MKS MFC Mass Flow Controller Module Pin-outs

MFC Module Pin-Out Picture
AS01896G-10 D-Sub 9-pin Female for MFC Code A Signal Mapping
Pin MFC Function MFC Controller I/O
1 Valve Open/Close DO
2 Flow Signal Output (0 to +5 VDC) AI
3 +15 to +24 VDC Power Power
4 Power Supply Common Digital Ground Power
5 No Connection  
6 Set Point Input (0 to +5 VDC) AO
7 Signal Common AIO/DIO COM.
8 Signal Common AIO/DIO COM.
9 Pressure Signal Output or Valve Test Point AI (depending on the MFC model can)
AS01896G-01 D-Sub 15-pin Female for MFC Cod B Signal Mapping
Pin MFC Function MFC Controller I/O
1 Valve Test Point AI
2 Flow Signal Output (0 to +5 VDC) AI
3 Valve Close DO
4 Valve Open DO
5 Power Supply Common Digital Ground Power
6 No Connection  
7 +15 to +24 VDC Power Power
8 Set Point Input (0 to +5 VDC) AO
9 Zero Function DI
10 Optional Input AI
11 Signal Common AIO/DIO COM.
12 Signal Common AIO/DIO COM.
13 No Connection  
14 Pressure Signal Output AI
15 Chassis Ground  
AS01896G-01 & -10 Aux Power Connector
Pin Description
1 +15 or +24 VDC
2 Ground
3 -15 or -24 VDC

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