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640B Integrated Absolute Pressure Controllers

Overview
Products
Configuration Options
Features
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Overview

The 640B absolute pressure controllers is a self contained, compact, closed-loop electronic pressure control system containing a Baratron® capacitance manometer, normally closed proportioning control valve, and closed-loop control electronics. Electrically similar to a standard MFC, the 640B is powered by ±15 VDC at only 200 mA, permitting use with standard power supply and display electronics. The pressure output and input control signals are linear 0-5 or 0-10 VDC. Two trip points with LED status indicators are for use as simple on/off process limits.

Integrated Baratron® capacitance manometer technology
Full Scale ranges as low as 10 Torr for low pressure processes
Can be used with upstream or downstream controller applications
Two alarm trip points for process limit control

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Products

Compare	Model	Compatibility	rankScore	Pressure Range	Flow Rate	Availability	Price
640B11TW1M12M Absolute Pressure Controller, 10 Torr, 200 sccm, 4 VCR-M, Metal Seal, Metal Valve Plug $2,950 3 Weeks	640B11TW1M12M Absolute Pressure Controller, 10 Torr, 200 sccm, 4 VCR-M, Metal Seal, Metal Valve Plug	UNIVERSAL	1.0	10 Torr	200 sccm	3 Weeks	$2,950
640B11TW1M12V Absolute Pressure Controller, 10 Torr, 200 sccm, 4 VCR-M, Metal Seal, Viton Valve Plug $2,950 3 Weeks	640B11TW1M12V Absolute Pressure Controller, 10 Torr, 200 sccm, 4 VCR-M, Metal Seal, Viton Valve Plug	UNIVERSAL	1.0	10 Torr	200 sccm	3 Weeks	$2,950
640B11TW1M22M Absolute Pressure Controller, 10 Torr, 1000 sccm, 4 VCR-M, Metal Seal, Metal Valve Plug $2,950 3 Weeks	640B11TW1M22M Absolute Pressure Controller, 10 Torr, 1000 sccm, 4 VCR-M, Metal Seal, Metal Valve Plug	UNIVERSAL	1.0	10 Torr	1000 sccm	3 Weeks	$2,950
640B11TW1M22V Absolute Pressure Controller, 10 Torr, 1000 sccm, 4 VCR-M, Metal Seal, Viton Valve Plug $2,950 3 Weeks	640B11TW1M22V Absolute Pressure Controller, 10 Torr, 1000 sccm, 4 VCR-M, Metal Seal, Viton Valve Plug	UNIVERSAL	1.0	10 Torr	1000 sccm	3 Weeks	$2,950
640B11TW1M32M Absolute Pressure Controller, 10 Torr, 5000 sccm, 4 VCR-M, Metal Seal, Metal Valve Plug $2,950 3 Weeks	640B11TW1M32M Absolute Pressure Controller, 10 Torr, 5000 sccm, 4 VCR-M, Metal Seal, Metal Valve Plug	UNIVERSAL	1.0	10 Torr	5000 sccm	3 Weeks	$2,950
640B12TW1M12M Absolute Pressure Controller, 100 Torr, 200 sccm, 4 VCR-M, Metal Seal, Metal Valve Plug $2,950 3 Weeks	640B12TW1M12M Absolute Pressure Controller, 100 Torr, 200 sccm, 4 VCR-M, Metal Seal, Metal Valve Plug	UNIVERSAL	1.0	100 Torr	200 sccm	3 Weeks	$2,950
640B12TW1M22M Absolute Pressure Controller, 100 Torr, 1000 sccm, 4 VCR-M, Metal Seal, Metal Valve Plug $2,950 3 Weeks	640B12TW1M22M Absolute Pressure Controller, 100 Torr, 1000 sccm, 4 VCR-M, Metal Seal, Metal Valve Plug	UNIVERSAL	1.0	100 Torr	1000 sccm	3 Weeks	$2,950
640B12TW1M22V Absolute Pressure Controller, 100 Torr, 1000 sccm, 4 VCR-M, Metal Seal, Viton Valve Plug $2,950 3 Weeks	640B12TW1M22V Absolute Pressure Controller, 100 Torr, 1000 sccm, 4 VCR-M, Metal Seal, Viton Valve Plug	UNIVERSAL	1.0	100 Torr	1000 sccm	3 Weeks	$2,950
640B12TW1M32M Absolute Pressure Controller, 100 Torr, 5000 sccm, 4 VCR-M, Metal Seal, Metal Valve Plug $2,950 3 Weeks	640B12TW1M32M Absolute Pressure Controller, 100 Torr, 5000 sccm, 4 VCR-M, Metal Seal, Metal Valve Plug	UNIVERSAL	1.0	100 Torr	5000 sccm	3 Weeks	$2,950
640B12TW1V12V Absolute Pressure Controller, 100 Torr, 200 sccm, 4 VCR-M, Viton Seal, Viton Valve Plug $2,525 3 Weeks	640B12TW1V12V Absolute Pressure Controller, 100 Torr, 200 sccm, 4 VCR-M, Viton Seal, Viton Valve Plug	UNIVERSAL	1.0	100 Torr	200 sccm	3 Weeks	$2,525
640B12TW1V22V Absolute Pressure Controller, 100 Torr, 1000 sccm, 4 VCR-M, Viton Seal, Viton Valve Plug $2,525 3 Weeks	640B12TW1V22V Absolute Pressure Controller, 100 Torr, 1000 sccm, 4 VCR-M, Viton Seal, Viton Valve Plug	UNIVERSAL	1.0	100 Torr	1000 sccm	3 Weeks	$2,525
640B12TW1V32V Absolute Pressure Controller, 100 Torr, 5000 sccm, 4 VCR-M, Viton Seal, Viton Valve Plug $2,525 3 Weeks	640B12TW1V32V Absolute Pressure Controller, 100 Torr, 5000 sccm, 4 VCR-M, Viton Seal, Viton Valve Plug	UNIVERSAL	1.0	100 Torr	5000 sccm	3 Weeks	$2,525
640B13TW1M12M Absolute Pressure Controller, 1000 Torr, 200 sccm, 4 VCR-M, Metal Seal, Metal Valve Plug $2,950 3 Weeks	640B13TW1M12M Absolute Pressure Controller, 1000 Torr, 200 sccm, 4 VCR-M, Metal Seal, Metal Valve Plug	UNIVERSAL	1.0	1000 Torr	200 sccm	3 Weeks	$2,950
640B13TW1M22M Absolute Pressure Controller, 1000 Torr, 1000 sccm, 4 VCR-M, Metal Seal, Metal Valve Plug $2,950 3 Weeks	640B13TW1M22M Absolute Pressure Controller, 1000 Torr, 1000 sccm, 4 VCR-M, Metal Seal, Metal Valve Plug	UNIVERSAL	1.0	1000 Torr	1000 sccm	3 Weeks	$2,950
640B13TW1M32M Absolute Pressure Controller, 1000 Torr, 5000 sccm, 4 VCR-M, Metal Seal, Metal Valve Plug $2,950 3 Weeks	640B13TW1M32M Absolute Pressure Controller, 1000 Torr, 5000 sccm, 4 VCR-M, Metal Seal, Metal Valve Plug	UNIVERSAL	1.0	1000 Torr	5000 sccm	3 Weeks	$2,950
640B13TW1V12V Absolute Pressure Controller, 1000 Torr, 200 sccm, 4 VCR-M, Viton Seal, Viton Valve Plug $2,525 3 Weeks	640B13TW1V12V Absolute Pressure Controller, 1000 Torr, 200 sccm, 4 VCR-M, Viton Seal, Viton Valve Plug	UNIVERSAL	1.0	1000 Torr	200 sccm	3 Weeks	$2,525
640B13TW1V22V Absolute Pressure Controller, 1000 Torr, 1000 sccm, 4 VCR-M, Viton Seal, Viton Valve Plug $2,525 3 Weeks	640B13TW1V22V Absolute Pressure Controller, 1000 Torr, 1000 sccm, 4 VCR-M, Viton Seal, Viton Valve Plug	UNIVERSAL	1.0	1000 Torr	1000 sccm	3 Weeks	$2,525
640B13TW1V32V Absolute Pressure Controller, 1000 Torr, 5000 sccm, 4 VCR-M, Viton Seal, Viton Valve Plug $2,525 3 Weeks	640B13TW1V32V Absolute Pressure Controller, 1000 Torr, 5000 sccm, 4 VCR-M, Viton Seal, Viton Valve Plug	UNIVERSAL	1.0	1000 Torr	5000 sccm	3 Weeks	$2,525

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Configuration Options

		Description
		640B Absolute Pressure Controller, Closed-Loop, 640B

Show Configuration Options

640B Absolute Pressure Controllers are available with the following options.

Configuration Option	Option Code
640B Absolute Pressure Controller	640B
Pressure Range Full Scale
10 Torr	11T
100 Torr	12T
1000 Torr	13T
60 psi	61P
100 psi	12P
Fittings
Swagelok 4 VCR male	W
Swagelok 8 VCR male	T
Swagelok 1/4 in.	S
W-Seal (2787.3F)	H
C-Seal (2787.1)	C
Valve
Normally closed	1
Seal Materials
Viton	V
Kalrez	D
Metal	M
Orifice Size
A (50 sccm)	A
#1 (200 sccm)	1
#2 (1000 sccm)	2
#3 (5000 sccm)	3
#4 (10000 sccm)	4
#5 (20000 sccm)	5
#6 (30000 sccm)	6
Trip Points
With	2
Valve Plug Material
Viton	V
Kalrez	D
Metal	M
Kel-F	F

Specifications

Type

640B Absolute Pressure Controller
Pressure Range

10, 100, 1000 mmHg (Torr), 60, 100 psi (Full Scale)
Fitting Type

4 VCR, 8 VCR, 0.25 in. Tube, or Surface Mount
Flow Rate

50, 200, 1000, 5000, 10000, 20000, 50000 sccm (nominal Full Scale flow rates for N2 with 15 psig on inlet and atmosphere on outlet)
Trip Points

Two open-collector transistors
Rated: 250 mA @ 30 VDC
Adjustable: 1 to 100% of Full Scale
Hysteresis: 3% of Full Scale
Indicators: Green LED's on when actuated
Pressure Control Accuracy

±0.2% of Full Scale
Transducer Over Pressure Limit

45 psia or 2x Full Scale, whichever is greater
Maximum Differential Pressure

30 psi for 20,000 and 50,000 sccm orifices
150 psi for 50 to 10,000 sccm orifices
(consistent with transducer overpressure limit)
Control Mode

Downstream standard; Upstream optional
Pressure Measurement Accuracy

±0.5% of Reading (includes linearity, hysteresis, and repeatability)
Zero Temperature Coefficient

Zero: ±0.02% of Full Scale/°C
Span Temperature Coefficient

Span: ±0.04% of Reading/°C
Control Range

>2 to 100% of Full Scale
Typical Response Time

<1.0 sec (excluding system time constant)

Operating Temperature

0 - 50°C (32° to 122°F)
Storage Temperature

-20 to 80°C (-4° to 176°F)
External Leak Integrity

<10^-9 scc/sec He
Leak Integrity Through Closed Valve

Elastomer valve: <10^-4 scc/sec He
Metal valve: <1% of Full Scale (N2 @ 1 atm. ΔP)
Kel-F valve: <0.5% of Full Scale (N2 @ 1 atm. ΔP)
(through closed valve)*
Wetted Materials

Standard: 316L S.S., 316L/VAR S.S., Inconel, Nickel
Optional: Viton®, Kalrez®, Kel-F®
Power Required

±15 VDC ±5%, 200 mA maximum
Connector-Interface

15-pin male type "D"
Meter Response Time

<100 msec
RFI Sensitivity

SAMA 33.1, 1-abc: <0.2% of Full Scale
Input-Output Signals

0-5 VDC standard; 0-10 VDC optional
Cable Length

100 feet (30 m) maximum
Weight

2.54 lbs. (1.15 kg)
Dimensions

1.5 inches (38.1 mm) x 4.88 inches (124 mm) (4 VCR) x 5.50 inches (140 mm) maximum
Compliance

CE

Specifications

Type

640B Absolute Pressure Controller
Pressure Range

10, 100, 1000 mmHg (Torr), 60, 100 psi (Full Scale)
Fitting Type

4 VCR, 8 VCR, 0.25 in. Tube, or Surface Mount
Flow Rate

50, 200, 1000, 5000, 10000, 20000, 50000 sccm (nominal Full Scale flow rates for N2 with 15 psig on inlet and atmosphere on outlet)
Trip Points

Two open-collector transistors
Rated: 250 mA @ 30 VDC
Adjustable: 1 to 100% of Full Scale
Hysteresis: 3% of Full Scale
Indicators: Green LED's on when actuated
Pressure Control Accuracy

±0.2% of Full Scale
Transducer Over Pressure Limit

45 psia or 2x Full Scale, whichever is greater
Maximum Differential Pressure

30 psi for 20,000 and 50,000 sccm orifices
150 psi for 50 to 10,000 sccm orifices
(consistent with transducer overpressure limit)
Control Mode

Downstream standard; Upstream optional
Pressure Measurement Accuracy

±0.5% of Reading (includes linearity, hysteresis, and repeatability)
Zero Temperature Coefficient

Zero: ±0.02% of Full Scale/°C
Span Temperature Coefficient

Span: ±0.04% of Reading/°C
Control Range

>2 to 100% of Full Scale
Typical Response Time

<1.0 sec (excluding system time constant)

Operating Temperature

0 - 50°C (32° to 122°F)
Storage Temperature

-20 to 80°C (-4° to 176°F)
External Leak Integrity

<10^-9 scc/sec He
Leak Integrity Through Closed Valve

Elastomer valve: <10^-4 scc/sec He
Metal valve: <1% of Full Scale (N2 @ 1 atm. ΔP)
Kel-F valve: <0.5% of Full Scale (N2 @ 1 atm. ΔP)
(through closed valve)*
Wetted Materials

Standard: 316L S.S., 316L/VAR S.S., Inconel, Nickel
Optional: Viton®, Kalrez®, Kel-F®
Power Required

±15 VDC ±5%, 200 mA maximum
Connector-Interface

15-pin male type "D"
Meter Response Time

<100 msec
RFI Sensitivity

SAMA 33.1, 1-abc: <0.2% of Full Scale
Input-Output Signals

0-5 VDC standard; 0-10 VDC optional
Cable Length

100 feet (30 m) maximum
Weight

2.54 lbs. (1.15 kg)
Dimensions

1.5 inches (38.1 mm) x 4.88 inches (124 mm) (4 VCR) x 5.50 inches (140 mm) maximum
Compliance

CE

Features

Index Number

The flow through any orifice depends on the size of the orifice, the inlet and outlet pressures, and gas density. To simplify 640/641 orifice selection, use the following procedure:

On the Index Number Table in the figure, choose your inlet pressure from the column of pressures on the left – the pressure that will be applied to the inlet of your 640/641. (Note that the values are absolute pressure.)
Next, from the row of pressures at the top of that table, select your differential (delta) pressure – this is the inlet pressure minus your outlet pressure.
Locate the Index Number – where your selected row and column intersect.
Calculate the Density Correction Factor.

Index Number Table

Maximum Flow Rate

Go to the Orifice Selection Graph (see Figure) and locate your Index Number along the bottom axis.
Draw a vertical line at your Index Number. This line will intersect with the Maximum Flow Rate lines for the valve orifices available.
Choose the orifice whose maximum flow rate exceeds your requirements. If the point on the graph falls close to the maximum flow rate for an orifice, you may choose the next largest orifice number

Orifice Selection Graph

Pressure Range

In the 640 Controller, the Baratron pressure transducer measures absolute pressure; in the 641 model, it measures gauge pressure (pressure relative to ambient barometric pressure). In both models, Full Scale ranges of 10, 100, or 1000 Torr, or 60 or 100 psi are available. Each 640/641 can control pressure from Full Scale to less than 2% of Full Scale. Prudent design suggests choosing the lowest possible Full Scale for the application, taking into consideration the overpressure to which the sensor may be exposed (both normal and accidental).

Example

You want to control a vacuum process at a pressure of 0.5 psia, with a flow rate of 2000 sccm of He. Your inlet pressure is 15 psia, giving a differential pressure (delta P) of 15 psi, resulting in an uncorrected Index Number value of 90. The gas density correction for He is calculated as shown above. Multiplying 2.6 by 90 gives a density-corrected Index Number of 234. Drawing a vertical line on the Orifice Selection Chart at 234 indicates Orifice #3 would be the best choice.