New C-Series Compact Ultrafast 50-50,000 sccm Mass Flow Controller/Meter
Overview
The C-Series Mass Flow Controller (MFC) is a compact, fast-response model using a Micro-Electro-Mechanical Systems (MEMS) based flow sensor for non-corrosive gas applications. It is available in Full Scale flow rates from 50 sccm to 50 slm (N2 equivalent) with a control range from as low as 0.1% of Full Scale up to 100% of Full Scale and is also available as a flow meter. Analog (0 to 5 VDC) or digital (RS485 or Modbus TCP/IP) communications interfaces are available. Required power supply voltage is 24 VDC nominal.
- Ultrafast response time of <100 msec
- Control range from 0.1 to 100% of Full Scale
- Accuracy of ±0.8% of set point
- Minimal zero and span drift assure long term reproducibility
- Surface mount interface available for compact gas panel design
- Embedded web browser for setup and diagnostics
Products
Configuration Options
C-Series Mass Flow Controllers/Meters are available with the following options.
|
Configuration Option |
Option Code |
|---|---|
| Controller (type based on gas and range - see the Selection Table below) |
|
| CMA10A | CMA10A |
| CMA50A | CMA50A |
| Gas (Per Semi Standard E52-0703) | |
| He | 001 |
| Ar | 004 |
| Air | 008 |
| N2 | 013 |
| O2 | 015 |
| SF6 | 110 |
| C4F8 | 015 |
| For other gases, contact MKS Instruments | |
| Flow Range Full Scale | |
| 50 sccm | 501 |
| 100 sccm | 102 |
| 200 sccm | 202 |
| 500 sccm | 502 |
| 1000 sccm | 103 |
| 2000 sccm | 203 |
| 5000 sccm | 503 |
| 10000 sccm | 104 |
| 20000 sccm | 204 |
| 30000 sccm | 304 |
| 50000 sccm | 504 |
| Fittings (compatible with) | |
| 4 VCR Male | R |
| 0.25 in. Compression | S |
| Downmount O-ring Seal | C |
| W-Seal (1.125 in. Wide Seal Configuration) | H |
| For other options, contact MKS Instruments | |
| Connector | |
| Dual I/O (Analog 9-Pin/RS485 ASCII) RS-485 Primary | R |
| Dual I/O (Analog 9-Pin/RS485 ASCII) Analog Primary | C |
| Modbus TCP | M |
| Seal Materials | |
| Viton | V |
| Valve/Device Type | |
| Normally Closed/MFC | 1 |
| No Valve/MFM (Same length as MFC) | 3 |
| No Valve/MFM (Reduced Length) Reduced length not available for W-Seal or Downmount O-ring Seal fittings |
4 |
| Reserved (future use) | |
| Standard Build | 0 |
| Firmware | |
| RS485/Analog Dual I/O | 10 |
| Modbus TCP | 10 |
Specifications
-
Full Scale Flow Range50 - 50,000 sccm (N2 Equivalent)
-
Maximum Inlet Pressure80 psig
-
Normal Operating Pressure Differential50 to 5000 sccm: 10 - 45 psid
10000 to 30000 sccm 15 - 45 psid
50000 sccm 30 - 45 psid -
Proof Pressure1000 psig
-
Burst Pressure1500 psig
-
Control RangeDigital I/O: 0.1% to 100% of Full Scale
Analog I/O: 0.2% to 100% of Full Scale
(typical) -
Typical Accuracy±0.8% of set point for 20 to 100% Full Scale
±0.16% of Full Scale for <20% of Full Scale
(with N2 calibration gas) -
Repeatability±0.2% of Reading
-
Zero Temperature Coefficient≤0.005% of Full Scale/°C
-
Span Temperature Coefficient≤0.06% of Reading/°C
-
Pressure Coefficient<0.025% of Reading/psi
-
Response Time≤100 ms typical above 10% Full Scale, 50 sccm - 5 slm Full Scale models
≤150 ms typical above 10% Full Scale, 10 - 50 slm Full Scale models
(per SEMI Guideline E-17-0600) -
Warm-up Time≤1 min
-
Operating Temperature10 - 50°C (32 - 122°F)
-
Storage Temperature0 - 60°C (32 - 140°F)
-
Fitting Type4 VCR male, surface mount (o-ring and w-seal), or 0.25 inch compression
-
External Leak Integrity<1 x 10-6
-
Leak Integrity Through Closed Valve<0.1% of max. Full Scale range using valve closed override command
(to assure no flow-through, a separate positive shut-off valve is required) -
Wetted MaterialsAluminum, Stainless Steel, Silicon, Silicon Oxide, Silicon Carbide, Viton®, Glob Top
-
Seal MaterialViton
-
Valve PositionNormally closed
-
Power Requirements24 VDC (±10%)
-
Flow Input Output Signal0 to 5 VDC (0 to 10 VDC, optional)
-
Analog I/O Connector9-pin Type D
-
RS485 Input Power Required24 VDC (±10%)
-
RS485 Connector9-pin Type D male (power and comm.)
-
RS485 Data Rate Switch SelectionNo switch; Set data rate via RS485
-
RS485 MAC ID Switches AddressesSet address over RS485; Station addresses 0,0 to 9,9
-
RS485 Network SizeUp to 32 nodes
-
RS485 IndicatorsLED PWR, RUN (green)
-
Weight310g (w/VCR fitting)
-
ComplianceCE
Resources
Manuals
- C-Series Mass Flow Controller Pin-outs (94 kB, PDF)
- C-Series MFC Modbus Register Map & Specification (135.9 kB, PDF)
- C-Series Mass Flow Controller Manual (2 MB, PDF)
Literature
- C-Series Mass Flow Controllers & Meters (717.3 kB, PDF)
Ultra-High Velocity