The Differential Pump System by Granville-Phillips® extends the vacuum pressure range of the award-winning, high performance Vacuum Quality Monitor (VQM™) to address the needs of process monitoring and process control applications at pressures up to 3 Torr. All the benefits of the VQM, including speed and ease of use, can now be used to optimize PVD, ion implant, coating, and other vacuum processes to increase productivity, improve results, and save money.
|Compare||Model||Drawings, CAD & Specs||Availability||Price|
|835901-DP-1M1-1 Differential Pumping System, Orifice 3, 90 - 3000 mTorr, Manual, 1 - 145 amu||$24,045||
|835901-DP-2P1-1 Differential Pumping System, Orifice 2, 9 - 350 mTorr, Pneumatic, 1 - 145 amu||$25,830||
|835901-DP-3M1-1 Differential Pumping System, Orifice 3, 1 - 45 mTorr, Manual, 1 - 145 amu||$24,045||
|835901-DP-3M3-1 Differential Pumping System, Orifice 3, 1 - 45 mTorr, Manual, 1 - 300 amu||$26,355||
A pressure differential between the vacuum chamber and the VQM gauge is achieved by limiting the conductance to the sensor using an orifice in the gate valve and pumping the sensor with a turbo pump. The orifice size is specified based on the pressure in the vacuum chamber. The bypass gate valve can be opened during base out if the chamber is below 10-5 Torr. If base out is above 1x10-5 Torr, the bypass valve is not needed. The bypass valve can be controlled manually or electronically. An optional isolation valve can be used to isolate the entire differentially pumped system from your vacuum chamber when venting the chamber or when gas analysis is not needed.
The 835 DPS complete system includes the following components:
Autoresonant ion trap mass spectrometer technology represents an entirely new way of mass selectively ejecting ions from an electrostatic ion trap. The 835 VQM mass spectrometer gauge is natively a ratiometric measurement device that provides detailed compositional analysis of a gas mixture. The ionizer is a filament assembly that generates ions directly inside the ion trap through electron impact ionization. An electrostatic field traps the ions, and they oscillate at their natural frequency within the ion trap. The frequency of oscillation is inversely proportional to the square root of their mass-to-charge ratio. The ions are ejected through an autoresonant energy pumping process using a low amplitude RF scan. An electron multiplier collects the ejected ions and produces a current proportional to the ion concentration.