180A ALTA™ Mass Flow Meter Pin-outs

15-pin Type "D" (MKS)
Pin Description
1 No Connection
2 Flow Signal Output
3 No Connection
4 No Connection
5 Power Common
6 -15 VDC
7 +15 VDC
8 No Connection
9 Zero
10 No Connection
11 Signal Ground
12 Signal Ground
13 No Connection
14 No Connection
15 Chassis Ground
15-pin Type "D" (Alternate)
Pin Description
1 Signal Ground 1
2 Flow Signal Output
3 Not Used
4 Not Used
5 +15 VDC
6 -15 VDC
7 Not Used
8 Not Used
9 Power Common
10 Signal Ground 2
11 +5 VDC Ref
12 Not Used
13 Not Used
14 Chassis Ground
15 Not Used
DeviceNet™
Pin Description
1 Connector Keyway
2 Drain
3 CAN_H
4 CAN_L
5 V-
6 V+

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Contact an Application Specialist by sending an email to MKS Instruments or call 978-645-5500.