The C-Series Mass Flow Controller (MFC) is a compact, fast-response model using a Micro-Electro-Mechanical Systems (MEMS) based flow sensor for non-corrosive gas applications. It is available in Full Scale flow rates from 50 sccm to 50 slm (N2 equivalent) with a control range from as low as 0.1% of Full Scale up to 100% of Full Scale and is also available as a flow meter. Analog (0 to 5 VDC) or digital (RS485 or Modbus TCP/IP) communications interfaces are available. Required power supply voltage is 24 VDC nominal.
C-Series Mass Flow Controllers/Meters are available with the following options.
(type based on gas and range - see the Selection Table below)
|Gas (Per Semi Standard E52-0703)|
|For other gases, contact MKS Instruments|
|Flow Range Full Scale|
|Fittings (compatible with)|
|4 VCR Male||R|
|0.25 in. Compression||S|
|Downmount O-ring Seal||C|
|W-Seal (1.125 in. Wide Seal Configuration)||H|
|For other options, contact MKS Instruments|
|Dual I/O (Analog 9-Pin/RS485 ASCII) RS-485 Primary||R|
|Dual I/O (Analog 9-Pin/RS485 ASCII) Analog Primary||C|
|No Valve/MFM (Same length as MFC)||3|
|No Valve/MFM (Reduced Length)
Reduced length not available for W-Seal or Downmount O-ring Seal fittings
|Reserved (future use)|
|RS485/Analog Dual I/O||10|
The C-Series compact design is only 1 inch (25.4 mm) and less than 4.4 inches (111.8 mm) high. It has standard lengths of 4.88 inches (124 mm) for 4 VCR® male and 4.54 inches (113 mm) for 0.25 inch compression seal gas line connections. Downmount versions are also available.
A low thermal mass MEMS sensor provides rapid sensing of flow changes with low noise output. The solid state design of the sensor makes it resistant to water condensation, particles, pressure shock and vibration. The C Series incorporates a fast-acting solenoid control valve coupled with the flow sensor via the MFC's superior flow signal processing and control algorithm. This results in response times to set point of less than 100 milliseconds.
Fast response, wide dynamic control range, and 1% of set point accuracy make this MFC an excellent choice for flow control in critical process applications where non-corrosive gases are used. Typical uses can be found in mass spectroscopy, vacuum coating, bioreactor as well as many other applications.
CMA10A and CMA50A are selected based on the gas and range desired. Use this table to determine the best model for your application:
|Gas SEMI#||Gas Symbol||Minimum Full Scale||Maximum Full Scale||Minimum Full Scale||Maximum Full Scale|