901/901 Plus
Loadlock Transducer (LLT)
MicroPirani/Piezo Vacuum Sensor Pin-outs

901P Pinout Diagram
Pin RS232/485 15 pin Sub-D EtherCAT 15 pin Sub-D RJ45 EtherCAT IN/OUT
1 RS485 (-)/RS232 transmit NC TX+
2 RS485 (+)/RS232 receive NC TX-
3 Power (+) Input Power (+) 9 to 24 VDC RX+
4 Power (-) Power Return - NC
5 Analog Output (+) abs. Signal Output + NC
6 Analog Output (-) Signal Common RX-
7 Relay #1 Normally Open NC NC
8 Relay #1 Common NC NC
9 Relay #1 Normally Closed NC
10 Relay #2 Normally Closed NC
11 Relay #2 Common NC
12 Relay #2 Normally Open NC
13 Relay #3 Normally Closed NC
14 Relay #3 Common NC
15 Relay #3 Normally Open Chassis Ground

Need help?

Contact an Application Specialist by sending an email to MKS Instruments or call 978-645-5500.