits and vegetables, gas lasers, automotive component testing, bottle coatings, and vacuum distillation.

Inconel® and Incoloy® Construction Wetted Surfaces

These pressure transducers feature Inconel® and Incoloy® nickel alloy construction of the pressure sensor allowing it to operate without damage in virtually any chemical environment, including halogens, deionized water and steam, and ozone. The sensor is fully welded with no intermediate brazing or joining materials.

0 to 10 VDC Proportional Analog Output

These Baratron® capacitance manometers feature a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements.

EtherCAT® Communications

These e-Baratron EtherCAT® enabled capacitance manometers continue the progression of high performance into networked systems, using industry-standard EtherCAT digital communications to connect to complex process tools. Based on the proven 627C and 628C Ethernet-equipped e-Baratron products, the EtherCAT e-Baratron manometer meets the current SEMI® EtherCAT Common Device Profile and is designed for use in advanced processing systems.

Need help?

Contact an Applications Specialist by sending us an email