Compare Model Drawings, CAD & Specs Fitting Type Display Units Availability Price
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, Calibrated, NW25 ISO-KF, mbar Units
$1,258
NW25 ISO-KF No mbar
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, Calibrated, NW25 ISO-KF, Pascal Units
$1,258
NW25 ISO-KF No Pascal
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, Calibrated, NW25 ISO-KF, Torr Units
$1,258
NW25 ISO-KF No Torr
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, Calibrated, 2.75 in. CF, mbar Units
$1,312
2.75 in. CF No mbar
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, Calibrated, 2.75 in. CF, Pascal Units
$1,312
2.75 in. CF No Pascal
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, Calibrated, 2.75 in. CF, Torr Units
$1,312
2.75 in. CF No Torr
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, Calibrated, NW40 ISO-KF, mbar Units
$1,312
NW40 ISO-KF No mbar
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, Calibrated, NW40 ISO-KF, Pascal Units
$1,312
NW40 ISO-KF No Pascal
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, Calibrated, NW40 ISO-KF, Torr Units
$1,312
NW40 ISO-KF No Torr
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, NW25 ISO-KF, mbar Units
$1,148
NW25 ISO-KF No mbar
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, NW25 ISO-KF, Pascal Units
$1,148
NW25 ISO-KF No Pascal
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, NW25 ISO-KF, Torr Units
$1,148
NW25 ISO-KF No Torr
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, 2.75 in. CF, mbar Units
$1,203
2.75 in. CF No mbar
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, 2.75 in. CF, Pascal Units
$1,203
2.75 in. CF No Pascal
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, 2.75 in. CF, Torr Units
$1,203
2.75 in. CF No Torr
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, NW40 ISO-KF, mbar Units
$1,203
NW40 ISO-KF No mbar
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, NW40 ISO-KF, Pascal Units
$1,203
NW40 ISO-KF No Pascal
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, NW40 ISO-KF, Torr Units
$1,203
NW40 ISO-KF No Torr
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, Display, Calibrated, NW25 ISO-KF, mbar
$1,312
NW25 ISO-KF Digital Display mbar
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, Display, Calibrated, NW25 ISO-KF, Pascal
$1,312
NW25 ISO-KF Digital Display Pascal
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, Display, Calibrated, NW25 ISO-KF, Torr
$1,312
NW25 ISO-KF Digital Display Torr
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, Display, Calibrated, 2.75 in. CF, mbar
$1,367
2.75 in. CF Digital Display mbar
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, Display, Calibrated, 2.75 in. CF, Pascal
$1,367
2.75 in. CF Digital Display Pascal
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, Display, Calibrated, 2.75 in. CF, Torr
$1,367
2.75 in. CF Digital Display Torr
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, Display, Calibrated, NW40 ISO-KF, mbar
$1,367
NW40 ISO-KF Digital Display mbar
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, Display, Calibrated, NW40 ISO-KF, Pascal
$1,367
NW40 ISO-KF Digital Display Pascal
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, Display, Calibrated, NW40 ISO-KF, Torr
$1,369
NW40 ISO-KF Digital Display Torr
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, Display, NW25 ISO-KF, mbar
$1,203
NW25 ISO-KF Digital Display mbar
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, Display, NW25 ISO-KF, Pascal
$1,203
NW25 ISO-KF Digital Display Pascal
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, Display, NW25 ISO-KF, Torr
$1,203
NW25 ISO-KF Digital Display Torr
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, Display, 2.75 in. CF, mbar
$1,258
2.75 in. CF Digital Display mbar
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, Display, 2.75 in. CF, Pascal
$1,258
2.75 in. CF Digital Display Pascal
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, Display, 2.75 in. CF, Torr
$1,258
2.75 in. CF Digital Display Torr
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, Display, NW40 ISO-KF, mbar
$1,258
NW40 ISO-KF Digital Display mbar
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, Display, NW40 ISO-KF, Pascal
$1,258
NW40 ISO-KF Digital Display Pascal
500 cold cathode vacuum transducer
Vacuum Gauge, Cold Cathode, Display, NW40 ISO-KF, Torr
$1,258
NW40 ISO-KF Digital Display Torr

Configuration Options

Description
  500 cold cathode vacuum transducer 5001 Vacuum Gauge, Cold Cathode, 1x10-10 - 0.01 Torr
  5002 Replacement Sensor, Cold Cathode Gauge, 500 Series

Specifications

  • Sensor
    Cold Cathode
  • Installation Orientation
    Any
  • Measurement Range
    1 x 10-10 to 1 x 10-2 Torr
  • Operating Temperature
    0 to 50°C
  • Maximum Bakeout Temperature
    250°C (magnets removed)
  • Storage Temperature
    -40° to 70°C
  • Analog Output
    0-11 VDC (LOG10)
  • Power Requirements
    13.5 - 36 VDC, <2 Watts
  • Accuracy
    Standard: 30% (typical)
    Calibrated Gauge: 10%
    (1 x 10-8 to 1 X 10-4 Torr)
  • Repeatability
    1 x 10-8 to 1 X 10-4 Torr: 5% (typical)
  • Exposed Materials
    304 Stainless Steel, 17-7 stainless steel, ceramic, Cu brazing material, alumina, and molybdenum
  • Weight
    652 grams
  • Compliance
    CE
  • USB Port
    Micro-AB
  • RS485 Baud Rates
    1200-115,200 Baud

Features

Cold Cathode Gauge Illustration

  • Long Lifetime: Cold Cathode Gauges do not require a filament, which simplifies gauge construction, increases reliability and lifetime, and lowers the cost of ownership. An internal guard ring reduces contamination on critical components and isolates leakage current from the measurement.
  • Quick Starting: The field emission starter provides faster and more predictable start times.
  • Easy Access Magnet: Tool-free magnet removal simplifies gauge installation and bakeout.
  • Baffle: Keeps sputtered material from entering your process chamber.
  • Easy Maintenance: Easily removable electronics and magnet assembly makes baking and installation easy

Digital Display and Status Indicators

The included digital display indicates pressure, USB connectivity, RS-485 address, remaining lifetime, and self diagnostics status. To avoid guesswork, the Series 500 CCG displays the estimated remaining lifetime of the gauge – the point at which accuracy is compromised and gauge maintenance or replacement is recommended. Status LEDs: indicate when power is applied to the module, when discharge is achieved, the state of the 2 set point relays, and if maintenance is suggested at the next PM or immediately.

Cold Cathode Technology

Cold cathode technology traditionally provides longer lifetime than hot cathode because there is no filament to burn out, but the tradeoff was reduced accuracy. The Series 500 Cold Cathode Gauge (CCG) defines a new accuracy standard based on innovative technology and time-tested calibration techniques. In addition, there has never been a good way to determine when a cold cathode gauge is worn to the point that its accuracy has significantly degraded. With a new patent-pending method of determining the pressure dosage over time and combining that with a user-selected environmental factor, the CCG Series 500 provides an indication of when the gauge needs to be serviced or replaced.

Long Lifetime with Easy Maintenance

Cold Cathode Gauges do not require a filament, which simplifies gauge construction, increases reliability and lifetime, and lowers the cost of ownership. An internal guard ring reduces contamination on critical components and isolates leakage current from the measurement. Internal components are easily replaced for quick maintenance. Tool-free magnet removal simplifies gauge installation and bakeout.

Auto On/Off

The gauge can be programmed to turn ON automatically based on an analog voltage input coming from a higher pressure (i.e. Pirani) gauge. The Series 500 CCG can also automatically turn the gauge OFF based on the analog input and/or the pressure reading from the CCG itself.

USB Interface

The USB port provides connection to a PC together with an easy-to-use software program to setup, control, view diagnostics status, and display pressure trends. Communications over USB can occur while the gauge is ON without disrupting normal operation.

Standard 15-pin D-sub Connector Pinouts

High Density 15-pin D-sub Connector Pinouts

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