258, 1258, 2258, 1259, & 1500 Series Mass flow Controller Pin-outs

Pin Description
1 MKS Test Point*
2 Flow Signal Output (+)
3 Valve Close Input (TTL low)
4 Valve Open Input (TTL low)
5 Power Supply Common
6 -15 VDC Input
7 +15 VDC Input
8 Set Point Input*
9 No Connection
10 Optional Input*
11 Signal Common
12 Signal Common
13-14 No Connection
15 Chassis Ground.
* Controller only

Need help?

Contact an Application Specialist by sending an email to MKS Instruments or call 978-645-5500.