COVID-19 Coronavirus Information – Travel, health & safety precautions for MKS employees & partners. Learn More
903 Inverted Magnetron Cold Cathode Vacuum Transducer
Overview
- Wide pressure measurement range from 3 x 10-10 to 5 x 10-3 Torr
- Integrated electronics for space and cost savings
- Isolated ion collector increases sensor’s resistance to effects of contamination
- High voltage can be deactivated at higher pressures to lower risk of sensor contamination
- One set point with LED status indicator is standard for process control
- No filament to burn out for low maintenance
Products
| Compare | Model | Drawings, CAD & Specs | Availability | Price | |||
|---|---|---|---|---|---|---|---|
|
109030001 Cold Cathode Vacuum Transducer, Inverted Magnetron, NW40 ISO-KF | $1,100 |
|
||||
|
|
109030002 Cold Cathode Vacuum Transducer, Inverted Magnetron, 2.75 in. CF | $1,125 |
|
||||
|
|
109030003 Cold Cathode Vacuum Transducer, Inverted Magnetron, 1 in. Tube | $1,100 |
|
||||
|
|
109030004 Cold Cathode Vacuum Transducer, Inverted Magnetron, NW25 ISO-KF | $1,100 |
|
Specifications
-
Sensor TypeInverted Magnetron Cold Cathode
-
Installation OrientationAny
-
Measurement Range3 x 10-10 to 5 x 10-3 Torr
-
Set Point Range3 x 10-10 to 5 x 10-3 Torr (standard 903 only)
-
RepeatabilityApproximately 5% of reading
-
Calibration GasAir, Nitrogen
-
Connector9-pin Type "D"
-
Operating Temperature0° to 50° C (32° to 122° F)
-
Bake Out Temperature400° C (752° F) without electronics
-
Relative Humidity80% maximum for temperatures less than 31° C, decreasing linearly to 50% maximum at 40° C
-
Relays1 SPDT relay set point (standard 903 only)
-
Relay Contact Rating1 A @ 30 VDC, resistive
-
Relay Response< 50 msec (0 to 99%) for Δp from 5.0 x 10-8 to 3.0 x 10-4 Torr
-
Power Requirements14 to 30 VDC, 3 Watts max
-
Voltages903 (Standard): 1.5 to 8.7 VDC
903 (AP): 0.5 to 7.7 VDC -
Exposed Materials304 and 302 stainless steel, aluminum, Inconel® x-750, glass, alumina ceramic
-
Case MaterialABS plastic, UL94-5V flame rating (with conductive coating)
-
Internal Volume15.0 cc
-
Weight2.3 lb (1.04 kg) with CF Flange
-
Display903 (Standard) LED Indications: Set point (red), high voltage (yellow), and power (green)
903 (AP) LED Indications: Vacuum (red), high voltage (yellow), and power (green) -
ComplianceCE
Features
Process Control Relay
The Standard 903 has one relay set point standard for process control that can be set to trip anywhere within its set point range. Set point activation status is shown with one of three LED indicators. Power and high voltage status are also indicated.
High Voltage Activation
The high voltage activation feature is a convenient way for you to shut off power to the 903 locally without shutting down your entire system. Deactivating the high voltage at pressures above 10-2 Torr reduces the effects of contamination in the sensor.
Resources
Manuals
- 900 Series Vacuum Transducer USB Adapter Manual (129.6 kB, PDF)
- 903 Vacuum Sensor Manual (263.6 kB, PDF)
- 903 Vacuum Transducer Pin-outs (27.7 kB, PDF)
Literature
Other
- 903 Transducer Declaration of Conformity (100009299) (119.5 kB, PDF)
Drawings And Cad
- 903 Vacuum Transducer Dimensional Drawing (92.7 kB, PDF)
Ultra-High Velocity 