Compare Model Drawings, CAD & Specs Availability Price
1150c/1152c vapor source mass flow controller
Vapor Mass Flow Controller, Viscous Flow Through a Choked Orifice

Specifications

  • Flow Method
    Viscous Flow Through a Choked Orifice
  • Full Scale Flow Range
    1 to 1000 sccm (N2 equivalent)
  • Control Range
    5.0 to 100% of Full Scale
  • Typical Accuracy
    ±5.0% of Full Scale
  • Repeatability
    ±0.2% of Full Scale
  • Resolution
    ±0.1% of Full Scale
  • Operating Temperature
    30°C to 100°C, adjustable
  • Optional Operating Temperature Range
    90°C to 150°C
  • Settling Time
    1 second to within 2% of set point
  • Controller Input Power Required
    ±15 VDC (±2%) @ 0.28 Amps
  • Heater Input Power Required
    ±15 VDC @ 1.5 Amps
  • Set Point Signal
    0-5 VDC from <20K Ω
  • Flow Output Signal
    0-5 VDC into >10K Ω
  • Temperature Output
    10 mV/°C
  • Relay Contact Ratings
    2 Amps @ 28 VDC; 1 Amp @ 120 VAC resistive
  • Signal Connector
    15-pin Type "D", RFI/EMI shielded
  • Heater Connector
    9-pin Type "D", RFI/EMI shielded
  • Maximum Line Pressure
    35 psia
  • External Leak Integrity
    <1 x 10-9 scc/sec He
  • Leak Integrity Through Closed Valve
    <1% of Full Scale or 1 sccm, whichever is greater
  • Wetted Materials
    Inconel, 316 S.S., nickel
  • Mounting Position
    Do not mount upside-down
  • Fitting Type
    Swagelok® 8 VCR® male
  • Compliance
    CE

Features

Vapor Source Mass Flow Control

Many new processing techniques, such as MOMBE (CBE) for III-V compounds, silicon deposition using TEOS, and plasma polymerization are placing increased demands on mass flow control techniques. All of the above applications use source materials that are liquids or solids at room temperature and require heating to increase the vapor source pressure. Our extensive experience with precision pressure measurement instrumentation made the addition of a pressure measurement-based mass flow meter and controller a natural extension of this technology, and led to the development of the 1150C and 1152C. The 1150/1152 are capable of delivering vaporized liquid source materials such as: TEOS, DADBS, HMDS, TMCTS, TEAL, TEB, TEG, TEI, TMAL, TMB, TMG, TMI, TaCl5 , DMEAA, Ti[OCH(CH3 ) 2 ] 4 , TiCl4 , TIBAL, and TMP.

Viscous Choked Flow Technology

The 1150C is based on viscous choked flow technology. The equation describing choked flow through an orifice is Q = CP1 where Q is mass flow, C is a constant, and P1 is upstream pressure. The equation shows how the flow through a choked orifice is related to the pressure upstream of that orifice. An absolute pressure measurement before the orifice is required. Choked flow is achieved when the upstream pressure (P1) is approximately twice the downstream pressure (P2). This condition can limit the dynamic range of accurate measurement; however, the control range repeatability is not compromised. Since the upstream pressure must be twice the downstream pressure, this system is best suited for applications in which processing system pressure is less than a few Torr.

System Integration

In application, the 1150/1152 is placed downstream of the source material oven. Precise temperature control is not required as the unit control loop will compensate for inlet pressure variations. Delivery lines to or from the 1150/1152, or from the source oven to the process system, should be as short as possible and heated. A positive temperature gradient should be maintained on the components and plumbing from the source oven to the process chamber to prevent condensation. Condensation causes oscillation in flow stability or non-repeatability in film deposition rates. Similar problems may occur in bubbler systems if one is not careful.

1150C Vapor Mass Flow Controller Components

The 1150C vapor mass flow controller consists of a fixed flow element and one capacitance manometers for flow measurement, with a proportioning solenoid control valve for flow control (U.S. Patent No. 4,679,585). All components and associated circuitry are contained within a compact temperature-controlled assembly with a temperature status LED and relay to indicate when temperature is in range. A temperature sensor and voltage output is available to indicate that the 1150C controller is at an elevated temperature to prevent vapor condensation within the mechanical assembly. The critical pressure measurement in the 1150C is made by the reliable Baratron® capacitance manometer. Components are assembled to the flow element body using nickel seals. The environment around the mechanical assembly of control valve, flow element, and sensor is temperature controlled up to 100°C (temperature control to 150°C is available upon request). Above the mechanical assembly in the 1150C is the pressure sensor signal conditioning and P.I.D. control loop circuitry. The valve driver output of the controller is sent to a solenoid-type proportioning valve upstream of the flow element to deliver the desired amount of gas flow to the process chamber.

Power (J9) Connector Pin-Outs

Pin Description
1 +15 VDC Input
2 No Connection
3 -15 VDC Input
4 Temperature Relay (N.O.)
5 Temperature Relay Common
6 Chassis
7 Chassis
8 Temperature Relay (N.C.)
9 Power Common

Signal (J15) Connector Pin-Outs

Pin Description
1 Valve Test Point
2 Flow Signal Output
3 Valve Close Override
4 Valve Open Override
5 Power Common
6 -15 VDC
7 +15 VDC
8 Set Point Input
9 Temperature Output
10 Optional Input
11 Signal Common
12 Signal Common
13 P1 Test Point
14 P2 Test Point (1152C only)
15 Chassis Ground

Need help?

Contact an Applications Specialist by sending us an email