MKS 1150 and 1152 Mass Flow Controller Pin-outs

Power (J9) Connector
Pin Description
1 +15 VDC Input
2 No Connection
3 -15 VDC Input
4 Temperature Relay (N.O.)
5 Temperature Relay Common
6 Chassis
7 Chassis
8 Temperature Relay (N.C.)
9 Power Common
Signal (J15) Connector
1 Valve Test Point
2 Flow Signal Output
3 Valve Close Override
4 Valve Open Override
5 Power Common
6 -15 VDC
7 +15 VDC
8 Set Point Input
9 Temperature Output
10 Optional Input
11 Signal Common
12 Signal Common
13 P1 Test Point
14 P2 Test Point (1152 only)
15 Chassis Ground.

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