1179, 2179, and 1479 Mass Flow Controller Pin-outs

9-pin Type "D" Connector
Pin Description
1 Valve Open/Close
2 Flow Signal Output
3 +15 VDC
4 Power Common
5 -15 VDC
6 Set Point Input
7 Signal Common
8 Signal Common
9 MKS Test Point
20-pin Edge Card
Pin Description
1 Chassis Ground.
2 Power Supply Common
3 Flow Output (0 to +5 VDC)
4 + 15 VDC
5 Optional Output
6 No Connection
7 Key
8 No Connection
9 No Connection
10 Signal Common
A Set Point Input (0 to +5 VDC)
B Signal Common
C Signal Common
D Valve Open (TTL low)
E No Connection
F -15 VDC
H Key
J MKS Test Point
K No Connection
L Valve Close (TTL low)
15-pin Type "D"
Pin Description
1 MKS Test Point
2 Flow Signal Output
3 Valve Close (TTL low)
4 Valve Open (TTL low)
5 Power Supply Common
6 -15 VDC
7 +15 VDC
8 Set Point Input
9 No Connection
10 Optional Input
11 Signal Common
12 Signal Common
13 to 14 No Connection
15 Chassis Ground.

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