Configuration Options

Description
  C-SERIES-MFC Mass Flow Controller, Compact, Ultrafast

Specifications

  • Full Scale Flow Range
    50 - 50,000 sccm (N2 Equivalent)
  • Maximum Inlet Pressure
    80 psig
  • Normal Operating Pressure Differential
    50 to 5000 sccm: 10 - 45 psid
    10000 to 30000 sccm 15 - 45 psid
    50000 sccm 30 - 45 psid
  • Proof Pressure
    1000 psig
  • Burst Pressure
    1500 psig
  • Control Range
    Digital I/O: 0.1% to 100% of Full Scale
    Analog I/O: 0.2% to 100% of Full Scale
    (typical)
  • Typical Accuracy
    ±0.8% of set point for 20 to 100% Full Scale
    ±0.16% of Full Scale for <20% of Full Scale
    (with N2 calibration gas)
  • Repeatability
    ±0.2% of Reading
  • Zero Temperature Coefficient
    ≤0.005% of Full Scale/°C
  • Span Temperature Coefficient
    ≤0.06% of Reading/°C
  • Pressure Coefficient
    <0.025% of Reading/psi
  • Response Time
    ≤100 ms typical above 10% Full Scale, 50 sccm - 5 slm Full Scale models
    ≤150 ms typical above 10% Full Scale, 10 - 50 slm Full Scale models
    (per SEMI Guideline E-17-0600)
  • Warm-up Time
    ≤1 min
  • Operating Temperature
    10 - 50°C (32 - 122°F)
  • Storage Temperature
    0 - 60°C (32 - 140°F)
  • Fitting Type
    4 VCR male, surface mount (o-ring and w-seal), or 0.25 inch compression
  • External Leak Integrity
    <1 x 10-6
  • Leak Integrity Through Closed Valve
    <0.1% of max. Full Scale range using valve closed override command
    (to assure no flow-through, a separate positive shut-off valve is required)
  • Wetted Materials
    Aluminum, Stainless Steel, Silicon, Silicon Oxide, Silicon Carbide, Viton®, Glob Top
  • Seal Material
    Viton
  • Valve Position
    Normally closed
  • Power Requirements
    24 VDC (±10%)
  • Flow Input Output Signal
    0 to 5 VDC (0 to 10 VDC, optional)
  • Analog I/O Connector
    9-pin Type D
  • RS485 Input Power Required
    24 VDC (±10%)
  • RS485 Connector
    9-pin Type D male (power and comm.)
  • RS485 Data Rate Switch Selection
    No switch; Set data rate via RS485
  • RS485 MAC ID Switches Addresses
    Set address over RS485; Station addresses 0,0 to 9,9
  • RS485 Network Size
    Up to 32 nodes
  • RS485 Indicators
    LED PWR, RUN (green)
  • Weight
    310g (w/VCR fitting)
  • Compliance
    CE

Features

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