The 683B intelligent exhaust throttle valve integrates all control, communication, and driver circuits via a compact “add-on” electronics module onto an MKS Type 253 throttle valve assembly, thereby eliminating the need for mounting a separate pressure control electronics module. The second generation PID control algorithm can be tuned to drive the system to set point fast and with minimum overshoot, and ensures repeatable process recipes without operator involvement. The loop tuning parameters are completely adjustable to accommodate variations in system parameters.
683B Intelligent Exhaust Throttle Valves are available with the following options.
|Configuration Option||Option Code|
683B Intelligent Exhaust Throttle Valve
|Valve Bore/Flange Size|
|20 mm/NW40 ISO-KF||20K|
|1 in./NW40 ISO-KF||01K|
|2 in./NW50 ISO-KF||02K|
|MKS will ship the current firmware revision||VV|