Pin-outs for the MKS TEMP Temperature Input Module

Module TC RTD
Channel Pin 2-wire 3-wire
CH1 A TC+ RTD1
B TC- RTD2
C NC RTD3
CH2 A TC+ RTD1
B TC- RTD2
C NC RTD3
CH3 A TC+ RTD1
B TC- RTD2
C NC RTD3
CH4 A TC+ RTD1
B TC- RTD2
C NC RTD3
CH5 A TC+ RTD1
B TC- RTD2
C NC RTD3
CH6 A TC+ RTD1
B TC- RTD2
C NC RTD3
CH7 A TC+ RTD1
B TC- RTD2
C NC RTD3
CH8 A TC+ RTD1
B TC- RTD2
C NC RTD3


Specifications are subject to change without notice.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 512-719-8000.