Configuration Options

Description
     150-160-VALVE Vacuum Isolation Valve, Single-Stage, Bellows-Sealed

Specifications

  • Type
    Standard Vacuum Isolation Valves
  • Vacuum Range
    15 psig to 1.0 x 10-9 Torr
  • Body Configuration
    Angle or Inline
  • Helium Leak Rate
    1.0 x 10-9 std cc/sec
  • Actuation
    Manual or Pneumatic
  • Body, Nosepiece and Bellows Termination Material
    Type 304 stainless steel
  • Bellows Material
    Type 321 stainless steel
  • Nose Seal
    Viton®
  • Bonnet Seal
    Viton®
  • Limit Switch Rating
    5A - 250 VAC
  • Single Pole, Single Throw
    5A - 30 VDC
  • Maximum Bakeout Temperature
    Body: 150°C
    Cylinder: 70°C
  • Piston Material
    Anodized aluminum alloys, Buna and plated steel

Features

Formed Bellows

Since bellows are a critical factor in valve reliability, MKS incorporates formed bellows into the 150/160 valves. The first major advantage of using formed bellows is consistency. Since formed bellows do not have welds joining each membrane, there is no stress concentration and fatigue failure from non-uniform welds. The second advantage is that the bellows convolutions never touch completely in the compressed position. Many vacuum processes, like chemical vapor or thin film deposition contain particulate contamination. If small particles fall between formed bellows, they have no effect. If similar particles fall between welded, nested bellows, they deform the membranes, cause stress concentration, and lead to early bellows failure.

Install In Any Position

MKS vacuum valves may be installed in any position, with either the bellows or the nosepiece facing the pump. In systems with condensable materials, it is advantageous to install the valve with the nosepiece toward the chamber. The electropneumatic valve has a solenoid valve attached to the cylinder with a nipple. The cap screws fixing the cylinder to the body may be removed and the cylinder indexed at 90° increments for valves of sizes .75'' to 1.5'', and 60° increments for valves with port sizes 2'' to 6''. If necessary, the solenoid valve can be removed and located remotely.

Applications

Series 150/160 and V-100 valves are designed to insure product quality, reliability and value. They function reliably in applications ranging from semiconductor manufacturing to plasma physics research to nuclear accelerators. MKS manufactures its valves with interchangeable parts, inspecting them at every step.

Need help?

Contact an Applications Specialist by sending us an email