Granville-Phillips® 835 Differential Pump System

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835 vacuum quality monitor differential pump system

Overview

The Differential Pump System by Granville-Phillips® extends the vacuum pressure range of the award-winning, high performance Vacuum Quality Monitor (VQM™) to address the needs of process monitoring and process control applications at pressures up to 3 Torr. All the benefits of the VQM, including speed and ease of use, can now be used to optimize PVD, ion implant, coating, and other vacuum processes to increase productivity, improve results, and save money.

Operation from 3 Torr to 5x10^-9 Torr
1-145 amu partial pressure measurement in 85 ms, 1-300 amu available
Instant information on the 10 most prevalent gases including trend graphs
Accurate hydrogen and helium measurements (no zero blast)
Data logging at 85 ms sample rates
Easy single-gas calibration using a gas already in your vacuum system

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Products

Compare	Model	Compatibility	rankScore	Mass Range	Pressure Range	Type	Availability	Price
835901-DPS-1M1-1 Differential Pumping System, Orifice 3, 90 - 3000 mTorr, Manual, 1 - 145 amu $22,900 Contact Us	835901-DPS-1M1-1 Differential Pumping System, Orifice 3, 90 - 3000 mTorr, Manual, 1 - 145 amu	UNIVERSAL	1.0	1 - 145 amu	3 Torr to 10^-5 Torr through orifice, to 5x10^-9 Torr through bypass gate valve	VQM Differential Pumping System	Contact Us	$22,900
835901-DPS-2P1-1 Differential Pumping System, Orifice 2, 9 - 350 mTorr, Pneumatic, 1 - 145 amu $24,600 Contact Us	835901-DPS-2P1-1 Differential Pumping System, Orifice 2, 9 - 350 mTorr, Pneumatic, 1 - 145 amu	UNIVERSAL	1.0	1 - 300 amu	3 Torr to 10^-5 Torr through orifice, to 5x10^-9 Torr through bypass gate valve	VQM Differential Pumping System	Contact Us	$24,600
835901-DPS-3M1-1 Differential Pumping System, Orifice 3, 1 - 45 mTorr, Manual, 1 - 145 amu $22,900 Contact Us	835901-DPS-3M1-1 Differential Pumping System, Orifice 3, 1 - 45 mTorr, Manual, 1 - 145 amu	UNIVERSAL	1.0	1 - 145 amu	3 Torr to 10^-5 Torr through orifice, to 5x10^-9 Torr through bypass gate valve	VQM Differential Pumping System	Contact Us	$22,900
835901-DPS-3M3-1 Differential Pumping System, Orifice 3, 1 - 45 mTorr, Manual, 1 - 300 amu $25,100 Contact Us	835901-DPS-3M3-1 Differential Pumping System, Orifice 3, 1 - 45 mTorr, Manual, 1 - 300 amu	UNIVERSAL	1.0	1 - 300 amu	3 Torr to 10^-5 Torr through orifice, to 5x10^-9 Torr through bypass gate valve	VQM Differential Pumping System	Contact Us	$25,100

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Specifications

Mass Range

1 to 145 amu or 1 to 300 amu
Operating Temperature

5°C to 40°C (41°F to 104°F)
Weight

10.88 Kg (24 pounds) plus the weight of the gate valve
Pressure Range

3 Torr to 10-5 Torr through orifice, to 5x10^-9 Torr through bypass gate valve

Resolution

120 Full Width Half Maximum (FWHM), 180 resolution for the 300 amu system
Response Time

85 ms (1–145 amu) or 120 ms (1-300 amu)
Dynamic Range

2 decades for single scan, 3 or more with averaging
Exposed Materials

304L Stainless Steel, 316L Stainless Steel, Alumina Ceramic, Al2O3 98% Min., Nickel, Molybdenum, Ag/Cu eutectic braze, Gold, Iridium, Yttria, Y2O3 99.95%, Lead Glass (multiplier body), Chromium, Viton, Copper

Specifications

Mass Range

1 to 145 amu or 1 to 300 amu
Operating Temperature

5°C to 40°C (41°F to 104°F)
Weight

10.88 Kg (24 pounds) plus the weight of the gate valve
Pressure Range

3 Torr to 10-5 Torr through orifice, to 5x10^-9 Torr through bypass gate valve

Resolution

120 Full Width Half Maximum (FWHM), 180 resolution for the 300 amu system
Response Time

85 ms (1–145 amu) or 120 ms (1-300 amu)
Dynamic Range

2 decades for single scan, 3 or more with averaging
Exposed Materials

304L Stainless Steel, 316L Stainless Steel, Alumina Ceramic, Al2O3 98% Min., Nickel, Molybdenum, Ag/Cu eutectic braze, Gold, Iridium, Yttria, Y2O3 99.95%, Lead Glass (multiplier body), Chromium, Viton, Copper

Features

Differential Pumping Operation

Standard VQM Differential Pump System Setup

A pressure differential between the vacuum chamber and the VQM gauge is achieved by limiting the conductance to the sensor using an orifice in the gate valve and pumping the sensor with a turbo pump. The orifice size is specified based on the pressure in the vacuum chamber. The bypass gate valve can be opened during base out if the chamber is below 10^-5 Torr. If base out is above 1x10^-5 Torr, the bypass valve is not needed. The bypass valve can be controlled manually or electronically. An optional isolation valve can be used to isolate the entire differentially pumped system from your vacuum chamber when venting the chamber or when gas analysis is not needed.

The 835 DPS complete system includes the following components:

835 VQM Partial Pressure Gauge
390802 Micro-Ion Total Pressure Gauge
Bypass Gate Valve with Orifice
Turbo Pump
Roughing Pump with Hose
Interconnect Cables
VQM Controller
VQM Viewer Software

Vacuum Quality Monitor Theory of Operation

Autoresonant ion trap mass spectrometer technology represents an entirely new way of mass selectively ejecting ions from an electrostatic ion trap. The 835 VQM mass spectrometer gauge is natively a ratiometric measurement device that provides detailed compositional analysis of a gas mixture. The ionizer is a filament assembly that generates ions directly inside the ion trap through electron impact ionization. An electrostatic field traps the ions, and they oscillate at their natural frequency within the ion trap. The frequency of oscillation is inversely proportional to the square root of their mass-to-charge ratio. The ions are ejected through an autoresonant energy pumping process using a low amplitude RF scan. An electron multiplier collects the ejected ions and produces a current proportional to the ion concentration.