Compare Model Drawings, CAD & Specs Full Scale Flow Range Fitting Type Analog I/O Connector Availability Price
179c mass flow meter & 1179c mass flow controller, 10-20,000 sccm
Mass Flow Meter, 10 sccm, 4 VCR Male, DB15, Metal Seal
$1,000
3 Weeks
10 sccm 4 VCR male 15-pin D-sub
3 Weeks
179c mass flow meter & 1179c mass flow controller, 10-20,000 sccm
Mass Flow Meter, 10 sccm, 0.25 in. Tube, DB15, Metal Seal
10 sccm 0.25 in. tube 15-pin D-sub
179c mass flow meter & 1179c mass flow controller, 10-20,000 sccm
Mass Flow Meter, 100 sccm, 4 VCR Male, DB15, Metal Seal
$1,000
3 Weeks
100 sccm 4 VCR male 15-pin D-sub
3 Weeks
179c mass flow meter & 1179c mass flow controller, 10-20,000 sccm
Mass Flow Meter, 100 sccm, 0.25 in. Tube, DB15, Metal Seal
$1,000
3 Weeks
100 sccm 0.25 in. tube 15-pin D-sub
3 Weeks
179c mass flow meter & 1179c mass flow controller, 10-20,000 sccm
Mass Flow Meter, 1000 sccm, 4 VCR Male, DB15, Metal Seal
$1,000
3 Weeks
1000 sccm 4 VCR male 15-pin D-sub
3 Weeks
179c mass flow meter & 1179c mass flow controller, 10-20,000 sccm
Mass Flow Meter, 1000 sccm, 0.25 in. Tube, DB15, Metal Seal
$1,000
3 Weeks
1000 sccm 0.25 in. tube 15-pin D-sub
3 Weeks
179c mass flow meter & 1179c mass flow controller, 10-20,000 sccm
Mass Flow Meter, 10,000 sccm, 4 VCR Male, DB15, Metal Seal
$1,000
3 Weeks
10000 sccm 4 VCR male 15-pin D-sub
3 Weeks
179c mass flow meter & 1179c mass flow controller, 10-20,000 sccm
Mass Flow Meter, 10,000 sccm, 0.25 in. Tube, DB15, Metal Seal
10000 sccm 0.25 in. tube 15-pin D-sub
179c mass flow meter & 1179c mass flow controller, 10-20,000 sccm
Mass Flow Meter, 20 sccm, 4 VCR Male, DB15, Metal Seal
$1,000
3 Weeks
20 sccm 4 VCR male 15-pin D-sub
3 Weeks
179c mass flow meter & 1179c mass flow controller, 10-20,000 sccm
Mass Flow Meter, 20 sccm, 0.25 in. Tube, DB15, Metal Seal
$1,000
3 Weeks
20 sccm 0.25 in. tube 15-pin D-sub
3 Weeks
179c mass flow meter & 1179c mass flow controller, 10-20,000 sccm
Mass Flow Meter, 200 sccm, 4 VCR Male, DB15, Metal Seal
$1,000
3 Weeks
200 sccm 4 VCR male 15-pin D-sub
3 Weeks
179c mass flow meter & 1179c mass flow controller, 10-20,000 sccm
Mass Flow Meter, 200 sccm, 0.25 in. Tube, DB15, Metal Seal
$1,000
3 Weeks
200 sccm 0.25 in. tube 15-pin D-sub
3 Weeks
179c mass flow meter & 1179c mass flow controller, 10-20,000 sccm
Mass Flow Meter, 2,000 sccm, 4 VCR Male, DB15, Metal Seal
$1,000
3 Weeks
2000 sccm 4 VCR male 15-pin D-sub
3 Weeks
179c mass flow meter & 1179c mass flow controller, 10-20,000 sccm
Mass Flow Meter, Metal Seal, 2,000 sccm, 0.25 in. Tube
2000 sccm 0.25 in. tube 15-pin D-sub
179c mass flow meter & 1179c mass flow controller, 10-20,000 sccm
Mass Flow Meter, 20,000 sccm, 4 VCR Male, DB15, Metal Seal
$1,000
3 Weeks
20000 sccm 4 VCR male 15-pin D-sub
3 Weeks
179c mass flow meter & 1179c mass flow controller, 10-20,000 sccm
Mass Flow Meter, 20,000 sccm, 0.25 in. Tube, DB15, Metal Seal
20000 sccm 0.25 in. tube 15-pin D-sub
179c mass flow meter & 1179c mass flow controller, 10-20,000 sccm
Mass Flow Meter, 50 sccm, 4 VCR Male, DB15, Metal Seal
$1,000
3 Weeks
50 sccm 4 VCR male 15-pin D-sub
3 Weeks
179c mass flow meter & 1179c mass flow controller, 10-20,000 sccm
Mass Flow Meter, 50 sccm, 0.25 in. Tube, DB15, Metal Seal
$1,000
3 Weeks
50 sccm 0.25 in. tube 15-pin D-sub
3 Weeks
179c mass flow meter & 1179c mass flow controller, 10-20,000 sccm
Mass Flow Meter, 500 sccm, 4 VCR Male, DB15, Metal Seal
$1,000
3 Weeks
500 sccm 4 VCR male 15-pin D-sub
3 Weeks
179c mass flow meter & 1179c mass flow controller, 10-20,000 sccm
Mass Flow Meter, 500 sccm, 0.25 in. Tube, DB15, Metal Seal
$1,000
3 Weeks
500 sccm 0.25 in. tube 15-pin D-sub
3 Weeks
179c mass flow meter & 1179c mass flow controller, 10-20,000 sccm
Mass Flow Meter, 5,000 sccm, 4 VCR Male, DB15, Metal Seal
$1,000
3 Weeks
5000 sccm 4 VCR male 15-pin D-sub
3 Weeks
179c mass flow meter & 1179c mass flow controller, 10-20,000 sccm
Mass Flow Meter, 5,000 sccm, 0.25 in. Tube, DB15, Metal Seal
$1,000
3 Weeks
5000 sccm 0.25 in. tube 15-pin D-sub
3 Weeks

Configuration Options

Description
  179c mass flow meter & 1179c mass flow controller, 10-20,000 sccm 179C Mass Flow Meter, Metal Seal, 10 - 20,000 sccm

Specifications

  • Type
    Mass Flow Meter
  • Full Scale Flow Range
    10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000 sccm (N2 equivalent)
  • Fitting Type
    Swagelok® 4 VCR®, Swagelok 4 VCO®, ¼ inch Swagelok®
  • Analog I/O Connector
    9-pin or 15-pin Type "D"
  • Maximum Inlet Pressure
    500 psig
  • Normal Operating Pressure Differential
    10 Torr at 10 to 20,000 sccm (with atmospheric pressure at the MFM outlet)
  • Typical Accuracy
    ±1.0% of Full Scale
  • Repeatability
    ±0.2% of Full Scale
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading./°C
  • Pressure Coefficient
    <0.02% of Reading/psi
  • Warm-up Time
    2 minutes
  • Operating Temperature
    0° to 50°C
  • Power Requirements
    ±15 VDC (150 mA start-up, 50 mA steady-state)
  • Wetted Materials
    316L S.S.
  • External Leak Integrity
    < 1 x 10-9
  • Compliance
    CE

Features

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