IE50 & IM50 Mass Flow Controller Pin-outs

15-pin Type "D" (MKS)
Pin Description
1 Valve Test Point
2 Flow Signal Output
3 Valve Close
4 Valve Open
5 Power Common
6 No Connection
7 +15 to +24 VDC
8 Set Point Input
9 Flow Zero
10 Optional Input
11 Signal Common
12 Signal Common
13 No Connection
14 No Connection
15 Chassis Ground

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Contact an Application Specialist by sending an email to MKS Instruments or call 978-645-5500.