Compare Model Drawings, CAD & Specs Full Scale Range Sensor Temperature Fitting Type Availability Price
da02a baratron ethercat 0.1 to 1000 torr heated capacitance manometer
Heated Capacitance Manometer, 0.1 Torr, 100°C, 0.5 in. Tube, EtherCAT RJ45, DB15, Vertical Calibration
$2,275
3 Weeks
0.1 Torr 100°C 0.5 in. OD tube
3 Weeks
da02a baratron ethercat 0.1 to 1000 torr heated capacitance manometer
Heated Capacitance Manometer, 10 Torr, 45°C, 8 VCR-F, EtherCAT RJ45, DB15, Standard Calibration
$2,175
3 Weeks
10 Torr 45°C 8 VCR female
3 Weeks
da02a baratron ethercat 0.1 to 1000 torr heated capacitance manometer
Heated Capacitance Manometer, 100 Torr, 80°C, NW16 ISO-KF, EtherCAT RJ45, DB15, Standard Calibration
100 Torr 80°C NW16 ISO-KF
da02a baratron ethercat 0.1 to 1000 torr heated capacitance manometer
Heated Capacitance Manometer, 100 Torr, 45°C, NW16 ISO-KF, EtherCAT RJ45, DB15, Standard Calibration
100 Torr 45°C NW25 ISO-KF
da02a baratron ethercat 0.1 to 1000 torr heated capacitance manometer
Heated Capacitance Manometer, 1,000 Torr, 100°C, 8 VCR-F, EtherCAT RJ45, DB15, Standard Calibration
$2,290
3 Weeks
1000 Torr 100°C 8 VCR female
3 Weeks

Configuration Options

Description
  da02a baratron ethercat 0.1 to 1000 torr heated capacitance manometer DA02A Heated Capacitance Manometer, 0.1-1,000 Torr, EtherCAT®

Specifications

  • Type
    Digital Pressure Transducer
  • Sensor Type
    Capacitance Manometer
  • Measurement Type
    Absolute
  • Sensor Temperature
    Controlled to 45°C, 80°C or 100°C
  • Full Scale Pressure Ranges
    0.1, 0.25, 1, 2, 10, 20, 50, 100, 200, 500, and 1000 Torr (and metric equivalents)
  • Communication Protocol
    EtherCAT®
  • Analog Output
    0 - 10 VDC into >10Ω load
  • Analog Connector
    15-pin D-subminiature male
  • Digital Connector
    Two (2) RJ45 female receptacles for incoming and network signals
  • Accuracy
    45°C Models: 0.10% of Reading for ranges ≥1 Torr, 0.15% Reading for ranges <1 Torr
    80° and 100°C Models: 0.25% of Reading for ranges ≥1 Torr, 0.50% of Reading for ranges <1 Torr
  • Resolution
    0.001% Full Scale
  • Zero Temperature Coefficient
    45°C Models:0.002% Full Scale/°C for ranges ≥1 Torr; 0.005% Full Scale/°C for ranges <1 Torr
    80° and 100°C Models: 0.002% Full Scale/°C for ranges ≥1 Torr; 0.010% Full Scale/°C for ranges <1 Torr
  • Span Temperature Coefficient
    0.02% Reading/°C
  • Ambient Operating Temperature
    45°C Models: 15° to 40°C
    80° and 100°C Models: 15° to 50°C
  • Volume
    6.3 cc
  • Warm-up Time
    2 hours for ranges ≥1 Torr
    4 hours for ranges <1 Torr
  • Overpressure Limit
    45 psia (310 kPa)
  • Materials Exposed to Process Gases
    Inconel® and Incoloy® nickel alloys
  • Power Requirements
    +24 VDC ±10% (45°C Models 600 mA, 80° and 100°C Models 800 mA
  • Compliance
    2014/30/EU, 2011/65/EU

Features

Baratron® Capacitance Manometer Technology

Capacitance manometers are electro-mechanical gauges that can measure both pressure and vacuum. The capacitance gauge translates a pressure-modulated movement in a thin diaphragm into an electrical signal proportional to the pressure. The pressure sensor is the thin diaphragm that is exposed to the pressure or vacuum being measured via the inlet tube. An electrode is mounted in the reference cavity behind the diaphragm. Pressure differences between the process and the reference cavity deflect the diaphragm slightly, changing the distance between it and the electrode. Variations in this distance produce variations in the capacitance between the diaphragm and the electrode creating an electrical signal that is proportional to the pressure change. Since differences in the capacitance signal are produced by physical changes within the manometer and not by changes in the gas properties, pressure measurements by the capacitance manometer are independent of the composition of the gas being measured.

Gas independent pressure measurement with a Baratron® capacitance manometer. Schematic shows the internal components and functional zones.

Percent of Reading Accuracy

Accuracy is specified as a percent of Reading, not Full Scale, as seen in some of the lower performance devices. Percent of Reading accuracy provides you with an even more accurate output signal in the lower scale of the pressure range, where it is needed most.

Internally Heated to 45°C, 80°C or 100°C

These capacitance manometers are temperature controlled to 45°C, 80°C or 100°C for improved accuracy. Unheated versions are exposed to ambient temperature variations which can degrade the sensor accuracy. These devices have the sensor enclosed in a volume that is maintained at a constant temperature above ambient. This solution improves the manometer’s accuracy and repeatability and lowers instrument drift by reducing or eliminating process contamination within the manometer. Heated manometers are recommended for applications that require maximum accuracy and repeatability, operate above ambient temperature and for those processes that employ hot gases.

The pressure sensor is located inside a 45°C, 80°C or 100°C constant temperature oven for improved pressure measurement accuracy.

Absolute Pressure Measurement

These Baratron® pressure transducers are referenced to vacuum for absolute pressure measurement. Applications include: vacuum furnaces, freeze-drying of fruits and vegetables, gas lasers, automotive component testing, bottle coatings, and vacuum distillation.

Inconel® and Incoloy® Construction Wetted Surfaces

These pressure transducers feature Inconel® and Incoloy® nickel alloy construction of the pressure sensor allowing it to operate without damage in virtually any chemical environment, including halogens, deionized water and steam, and ozone. The sensor is fully welded with no intermediate brazing or joining materials.

0 to 10 VDC Proportional Analog Output

These Baratron® capacitance manometers feature a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements.

EtherCAT® Communications

These e-Baratron EtherCAT® enabled capacitance manometers continue the progression of high performance into networked systems, using industry-standard EtherCAT digital communications to connect to complex process tools. Based on the proven 627C and 628C Ethernet-equipped e-Baratron products, the EtherCAT e-Baratron manometer meets the current SEMI® EtherCAT Common Device Profile and is designed for use in advanced processing systems.

DA02A e-Baratron Pin-Outs

Pin Assignment
1 Reserved
2 Pressure Signal Output
3 No Connection
4 Reserved
5 Power Common
6 Reserved
7 +24 VDC
8 No Connection
9 Reserved
10 Reserved
11 +24 VDC
12 Pressure Signal Common
13 No Connection
14 Reserved
15 Chassis Ground

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