The EtherCAT® Baratron® capacitance manometer continues that progression of high performance into networked systems, using industry-standard EtherCAT digital communications to connect to complex process tools. Based on the proven 627C and 628C Ethernet-equipped Baratron products, the EtherCAT Baratron manometer meets the current SEMI® EtherCAT Common Device Profile and is designed for use in advanced processing systems.
|Compare||Model||Drawings, CAD & Specs||Availability||Price|
Heated Capacitance Manometer, 0.1 Torr, 100°C, 0.5 in. Tube, EtherCAT RJ45, DB15, Vertical Calibration
|DA02A.1TBAS21CV0 Heated Capacitance Manometer, 0.1 Torr, 100°C, 0.5 in. Tube, EtherCAT RJ45, DB15, Vertical Calibration||
Heated Capacitance Manometer, 10 Torr, 45°C, 8 VCR-F, EtherCAT RJ45, DB15, Standard Calibration
|DA02A11TCES24C00 Heated Capacitance Manometer, 10 Torr, 45°C, 8 VCR-F, EtherCAT RJ45, DB15, Standard Calibration||
|DA02A12TGAS28C00 Heated Capacitance Manometer, 100 Torr, 80°C, NW16 ISO-KF, EtherCAT RJ45, DB15, Standard Calibration||
|DA02A12TGCS24C00 Heated Capacitance Manometer, 100 Torr, 45°C, NW16 ISO-KF, EtherCAT RJ45, DB15, Standard Calibration||
Heated Capacitance Manometer, 1,000 Torr, 100°C, 8 VCR-F, EtherCAT RJ45, DB15, Standard Calibration
|DA02A13TCES21C00 Heated Capacitance Manometer, 1,000 Torr, 100°C, 8 VCR-F, EtherCAT RJ45, DB15, Standard Calibration||
The following options are available for the DA02A Baratron® Heated Capacitance Manometers
|Configuration Option||Option Code|
|DA02A Heated Capacitance Manometers||DA02A|
|Full Scale Range|
|Units of Measurement|
|1/2 in. OD tube||BA|
|8 VCR female||CE|
|8 VCR male||CF|
|8 VCR female, short tube||CR|
|8 VCO® female||DA|
|1.33 in. OD CF||HA|
|Standard sensor, standard inlet tube length||S|
|Etch sensor (range ≤ 100 Torr only), standard inlet tube length||E|
|Standard sensor, reduced inlet tube length||T|
|Etch sensor (range ≤ 100 Torr only), reduced inlet tube length||H|
|(2) RJ45 EtherCAT jacks with 15-pin D-subminiature connector||C|
|Standard (ranges ≥ 1 Torr)||O|
|Vertical (ranges < 1 Torr only)||V|
|Horizontal (ranges < 1 Torr only)||H|
|Trip A above 50%, Trip B above 50% of FS Range||AA|
|Trip A above 50%, Trip B below 50% of FS Range||AB|
|Trip A below 50%, Trip B below 50% of FS Range||BB|
|Trip A below 50%, Trip B above 50% of FS Range||BA|
Capacitance manometers are electro-mechanical gauges that can measure both pressure and vacuum. The capacitance gauge translates a pressure-modulated movement in a thin diaphragm into an electrical signal proportional to the pressure. The pressure sensor is the thin diaphragm that is exposed to the pressure or vacuum being measured via the inlet tube. An electrode is mounted in the reference cavity behind the diaphragm. Pressure differences between the process and the reference cavity deflect the diaphragm slightly, changing the distance between it and the electrode. Variations in this distance produce variations in the capacitance between the diaphragm and the electrode creating an electrical signal that is proportional to the pressure change. Since differences in the capacitance signal are produced by physical changes within the manometer and not by changes in the gas properties, pressure measurements by the capacitance manometer are independent of the composition of the gas being measured.
These capacitance manometers are temperature controlled to 45°C, 80°C or 100°C for improved accuracy. Unheated versions are exposed to ambient temperature variations which can degrade the sensor accuracy. These devices have the sensor enclosed in a volume that is maintained at a constant temperature above ambient. This solution improves the manometer’s accuracy and repeatability and lowers instrument drift by reducing or eliminating process contamination within the manometer. Heated manometers are recommended for applications that require maximum accuracy and repeatability, operate above ambient temperature and for those processes that employ hot gases.
These Baratron® pressure transducers are referenced to vacuum for absolute pressure measurement. Applications include: vacuum furnaces, freeze-drying of fruits and vegetables, gas lasers, automotive component testing, bottle coatings, and vacuum distillation.
These pressure transducers feature Inconel® and Incoloy® nickel alloy construction of the pressure sensor allowing it to operate without damage in virtually any chemical environment, including halogens, deionized water and steam, and ozone. The sensor is fully welded with no intermediate brazing or joining materials.
These Baratron® capacitance manometers feature a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements.
These e-Baratron EtherCAT® enabled capacitance manometers continue the progression of high performance into networked systems, using industry-standard EtherCAT digital communications to connect to complex process tools. Based on the proven 627C and 628C Ethernet-equipped e-Baratron products, the EtherCAT e-Baratron manometer meets the current SEMI® EtherCAT Common Device Profile and is designed for use in advanced processing systems.
|2||Pressure Signal Output|
|12||Pressure Signal Common|