The DA03B Baratron® Capacitance Manometer improves process capability by reducing output drift. Operating at sensor temperatures up to 200°C, the DA03B’s high temperature operation minimizes the deposition of process byproducts within the sensor. High temperature operation combined with a large sensor reduces sensor process contamination effects resulting in increased sensitivity and zero process related drift. The DA03B leverages the same proven digital architecture of the industry-standard DA02A, making it well suited for advanced applications such as Chemical Vapor Deposition (CVD), Atomic Layer Deposition (ALD), semiconductor processes, and lyophilization.
The following options are available for DA03B Baratron® Heated Capacitance Manometers
Ordering Code Example: DA03A11TCES36BAA0000
|Configuration Option||Option Code|
|DA03A Heated Capacitance Manometers||DA03A|
|Full Scale Range|
|Units of Measurement|
|1/2 in. OD tube||BA|
|8 VCR female||CE|
|8 VCR male||CF|
|1.33 in. OD CF||HA|
|Etch sensor (range ≤ 100 Torr only)||E|
|15 Pin D with Screw Locks||B|
|15 Pin D with Slide Lock Posts||P|
|Trip Point A Above Set Point, Trip Point B Above Set Point||AA|
|Trip Point A Above Set Point, Trip Point B Below Set Point||AB|
|Trip Point A Below Set Point, Trip Point B Below Set Point||BB|
|Trip Point A Below Set Point, Trip Point B Above Set Point||BA|
|Ranges 1 Torr and Above||0|
|At Temp LED and Trip Point Relay||1|
|At Temp/Heater Fail Indicator||2|
Capacitance manometers are electro-mechanical gauges that can measure both pressure and vacuum. The capacitance gauge translates a pressure-modulated movement in a thin diaphragm into an electrical signal proportional to the pressure. The pressure sensor is the thin diaphragm that is exposed to the pressure or vacuum being measured via the inlet tube. An electrode is mounted in the reference cavity behind the diaphragm. Pressure differences between the process and the reference cavity deflect the diaphragm slightly, changing the distance between it and the electrode. Variations in this distance produce variations in the capacitance between the diaphragm and the electrode creating an electrical signal that is proportional to the pressure change. Since differences in the capacitance signal are produced by physical changes within the manometer and not by changes in the gas properties, pressure measurements by the capacitance manometer are independent of the composition of the gas being measured.
These capacitance manometers are temperature controlled to 150°C or 160°C for improved accuracy. Unheated sensors are exposed to ambient temperature variations which can degrade the sensor accuracy. These devices have the sensor enclosed in a volume that is maintained at a constant temperature above ambient. This solution improves the manometer’s accuracy and repeatability and lowers instrument drift by reducing or eliminating process contamination within the manometer permitting use in the most demanding vacuum processes in semiconductor manufacturing, such as metal etching and nitride film chemical vapor deposition (CVD).
These Baratron® pressure transducers are referenced to vacuum for absolute pressure measurement. Applications include: vacuum furnaces, freeze-drying of fruits and vegetables, gas lasers, automotive component testing, bottle coatings, and vacuum distillation.
These pressure transducers feature Inconel® and Incoloy® nickel alloy construction of the pressure sensor allowing it to operate without damage in virtually any chemical environment, including halogens, deionized water and steam, and ozone. The sensor is fully welded with no intermediate brazing or joining materials.
These Baratron® capacitance manometers feature a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements.
These e-Baratron EtherCAT® enabled capacitance manometers continue the progression of high performance into networked systems, using industry-standard EtherCAT digital communications to connect to complex process tools. Based on the proven 627C and 628C Ethernet-equipped e-Baratron products, the EtherCAT e-Baratron manometer meets the current SEMI® EtherCAT Common Device Profile and is designed for use in advanced processing systems.