M10MB Mass Flow Meter Pin-outs

15-pin Type "D" (MKS)
Pin Description
1 No Connection
2 Flow Signal Output
3 No Connection
4 No Connection
5 Power Common
6 -15 VDC
7 +15 VDC
8 No Connection
9 No Connection
10 No Connection
11 Signal Common
12 Signal Common
13 No Connection
14 No Connection
15 Chassis Ground

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Contact an Application Specialist by sending an email to MKS Instruments or call 978-645-5500.