901/901 Plus
Loadlock Transducer (LLT)
MicroPirani/Piezo Vacuum Sensor Pin-outs

15 pin male HD DSUB diagram
15 pin male HD DSUB
Pin Description
1 RS485(-) / 232 transmit
2 RS485(+) / 232 receive
3 Power (+)
4 Power (-)
5 Analog Output (+)
6 Analog Output (-)
7 Relay #1 Normally Open
8 Relay #1 Common
9 Relay #1 Normally Closed
10 Relay #2 Normally Closed
11 Relay #2 Common
12 Relay #2 Normally Open
13 Relay #3 Normally Closed
14 Relay #3 Common
15 Relay #3 Normally Open

Need help?

Contact an Application Specialist by sending an email to MKS Instruments or call 978-645-5500.