154B High Flow Control Valve

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Overview

The MKS Instruments 154 High Flow Control Valve offers better response time as compared to other high flow control valves. This is possible through the use of a "balanced forces" design that automatically neutralizes the pressure-induced imbalances within the valve. The elastomer-sealed 154 valve is designed for flow rates from 0.2 to 200 slm.

316 S.S., Nickel and Viton® wetted materials (other seal materials optional)
20 to 200 slm full scale flow ranges
½” Swagelok®, 8 VCR, or 8 VCO® male fittings

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Products

Compare	Model	Compatibility	rankScore	Full Scale Flow Range	Seal Material	Fitting Type	Availability	Price
0154B-200LRB Upstream Flow Control Valve, High Flow, 200 slm, 8 VCR, Buna-N $1,625 Contact Us	0154B-200LRB Upstream Flow Control Valve, High Flow, 200 slm, 8 VCR, Buna-N	UNIVERSAL	1.0	200 slm	Buna-N	8 VCR, male	Contact Us	$1,625
0154B-200LRK Upstream Flow Control Valve, High Flow, 200 slm, 8 VCR, Kalrez $1,825 3 Weeks	0154B-200LRK Upstream Flow Control Valve, High Flow, 200 slm, 8 VCR, Kalrez	UNIVERSAL	1.0	200 slm	Kalrez	8 VCR, male	3 Weeks	$1,825
0154B-200LRN Upstream Flow Control Valve, High Flow, 200 slm, 8 VCR, Neoprene $1,625 Contact Us	0154B-200LRN Upstream Flow Control Valve, High Flow, 200 slm, 8 VCR, Neoprene	UNIVERSAL	1.0	200 slm	Neoprene	8 VCR, male	Contact Us	$1,625
0154B-200LRV Upstream Flow Control Valve, High Flow, 200 slm, 8 VCR, Viton $1,625 3 Weeks	0154B-200LRV Upstream Flow Control Valve, High Flow, 200 slm, 8 VCR, Viton	UNIVERSAL	1.0	200 slm	Viton	8 VCR, male	3 Weeks	$1,625
0154B-200LSB Upstream Flow Control Valve, High Flow, 200 slm, 0.5 in. Tube, Buna-N $1,625 Contact Us	0154B-200LSB Upstream Flow Control Valve, High Flow, 200 slm, 0.5 in. Tube, Buna-N	UNIVERSAL	1.0	200 slm	Buna-N	0.5 in. Swagelok	Contact Us	$1,625
0154B-200LSK Upstream Flow Control Valve, High Flow, 200 slm, 0.5 in. Tube, Kalrez $1,625 Contact Us	0154B-200LSK Upstream Flow Control Valve, High Flow, 200 slm, 0.5 in. Tube, Kalrez	UNIVERSAL	1.0	200 slm	Kalrez	0.5 in. Swagelok	Contact Us	$1,625
0154B-200LSN Upstream Flow Control Valve, High Flow, 200 slm, 0.5 in. Tube, Neoprene $1,625 3 Weeks	0154B-200LSN Upstream Flow Control Valve, High Flow, 200 slm, 0.5 in. Tube, Neoprene	UNIVERSAL	1.0	200 slm	Neoprene	0.5 in. Swagelok	3 Weeks	$1,625
0154B-200LSV Upstream Flow Control Valve, High Flow, 200 slm, 0.5 in. Tube, Viton $1,625 3 Weeks	0154B-200LSV Upstream Flow Control Valve, High Flow, 200 slm, 0.5 in. Tube, Viton	UNIVERSAL	1.0	200 slm	Viton	0.5 in. Swagelok	3 Weeks	$1,625

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Specifications

Type

154B High Flow Control Valve
Full Scale Flow Range

20 - 200 slm
Minimum Controllable Flow

0.1% of Full Scale
Closed Conductance Leakage

<0.1% of Full Scale (15 psid to atm)

Exposed Materials

Standard: 316 S.S., Nickel, Viton®
Optional: Buna-N, Kalrez®, Neoprene®
Seal Material

Elastomer
Fitting Type

Standard: 1/2 inch Swagelok®
Optional: 8 VCR or 8 VCO® male
Operating Temperature

-10 to 60°C

Specifications

Type

154B High Flow Control Valve
Full Scale Flow Range

20 - 200 slm
Minimum Controllable Flow

0.1% of Full Scale
Closed Conductance Leakage

<0.1% of Full Scale (15 psid to atm)

Exposed Materials

Standard: 316 S.S., Nickel, Viton®
Optional: Buna-N, Kalrez®, Neoprene®
Seal Material

Elastomer
Fitting Type

Standard: 1/2 inch Swagelok®
Optional: 8 VCR or 8 VCO® male
Operating Temperature

-10 to 60°C

Features

Flow Valve Controller

The 250E is a self-contained PID pressure and flow control module designed to provide optimized control of the total pressure or flow of a gas (or gases) in a dynamic closed-loop system. With the 250E, input can be supplied by a Baratron® Capacitance Manometer or other compatible vacuum gauge for closed-loop pressure control, or flow input can be measured by a mass flow transducer for closed-loop flow control. Its power supply has sufficient output to power most capacitance manometers and flow valves. Process control can be manually adjusted through a front panel potentiometer or remotely programmed with a 0-5 VDC analog signal for profile generating.