622D 1-1000 Torr, Unheated Absolute Baratron® Capacitance Manometers
Overview
The Baratron® 622D unheated absolute capacitance manometer is the latest of MKS' analog, capacitance-based, high-performance vacuum and pressure transducers. It requires ±15VDC input voltage and provides a high-level 0-10 VDC analog output signal that is linear with pressure.
- 0 to 10 VDC proportional analog output with terminal block
- Direct measurement of chamber total pressure independent of gas type
- Long-term output stability for state-of-the-art process repeatability
- Inconel® and Incoloy® nickel alloy construction of basic sensor
- High overpressure limit ensures reliability during system mishaps
- Specified in percent of reading for best accuracy and improved process yield
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
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622D01TBE Absolute Pressure Transducer, 1 Torr, 8 VCR-F, 5-pin Terminal Block | $1,379 |
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622D01TDE Absolute Pressure Transducer, 1 Torr, NW16 ISO-KF, 5-pin Terminal Block | $1,379 |
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622D02TBE Absolute Pressure Transducer, 2 Torr, 8 VCR-F, 5-pin Terminal Block | $1,379 |
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622D02TDE Absolute Pressure Transducer, 2 Torr, NW16 ISO-KF, 5-pin Terminal Block | $1,379 |
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622D11TBE Absolute Pressure Transducer, 10 Torr, 8 VCR-F, 5-pin Terminal Block | $1,379 |
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Absolute Pressure Transducer, 10 Torr, NW16 ISO-KF, 5-pin Terminal Block
$1,379
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622D11TDE Absolute Pressure Transducer, 10 Torr, NW16 ISO-KF, 5-pin Terminal Block | $1,379 |
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622D12TBE Absolute Pressure Transducer, 100 Torr, 8 VCR-F, 5-pin Terminal Block | $1,379 |
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Absolute Pressure Transducer, 100 Torr, NW16 ISO-KF, 5-pin Terminal Block
$1,379
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622D12TDE Absolute Pressure Transducer, 100 Torr, NW16 ISO-KF, 5-pin Terminal Block | $1,379 |
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622D13TBE Absolute Pressure Transducer, 1000 Torr, 8 VCR-F, 5-pin Terminal Block | $1,379 |
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Absolute Pressure Transducer, 1000 Torr, NW16 ISO-KF, 5-pin Terminal Block
$1,379
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622D13TDE Absolute Pressure Transducer, 1000 Torr, NW16 ISO-KF, 5-pin Terminal Block | $1,379 |
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Specifications
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TypeVacuum/pressure Transducer
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Measurement TypeAbsolute
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Full Scale Pressure Ranges1, 2, 10, 20, 100, 500, or 1000 Torr and metric equivalents
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Sensor TemperatureAmbient
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Analog Output0-10 VDC into > 10 kΩ load
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Accuracy0.25% of Reading for 1-1000 Torr
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Electrical Connector5-pin Terminal Block
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Zero Temperature Coefficient0.005% FS/°C for 10-1000 Torr ranges
0.010% FS/°C for 2 Torr range
0.015% FS/°C for 1 Torr range
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Span Temperature Coefficient0.04% of Reading/°C
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Operating Temperature Range0-50°C
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Resolution0.001% of Full Scale
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Volume6.3 cc
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Overpressure Limit45 psia (310 kPa)
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Exposed MaterialsInconel® and Incoloy® nickel alloys
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Power Requirements±15VDC (±5%) @ 35 mA
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ComplianceCE
Features
Baratron® Capacitance Manometer Technology
Capacitance manometers are electro-mechanical gauges that can measure both pressure and vacuum. The capacitance gauge translates a pressure-modulated movement in a thin diaphragm into an electrical signal proportional to the pressure. The pressure sensor is the thin diaphragm that is exposed to the pressure or vacuum being measured via the inlet tube. An electrode is mounted in the reference cavity behind the diaphragm. Pressure differences between the process and the reference cavity deflect the diaphragm slightly, changing the distance between it and the electrode. Variations in this distance produce variations in the capacitance between the diaphragm and the electrode creating an electrical signal that is proportional to the pressure change. Since differences in the capacitance signal are produced by physical changes within the manometer and not by changes in the gas properties, pressure measurements by the capacitance manometer are independent of the composition of the gas being measured.
Gas independent pressure measurement with a Baratron® capacitance manometer. Schematic shows the internal components and functional zones.
Percent of Reading Accuracy
Accuracy is specified as a percent of Reading, not Full Scale, as seen in some of the lower performance devices. Percent of Reading accuracy provides you with an even more accurate output signal in the lower scale of the pressure range, where it is needed most.
Absolute Pressure Measurement
These Baratron® pressure transducers are referenced to vacuum for absolute pressure measurement. Applications include: vacuum furnaces, freeze-drying of fruits and vegetables, gas lasers, automotive component testing, bottle coatings, and vacuum distillation.
Inconel® and Incoloy® Construction
These pressure transducers feature Inconel® and Incoloy® nickel alloy construction of the pressure sensor allowing it to operate without damage in virtually any chemical environment, including halogens, deionized water and steam, and ozone. The sensor is fully welded with no intermediate brazing or joining materials.
0 to 10 VDC Proportional Analog Output
These Baratron® capacitance manometers feature a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements. They are powered by a ±15 VDC input voltage.
5-pin Terminal Block
| Pin | Description |
|---|---|
| 1 | Power Common |
| 2 | Signal Common |
| 3 | Signal Output |
| 4 | -15 VDC |
| 5 | +15 VDC |
Resources
Literature
- 622D, 626D Unheated Absolute Baratron® Capacitance Manometer (2.1 MB, PDF)
- Analog 600 Series Absolute Baratron® Capacitance Manometer Selection Guide (2.9 MB, PDF)
Manuals
- MKS 622D, 626D & 623H Transducers Manual (713.3 kB, PDF)
- 622 Capacitance Manometer Pin-outs (21.7 kB, PDF)
Ultra-High Velocity