MC20A ALTA™ Mass Flow Controller Pin-outs

15-pin Type "D" (MKS)
Pin Description
1 Valve Test Point
2 Flow Signal Output
3 Valve Close
4 Valve Open
5 Power Common
6 -15 VDC
7 +15 VDC
8 Set Point Input
9 Zero
10 Optional Input
11 Signal Ground
12 Signal Ground
13 No Connection
14 No Connection
15 Chassis Ground
DeviceNet™
Pin Description
1 Connector Keyway
2 Drain
3 CAN_H
4 CAN_L
5 V-
6 V+

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