Specifications

  • Type
    653B Exhaust Throttle Valve
  • Operating Temperature
    Standard: 0 - 100°C 0 - 90°C
    Optional: 0 - 150°C
  • Valve Motor Ambient Operating Temperature
    -20 to +40°C
  • Exposed Materials
    Standard: 316L S.S., Viton®
  • Closed Leakage
    <10-7 (Torr l/s)
  • Valve Speed
    1.7 sec
  • Resolution
    1/12,000
  • Drive
    Direct gear drive
  • Differential Pressure Across Valve
    1 atm. (15 psig) max.

Features

Flapper Positioning or Pressure Control

The Type 683 Throttle Valve operates in two modes: flapper positioning or pressure control, either of which can be user-activated through the network communications interface. All of the adjustable setup parameters, run time operation, and diagnostics information is available through the network communications interface. The Type 683 also includes adjustable soft-start functions for set point changes to minimize turbulence and thus particle distribution in the chamber. Two alarm relay outputs are fully adjustable to trip at specified pressure, valve position or set point deviation settings. The Type 683 is designed to be compatible with MKS Digital Baratron® Capacitance Manometers to offer all of the components required to perform closed-loop pressure control over the network. Alternately, the Type 683 will accept a 0-10 VDC signal from a traditional analog Baratron Capacitance Manometer for closed-loop control.

This downstream pressure control technique provides wide dynamic range, works with all types of pumps, provides fast response, and is tolerant to most effluent gases.

DeviceNet™ Communications

The 683B communicates using DeviceNet™, a high performance communication link based on a broadcast-oriented protocol called Controller Area Network (CAN). The DeviceNet protocol, is easy to install and provides a simple and economical way for instruments and controllers to be interoperable on a network. The “intelligent instrument” concept results in valuable system space savings, improved noise immunity, and easy access to time-critical process and calibration information as well as on-board diagnostic functions. System design, installation, maintenance, and labor costs are reduced as compared to the traditional analog I/O.

Direct-drive Valve Design

The Type 683 is based on the field-proven Type 253 valve, a direct-drive design with no belts to wear or slip, thereby improving performance. The valve driver includes a unique cosine generator placed between the flapper shaft and the motor drive shaft which generates a more linear valve transfer characteristic and provides high resolution pressure control. The robust, high torque motor provides extended uptime and reduces preventative maintenance cycles — a great advantage in demanding processes where just one hour of downtime can cost thousands of dollars.

The valve is constructed of corrosion-resistant 316 stainless steel for the toughest process gases and is available in standard ISO-KF and MF flange styles with bore sizes from ¾” to 4” (20-100 mm). Consult factory for availability of additional flange styles. Standard seals offered are Viton®, alternate materials can be specified for compatibility with various process chemistries.

Software Functions

  • Pressure control or position control mode
  • Set control tuning parameters - gain, lead
  • Set points for pressure and position control
  • Soft start mode with user-definable ramp rate
  • Adjust trip points for pressure, position, or set point deviation
  • Adjustable trip point direction, hysteresis
  • Manual override to open or close valve
  • Learn valve steps and drive limits
  • Report pressure from external transducer
  • Report HW/SW revision, serial and model numbers
  • Report valve cycles and run hours

Resources

Literature
Manuals
Device Description Files

Need help?

Contact an Applications Specialist by sending us an email