1579 Mass Flow Controller & 579 Mass Flow Meter Pin-outs

Analog �15 VDC Supply

15-Pin "D" Connector
Pin Description
1 Reserved
2 Flow Signal
3 Valve Close*
4 Valve Open*
5 Supply Common
6 -15 V Supply
7 +15 V Supply
8 Set Point Input*
9 NC
10 NC
11 Signal Common
12 Signal Common
13 NC
14 NC
15 Chassis Ground
Note: * Not applicable with mass flow meter type 579
Analog �24 VDC Supply

15-Pin "D" Connector
Pin Description
1 Reserved
2 Flow Signal
3 Valve Close*
4 Valve Open*
5 Reserved
6 24 V Common
7 +24 V Supply
8 Set Point Input*
9 NC
10 NC
11 Signal Common
12 Signal Common
13 NC
14 NC
15 Chassis Ground
Note: * Not applicable with mass flow meter type 579
Profibus Version Analog �15 VDC Supply

9-Pin "D" Connector
Pin Description
1 Valve Open/Close*
2 Flow Signal
3 +15 V Supply
4 Supply Common
5 -15 V Supply
6 Set Point Input*
7 Signal Common
8 Signal Common
9 Reserved
Note: * Not applicable with mass flow meter type 579
Profibus Version Analog �24 VDC Supply

9-Pin "D" Connector
Pin Description
1 Valve Open/Close*
2 Flow Signal
3 24 V Supply
4 Reserved
5 24 V Common
6 Set Point Input*
7 Signal Common
8 Signal Common
9 Reserved
Note: * Not applicable with mass flow meter type 579
Profibus Connection

9-Pin "D" Connector
Pin Description
1 NC
2 NC
3 RxD/TxD - P
4 CNTR - P
5 DGround
6 VP
7 NC
8 RxD/TxP - N
9 NC

Need help?

Contact an Application Specialist by sending an email to MKS Instruments or call 978-645-5500.