1480A ALTA™ Mass Flow Controller Pin-outs

15-pin Type "D" (MKS)
Pin Description
1 Valve Test Point
2 Flow Signal Output
3 Valve Close
4 Valve Open
5 Power Common
6 -15 VDC
7 +15 VDC
8 Set Point Input
9 Zero
10 Optional Input
11 Signal Ground
12 Signal Ground
13 No Connection
14 No Connection
15 Chassis Ground
15-pin Type "D" (Alternate)
Pin Description
1 Signal Ground 1
2 Flow Signal Output
3 Not Used
4 Not Used
5 +15 VDC
6 -15 VDC
7 Valve Test Pt
8 Set Point Input
9 Power Common
10 Signal Ground 2
11 +5 VDC Ref
12 Valve Override
13 Not Used
14 Chassis Ground
15 Ext Sensor Input
9 Pin D
Pin Description
1 Valve Open/Close
2 Flow Signal Output
3 +15 VDC
4 Power Common
5 -15 VDC
6 Set Point
7 Signal Common
8 Signal Common
9 MKS Test Point
DeviceNet™
Pin Description
1 Connector Keyway
2 Drain
3 CAN_H
4 CAN_L
5 V-
6 V+

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