Compare Model Drawings, CAD & Specs Full Scale Range Accuracy Calibration Availability Price
698a baratron heated reference differential capacitance manometer
Differential Pressure Transducer, 45C, 0.1 Torr, 0.08%, Unidirectional
$4,550
3 Weeks
0.1 Torr 0.08% of Reading Unidirectional
3 Weeks
698a baratron heated reference differential capacitance manometer
Differential Pressure Transducer, 45C, 0.1 Torr, 0.12%, Unidirectional
$4,250
3 Weeks
0.1 Torr 0.12% of Reading Unidirectional
3 Weeks
698a baratron heated reference differential capacitance manometer
Differential Pressure Transducer, 45C, 1 Torr, 0.05%, Unidirectional
$4,300
3 Weeks
1 Torr 0.05% of Reading Unidirectional
3 Weeks
698a baratron heated reference differential capacitance manometer
Differential Pressure Transducer, 45C, 1 Torr, 0.08%, Unidirectional
$4,025
3 Weeks
1 Torr 0.08% of Reading Unidirectional
3 Weeks
698a baratron heated reference differential capacitance manometer
Differential Pressure Transducer, 45C, 1 Torr, 0.12%, Unidirectional
$3,725
3 Weeks
1 Torr 0.12% of Reading Unidirectional
3 Weeks
698a baratron heated reference differential capacitance manometer
Differential Pressure Transducer, 45C, 1 Torr, 0.15%, Bidirectional
$4,025
3 Weeks
1 Torr 0.15% of Reading Bidirectional
3 Weeks
698a baratron heated reference differential capacitance manometer
Differential Pressure Transducer, 45C, 1 Torr, 0.25%, Bidirectional
$3,725
3 Weeks
1 Torr 0.25% of Reading Bidirectional
3 Weeks
698a baratron heated reference differential capacitance manometer
Differential Pressure Transducer, 45C, 10 Torr, 0.05%, Unidirectional
$4,300
3 Weeks
10 Torr 0.05% of Reading Unidirectional
3 Weeks
698a baratron heated reference differential capacitance manometer
Differential Pressure Transducer, 45C, 10 Torr, 0.08%, Unidirectional
$4,025
3 Weeks
10 Torr 0.08% of Reading Unidirectional
3 Weeks
698a baratron heated reference differential capacitance manometer
Differential Pressure Transducer, 45C, 10 Torr, 0.12%, Unidirectional
$3,725
3 Weeks
10 Torr 0.12% of Reading Unidirectional
3 Weeks
698a baratron heated reference differential capacitance manometer
Differential Pressure Transducer, 45C, 10 Torr, 0.15%, Bidirectional
$4,025
3 Weeks
10 Torr 0.15% of Reading Bidirectional
3 Weeks
698a baratron heated reference differential capacitance manometer
Differential Pressure Transducer, 45C, 10 Torr, 0.25%, Bidirectional
$3,725
3 Weeks
10 Torr 0.25% of Reading Bidirectional
3 Weeks
698a baratron heated reference differential capacitance manometer
Differential Pressure Transducer, 45C, 100 Torr, 0.05%, Unidirectional
$4,300
3 Weeks
100 Torr 0.05% of Reading Unidirectional
3 Weeks
698a baratron heated reference differential capacitance manometer
Differential Pressure Transducer, 45C, 100 Torr, 0.08%, Unidirectional
$4,025
3 Weeks
100 Torr 0.08% of Reading Unidirectional
3 Weeks
698a baratron heated reference differential capacitance manometer
Differential Pressure Transducer, 45C, 100 Torr, 0.12%, Unidirectional
$3,725
3 Weeks
100 Torr 0.12% of Reading Unidirectional
3 Weeks
698a baratron heated reference differential capacitance manometer
Differential Pressure Transducer, 45C, 100 Torr, 0.15%, Bidirectional
$4,025
3 Weeks
100 Torr 0.15% of Reading Bidirectional
3 Weeks
698a baratron heated reference differential capacitance manometer
Differential Pressure Transducer, 45C, 100 Torr, 0.25%, Bidirectional
$3,725
3 Weeks
100 Torr 0.25% of Reading Bidirectional
3 Weeks
698a baratron heated reference differential capacitance manometer
Differential Pressure Transducer, 45C, 1000 Torr, 0.05%, Unidirectional
$4,300
3 Weeks
1000 Torr 0.05% of Reading Unidirectional
3 Weeks
698a baratron heated reference differential capacitance manometer
Differential Pressure Transducer, 45C, 1000 Torr, 0.08%, Unidirectional
$4,025
3 Weeks
1000 Torr 0.08% of Reading Unidirectional
3 Weeks
698a baratron heated reference differential capacitance manometer
Differential Pressure Transducer, 45C, 1000 Torr, 0.12%, Unidirectional
$3,725
3 Weeks
1000 Torr 0.12% of Reading Unidirectional
3 Weeks
698a baratron heated reference differential capacitance manometer
Differential Pressure Transducer, 45C, 1000 Torr, 0.15%, Bidirectional
$4,025
3 Weeks
1000 Torr 0.15% of Reading Bidirectional
3 Weeks
698a baratron heated reference differential capacitance manometer
Differential Pressure Transducer, 45C, 1000 Torr, 0.25%, Bidirectional
$3,725
3 Weeks
1000 Torr 0.25% of Reading Bidirectional
3 Weeks

Product Options

Description
  698a baratron heated reference differential capacitance manometer 698A Differential Capacitance Manometer, 0.1-1000 Torr, 45°C, 4 VCR female

Specifications

  • Type
    Pressure Transducer
  • Sensor Type
    Reference Capacitance Manometer
  • Measurement Type
    Differential
  • Full Scale Pressure Ranges
    0.1, 1, 10, 100, 1000 Torr
  • Sensor Temperature
    Controlled to 45°C
  • Fitting Type
    Swagelok 4 VCR® female
  • Resolution
    1x10-6 of Full Scale
  • Calibration
    Unidirectional or Bidirectional
  • Electrical Connector
    15-pin D-sub
  • Zero Temperature Coefficient
    1-1000 Torr Ranges: 15 PPM, Full Scale/°C (at 0.12% of Rdg accuracy)
    0.1 Torr range: <30 PPM, Full Scale/°C
  • Span Temperature Coefficient
    1-1000 Torr Ranges: 0.002% Reading/°C
    0.1 Torr Range: <0.010% Reading/°C
  • Maximum Line Pressure
    150 psig
  • Materials Exposed to Process Gases
    Inconel® and 304 stainless steel
  • Reference Side (PR) Media Compatibility
    Any dry gas compatible with Inconel®, 304/306 SS, Fosterite, Palladium
  • Measurement Side (Px) Media Compatibility
    Any gas compatible with Inconel®, 304 stainless steel
  • Volume
    Measurement Side (Px): 3.5 cc
    Reference Side (PR): 25 cc
  • Time Constant with Signal Conditioner
    Fast Position: 25 ms
    Standard Position: 40 ms
    Slow Position: 400 ms

Features

Baratron® Capacitance Manometer Technology

Capacitance manometers are electro-mechanical gauges that can measure both pressure and vacuum. The capacitance gauge translates a pressure-modulated movement in a thin diaphragm into an electrical signal proportional to the pressure. The pressure sensor is the thin diaphragm that is exposed to the pressure or vacuum being measured via the inlet tube. An electrode is mounted in the reference cavity behind the diaphragm. Pressure differences between the process and the reference cavity deflect the diaphragm slightly, changing the distance between it and the electrode. Variations in this distance produce variations in the capacitance between the diaphragm and the electrode creating an electrical signal that is proportional to the pressure change. Since differences in the capacitance signal are produced by physical changes within the manometer and not by changes in the gas properties, pressure measurements by the capacitance manometer are independent of the composition of the gas being measured.

Capacitance manometer sensor schematic showing the internal components

Percent of Reading Accuracy

Accuracy is specified as a percent of Reading, not Full Scale, as seen in some of the lower performance devices. Percent of Reading accuracy provides you with an even more accurate output signal in the lower scale of the pressure range, where it is needed most.

Internally Heated to 45°C

These capacitance manometers are temperature controlled to 45°C for improved accuracy. Unheated versions are exposed to ambient temperature variations which can degrade the sensor accuracy. These devices have the sensor enclosed in a volume that is maintained at a constant temperature above ambient. This solution improves the manometer’s accuracy and repeatability and lowers instrument drift by reducing or eliminating process contamination within the manometer. Heated manometers are recommended for applications that require maximum accuracy and repeatability, operate above ambient temperature and for those processes that employ hot gases.

The pressure sensor is located inside a 45°C constant temperature oven for improved pressure measurement accuracy.

Differential Pressure Measurement

Differential capacitance manometers can be connected to any pressure or vacuum source for use as the reference pressure. These manometers read the difference in pressure between the inlet tube and the reference cavity at the backside of the electrode. Differential pressure transducers can be used to measure either the true differential pressure or vacuum between two locations, or the reference side of the product can be left open to provide a true reference to local atmospheric pressure. Applications include air and gas flow measurements for filters and analytical systems, downstream pressure control in thin film processing systems, and automated leak testing systems.

All-Inconel® Wetted Surfaces

These pressure transducers feature all Inconel® construction of the pressure sensor allowing it to operate without damage in virtually any chemical environment, including exposure to halogens, deionized water and steam, and ozone.

0 to 10 VDC Proportional Analog Output

These Baratron® capacitance manometers feature a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements.

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