Corrosion resistant valves employ a patented technology to completely seal off the valve bellows while the valve is in the open processing position. A unique umbrella valve (vent valve) can be used to exhaust trapped gases if applicable. Manufactured using superior techniques and high-quality materials, the CRV Corrosion Resistant Vacuum Isolation Valve is extremely durable and dependable. It has a small profile, is light, low in cost and is easy to maintain.
CRV Vacuum Isolation Valves are available with the following options.
|Configuration Option||Option Code|
|CRV Vacuum Isolation Valve||CRV|
|Aluminum no vent||AN|
|Aluminum with vent||AV|
|Stainless Steel no vent||SN|
|Stainless Steel with vent||SV|
|No Limit Switch||N|
|Angle Body Heater||R6A|
|In-line Body Heater||R6I|
|Angle Body LTA Heater||L6A|
|In-line Body LTA Heater||L6I|
|24 VAC 50/60 Hz||24A|
|120 VAC 50/60 Hz||120|
|240 VAC 50/60 Hz||240|
|1/8 inch NPT||None|
Another standard feature is a TIG fusion welded vacuum grade body made of highly, corrosion resistant, 304 stainless steel, creating fewer entrapment areas, resulting in less contamination buildup. The Corrosion Resistant Valve is available in angle and inline configurations. Port sizes include NW 40 and NW 50 using maximum internal diameters for greater conductance. For leak tight operation, elastomer seals are available in Viton® for typical vacuum operating conditions, or Kalrez®, Chemraz®, Perlast® or Gumlast® for higher temperature conditions and increased chemical resistance.
The Corrosion and Ozone Resistant Valve is designed to provide long life in extremely harsh semiconductor or solar processes. This is achieved by shielding the thin wall bellows, limiting bellows exposure to corrosive or reactive gases. Typical processes that require a corrosion resistant valve are CVD and Etch. These processes use gases such as fluorine, chlorine, bromide or ozone. An aluminum shield is recommended for fluorine or ozone while a stainless shield should be used when chlorine or bromide are used. This valve can also be used in exhaust line applications to avoid corrosion of the valve bellows.