Pin-outs for the MKS PWM Pulse Width Modulating Slice

PWM Module Pin-outs
Label Signal Pin # Label Signal Pin #
1 DIN1 A1 1 DO1 B1
2 DIN2 A2 2 DO2 B2
3 DIN3 A3 3 DO3 B3
4 DIN4 A4 4 DO4 B4
5 DIN5 A5 5 DO5 B5
6 DIN6 A6 6 DO6 B6
7 DIN7 A7 7 DO7 B7
8 DIN8 A8 8 DO8 B8
9 DIN9 A9 9 DO9 B9
10 DIN10 A10 10 DO10 B10
11 DIN11 A11 11 DO11 B11
12 DIN12 A12 12 DO12 B12
na Ground/24V A13 na Ground/24V B13
na Ground/24V A14 na Ground/24V B14
na Ground/24V A15 na Ground/24V B15
na Ground/24V A16 na Ground/24V B16
na Ground/24V A17 na Ground/24V B17

Specifications are subject to change without notice.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.