PFC-80 πMFC Mass Flow Controller Pin-outs

9-pin Type "D"
Pin Description
1 Valve Open
2 Flow Signal Out
3 +15 VDC
4 Power Common
5 No Connection
6 Set Point
7 Signal Common
8 Signal Common
9 Pressure Signal Out
15-pin Type "D"
Pin Description
1 Valve Test Point
2 Flow Signal Output
3 Valve Close
4 Valve Open
5 Power Common
6 No Connection
7 +15 VDC
8 Set Point
9 Zero (flow)
10 Optional Input
11 Signal Common
12 Signal Common
13 No Connection
14 Pressure Signal Out
15 Chassis Ground
RS485
(uses 9-pin Type "D" interface)
Pin Description
1 Pressure Out
2 Pressure Out Rtn
3 +15 VDC
4 Power Return
5 No Connection
6 RS485 Return
7 RS485+
8 RS485-
9 Chassis Ground
DeviceNet™
Pin Description
1 Connector Keyway
2 Drain
3 CAN_H
4 CAN_L
5 V-
6 V+

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