The C-Series Mass Flow Controller (MFC) is a compact, fast response model using a Micro-Electro-Mechanical Systems (MEMS) based flow sensor for non-corrosive gas applications. The device is available in Full Scale flow rates from 10 sccm to 10 slm (N2 equivalent) with a control range from as low as 0.1% of Full Scale up to 100% of Full Scale and is also available as a flow meter. Either analog (0 to 5 VDC) or digital (RS485, PROFINET® or Modbus TCP/IP) communication interfaces are available. The required power supply voltage is 24 VDC nominal.
The following options are available for C-Series Mass Flow Controllers & Meters
Ordering Code Example: CMA10B013102RCV1010
Gas (Per Semi Standard E52-0703)
|For other gases, contact MKS Instruments
Flow range is based on gas - see the Selection Table below.
Flow Range Full Scale
Fittings (compatible with)
|4 VCR Male||R|
|0.25 in. Compression||S|
|Downmount O-ring Seal||C|
|W-Seal (1.125 in. Wide Seal Configuration)||H|
|For other options, contact MKS Instruments|
|Dual I/O (Analog 9-Pin/RS485 ASCII) RS-485 Primary||R|
|Dual I/O (Analog 9-Pin/RS485 ASCII) Analog Primary||C|
|Normally Closed/Mass Flow Controller (MFC)||1|
|No Valve/Mass Flow Meter (Same length as MFC)||3|
|No Valve/Mass Flow Meter (Reduced Length)
Reduced length not available for W-Seal or Downmount O-ring Seal fittings
|Reserved (future use)|
|RS485/Analog Dual I/O||10|
C-Series MFCs are selected based on the gas and range desired. Use this table to determine the best model for your application:
|Gas SEMI#||Gas Symbol||Minimum Full Scale||Maximum Full Scale|
The C-Series compact design is only 1 inch (25.4 mm) and less than 4.4 inches (111.8 mm) high. It has standard lengths of 4.88 inches (124 mm) for 4 VCR® male and 4.54 inches (113 mm) for 0.25 inch compression seal gas line connections. Downmount versions are also available.
A low thermal mass MEMS sensor provides rapid sensing of flow changes with low noise output. The solid state design of the sensor makes it resistant to water condensation, particles, pressure shock and vibration.
Fast response, wide dynamic control range, and 0.8% of set point accuracy make this MFC an excellent choice for flow control in critical process applications where noncorrosive gases are used. Typical uses can be found in mass spectroscopy, vacuum coating, bioreactor as well as many other applications. The C-Series incorporates a fast-acting solenoid control valve coupled with the flow sensor via the MFC’s superior flow signal processing and control algorithm. This results in response times to set point of less than 100 milliseconds.