Compare Model Drawings, CAD & Specs Full Scale Range Sensor Temperature Fitting Type Relay Mode Availability Price
631d 1-1000 torr, heated absolute baratron capacitance manometer
Heated Capacitance Manometer, 150°C, 10 Torr, 0.5%, 8 VCR-F, DB15, Below Set Point Relays
$3,550
3 Weeks
10 Torr 150°C 8 VCR female Energizes below set point
3 Weeks
631d 1-1000 torr, heated absolute baratron capacitance manometer
Heated Capacitance Manometer, 200°C, 10 Torr, 0.5%, 8 VCR-F, DB15, Below Set Point Relays
$4,050
3 Weeks
10 Torr 200°C 8 VCR female Energizes below set point
3 Weeks
631d 1-1000 torr, heated absolute baratron capacitance manometer
Heated Capacitance Manometer, 150°C, 10 Torr, 0.5%, 8 VCR-F, DB15, No Relays
$3,150
3 Weeks
10 Torr 150°C 8 VCR female N/A
3 Weeks
631d 1-1000 torr, heated absolute baratron capacitance manometer
Heated Capacitance Manometer, 200°C, 10 Torr, 0.5%, 8 VCR-F, DB15, No Relays
$3,650
3 Weeks
10 Torr 200°C 8 VCR female N/A
3 Weeks
631d 1-1000 torr, heated absolute baratron capacitance manometer
Heated Capacitance Manometer, 150°C, 10 Torr, 0.5%, 1.5 in. TriClover, DB15, No Relays
$3,175
3 Weeks
10 Torr 150°C 1.5 in. TriClover N/A
3 Weeks
631d 1-1000 torr, heated absolute baratron capacitance manometer
Heated Capacitance Manometer, 150°C, 10 Torr, 0.5%, 1.5 in. TriClover, DB15, Above Set Point Relays
10 Torr 150°C 1.5 in. TriClover Energizes above set point
631d 1-1000 torr, heated absolute baratron capacitance manometer
Heated Capacitance Manometer, 150°C, 1000 Torr, 0.5%, 8 VCR-F, DB15, Below Set Point Relays
$3,550
3 Weeks
1000 Torr 150°C 8 VCR female Energizes below set point
3 Weeks
631d 1-1000 torr, heated absolute baratron capacitance manometer
Heated Capacitance Manometer, 200°C, 1000 Torr, 0.5%, 8 VCR-F, DB15, Below Set Point Relays
$4,050
3 Weeks
1000 Torr 200°C 8 VCR female Energizes below set point
3 Weeks
631d 1-1000 torr, heated absolute baratron capacitance manometer
Heated Capacitance Manometer, 150°C, 1000 Torr, 0.5%, 8 VCR-F, DB15, No Relays
$3,150
3 Weeks
1000 Torr 150°C 8 VCR female N/A
3 Weeks
631d 1-1000 torr, heated absolute baratron capacitance manometer
Heated Capacitance Manometer, 200°C, 1000 Torr, 0.5%, 8 VCR-F, DB15, No Relays
$3,650
3 Weeks
1000 Torr 200°C 8 VCR female N/A
3 Weeks
631d 1-1000 torr, heated absolute baratron capacitance manometer
Heated Capacitance Manometer, 150°C, 1000 Torr, 0.5%, 1.5 in. TriClover, DB15, No Relays
1000 Torr 150°C 1.5 in. TriClover N/A
631d 1-1000 torr, heated absolute baratron capacitance manometer
Heated Capacitance Manometer, 150°C, 1000 Torr, 0.5%, 1.5 in. TriClover, DB15, Above Set Point Relays
1000 Torr 150°C 1.5 in. TriClover Energizes above set point

Configuration Options

Description
  631d 1-1000 torr, heated absolute baratron capacitance manometer 631D Absolute Capacitance Manometer, Heated to 150 or 200°C

Specifications

  • Type
    Pressure Transducer
  • Sensor Type
    Capacitance Manometer
  • Measurement Type
    Absolute
  • Full Scale Pressure Ranges
    1, 2, 10, 30, 100, and 1000 Torr
  • Sensor Temperature
    Controlled to 150°C or 200°C
  • Accuracy
    0.50% of Reading
  • Analog Output
    0-10 VDC into >10 kΩ load
  • Analog Connector
    15-pin D-sub
  • Trip Relays
    Two internally mounted process pressure trip relays independently adjustable from 0.5% to 100% of full scale range
  • Resolution
    0.01% of Full Scale
  • Zero Temperature Coefficient
    150°C Versions:0.004% FS/°C (0.008% Full Scale/°C for 1 Torr range)
    200°C Versions: 0.008% FS/°C (0.016% Full Scale/°C for 1 Torr range)
  • Span Temperature Coefficient
    0.02% of Reading/°C
  • Response Time
    50 msec
  • Warm-up Time
    4 hours
  • Internal Volume
    6.3 cc
  • Ambient Operating Temperature
    15° to 50°C
  • Overpressure Limit
    45 psia (310 kPa)
  • Materials Exposed to Process Gases
    Inconel® or Incoloy® nickel alloys
  • Power Requirements
    ±15 VDC (±5%) @ 1.0 amps max.
  • Ambient Airflow Requirements
    150°C Versions: 50 ft/min for ambient temperatures of 45-50°C
    200°C Versions: 150 ft/min for ambient temperatures of 45-50°C
  • Compliance
    CE

Features

Baratron® Capacitance Manometer Technology

Capacitance manometers are electro-mechanical gauges that can measure both pressure and vacuum. The capacitance gauge translates a pressure-modulated movement in a thin diaphragm into an electrical signal proportional to the pressure. The pressure sensor is the thin diaphragm that is exposed to the pressure or vacuum being measured via the inlet tube. An electrode is mounted in the reference cavity behind the diaphragm. Pressure differences between the process and the reference cavity deflect the diaphragm slightly, changing the distance between it and the electrode. Variations in this distance produce variations in the capacitance between the diaphragm and the electrode creating an electrical signal that is proportional to the pressure change. Since differences in the capacitance signal are produced by physical changes within the manometer and not by changes in the gas properties, pressure measurements by the capacitance manometer are independent of the composition of the gas being measured.

Gas independent pressure measurement with a Baratron® capacitance manometer. Schematic shows the internal components and functional zones.

Percent of Reading Accuracy

Accuracy is specified as a percent of Reading, not Full Scale, as seen in some of the lower performance devices. Percent of Reading accuracy provides you with an even more accurate output signal in the lower scale of the pressure range, where it is needed most.

Internally Heated to 150°C or 200°C

These capacitance manometers are temperature controlled to 150°C or 200°C for improved accuracy. Unheated sensors are exposed to ambient temperature variations which can degrade the sensor accuracy. These devices have the sensor enclosed in a volume that is maintained at a constant temperature above ambient. This solution improves the manometer’s accuracy and repeatability and lowers instrument drift by reducing or eliminating process contamination within the manometer permitting use in the most demanding vacuum processes in semiconductor manufacturing, such as metal etching and nitride film chemical vapor deposition (CVD).

The pressure sensor is located inside a 150°C or 200°C constant temperature oven for improved pressure measurement accuracy.

Absolute Pressure Measurement

These Baratron® pressure transducers are referenced to vacuum for absolute pressure measurement. Applications include: vacuum furnaces, freeze-drying of fruits and vegetables, gas lasers, automotive component testing, bottle coatings, and vacuum distillation.

Inconel® and Incoloy® Construction Wetted Surfaces

These pressure transducers feature Inconel® and Incoloy® nickel alloy construction of the pressure sensor allowing it to operate without damage in virtually any chemical environment, including halogens, deionized water and steam, and ozone. The sensor is fully welded with no intermediate brazing or joining materials.

0 to 10 VDC Proportional Analog Output

These Baratron® capacitance manometers feature a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements.

Two Adjustable Process Trip Point Relays

An internally-mounted set of two (2) UL-approved solid-state trip relays for pressure and one (1) UL-approved electromechanical relay for heater failure is also available, allowing the manometer to control external equipment or components. The pressure trip relays may be adjusted from 0.5% to 100% of full scale range by the user independently at atmospheric pressure, eliminating the need for vacuum pumps during setpoint adjustment. Relay capacity is 0.20 amps @ 30 VDC compling with UL1577 requirements.

15-pin Type "D" Pin-Outs with Relay Option

Pin Description
1 Trip Point A Relay N/O
2 Pressure Output
3 Trip Point A Relay Common
4 Trip Point A Relay N/C
5 Power Return
6 -15 VDC
7 +15 VDC
8 Trip Point B Relay N/O
9 Trip Point B Relay Common
10 Trip Point B Relay N/C
11 Heater Alarm Relay Common
12 Pressure Output Return
13 Heater Alarm Relay Open (when energized)
15 Heater Alarm Relay Closed (when energized)
15 Chassis Ground

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