Compare Model Drawings, CAD & Specs Availability Price
245 metal-seated flow control valve
Upstream Flow Control Valve, Metal Seated, 10-11 to 6000 Torr

Specifications

  • Type
    245 Metal-seated Control Valve
  • Full Scale Flow Range
    10-11 to 6000 Torr
  • Closed Conductance Leakage
    <10-9 scc/sec
  • Maximum Throughput
    2500 Torr-liters/sec (200 slm)
  • Maximum Inlet Pressure
    200 psig on center port, 25 psig on other port
  • Exposed Materials
    304 sst and fine silver
  • Fitting Type
    1/4 inch (6.35 mm) OD tubulation
  • Operating Temperature
    0 - 50°C
  • Bake Out Temperature
    450°C (with driver removed and bakeout clamp installed)

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