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1640a metal-sealed pressure-based 2-50 sccm mass flow controller
Mass Flow Controller, Metal-sealed, Pressure-based, 2 - 20 sccm

Specifications

  • Type
    Pressure-based Mass Flow Controller
  • Full Scale Flow Range
    2 to 20 sccm (N2 equivalent)
  • Maximum Inlet Pressure
    5 psig
  • Control Range
    5% to 100% of Full Scale
  • Typical Accuracy
    Gas/flow rate dependent
  • Repeatability
    ± 0.2% of Full Scale
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.02% of Full Scale/°C
  • Span Temperature Coefficient
    <0.2% of Rdg./°C
  • Warm-up Time
    30 minutes
  • Typical Settling Time
    <5 sec
  • Operating Temperature
    0° to 50°C
  • Power Requirements
    ± 15 VDC (± 5%) @ 200 mA
  • Set Point Command Signal
    0 to 5 VDC from <20K Ω
  • Flow Input Output Signal
    0 to 5 VDC into >10K Ω
  • Wetted Materials
    316L S.S., nickel, Inconel®
  • Valve Seat Material
    Kel-F®, Chemraz® or Kalrez®
  • External Leak Integrity
    <1 x 10-9
  • Leak Integrity Through Closed Valve
    1% of Full Scale (nitrogen) at 15 psig inlet to atmosphere
  • Fitting Type
    Swagelok® 4 VCR®
  • Compliance
    CE

Features

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