Specifications

  • Full Scale Flow Range
    50 - 50,000 sccm (N2 Equivalent)
  • Maximum Inlet Pressure
    80 psig
  • Normal Operating Pressure Differential
    50 to 5000 sccm: 10 - 45 psid
    10000 to 30000 sccm 15 - 45 psid
    50000 sccm 30 - 45 psid
  • Proof Pressure
    1000 psig
  • Burst Pressure
    1500 psig
  • Control Range
    Digital I/O: 0.1% to 100% of Full Scale
    Analog I/O: 0.2% to 100% of Full Scale
    (typical)
  • Typical Accuracy
    ±0.8% of set point for 20 to 100% Full Scale
    ±0.16% of Full Scale for <20% of Full Scale
    (with N2 calibration gas)
  • Repeatability
    ±0.2% of Reading
  • Zero Temperature Coefficient
    ≤0.005% of Full Scale/°C
  • Span Temperature Coefficient
    ≤0.06% of Reading/°C
  • Pressure Coefficient
    <0.025% of Reading/psi
  • Response Time
    ≤100 ms typical above 10% Full Scale, 50 sccm - 5 slm Full Scale models
    ≤150 ms typical above 10% Full Scale, 10 - 50 slm Full Scale models
    (per SEMI Guideline E-17-0600)
  • Warm-up Time
    ≤1 min
  • Operating Temperature
    10 - 50°C (32 - 122°F)
  • Storage Temperature
    0 - 60°C (32 - 140°F)
  • Fitting Type
    4 VCR male, surface mount (o-ring and w-seal), or 0.25 inch compression
  • External Leak Integrity
    <1 x 10-6
  • Leak Integrity Through Closed Valve
    <0.1% of max. Full Scale range using valve closed override command
    (to assure no flow-through, a separate positive shut-off valve is required)
  • Wetted Materials
    Aluminum, Stainless Steel, Silicon, Silicon Oxide, Silicon Carbide, Viton®, Glob Top
  • Seal Material
    Viton
  • Valve Position
    Normally closed
  • Power Requirements
    24 VDC (±10%)
  • Flow Input Output Signal
    0 to 5 VDC (0 to 10 VDC, optional)
  • Analog I/O Connector
    9-pin Type D
  • RS485 Input Power Required
    24 VDC (±10%)
  • RS485 Connector
    9-pin Type D male (power and comm.)
  • RS485 Data Rate Switch Selection
    No switch; Set data rate via RS485
  • RS485 MAC ID Switches Addresses
    Set address over RS485; Station addresses 0,0 to 9,9
  • RS485 Network Size
    Up to 32 nodes
  • RS485 Indicators
    LED PWR, RUN (green)
  • Weight
    310g (w/VCR fitting)
  • Compliance
    CE

Features

C-Series Overview

The C-Series compact design is only 1 inch (25.4 mm) and less than 4.4 inches (111.8 mm) high. It has standard lengths of 4.88 inches (124 mm) for 4 VCR® male and 4.54 inches (113 mm) for 0.25 inch compression seal gas line connections. Downmount versions are also available.

A low thermal mass MEMS sensor provides rapid sensing of flow changes with low noise output. The solid state design of the sensor makes it resistant to water condensation, particles, pressure shock and vibration. The C Series incorporates a fast-acting solenoid control valve coupled with the flow sensor via the MFC's superior flow signal processing and control algorithm. This results in response times to set point of less than 100 milliseconds.

Fast response, wide dynamic control range, and 1% of set point accuracy make this MFC an excellent choice for flow control in critical process applications where non-corrosive gases are used. Typical uses can be found in mass spectroscopy, vacuum coating, bioreactor as well as many other applications.

CMA10A or CMA50A?

CMA10A and CMA50A are selected based on the gas and range desired.  Use this table to determine the best model for your application:

CMA10A CMA50A
Gas SEMI# Gas Symbol Minimum Full Scale Maximum Full Scale Minimum Full Scale Maximum Full Scale
1 He 23 16000 16001 51000
4 Ar 40 23000 23001 49000
8 Air 15 14000 14001 50000
13 N2 15 14000 14001 50000
15 O2 14 13000 13001 51000
110 SF6 7 7300 7301 13000
129 C4F8 4 2100 N/A N/A

Resources

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