MKS DIO Module Pin-outs

  1. DIs are routed to A1 to A12 and DOs are routed to B1 to B12.
  2. Pins A13 to A17 and B13 to B17 are either 24V for SINK module; or Ground for SOURCE module
Label Signal Pin # Label Signal Pin #
1 DIN1 A1 1 DO1 B1
2 DIN2 A2 2 DO2 B2
3 DIN3 A3 3 DO3 B3
4 DIN4 A4 4 DO4 B4
5 DIN5 A5 5 DO5 B5
6 DIN6 A6 6 DO6 B6
7 DIN7 A7 7 DO7 B7
8 DIN8 A8 8 DO8 B8
9 DIN9 A9 9 DO9 B9
10 DIN10 A10 10 DO10 B10
11 DIN11 A11 11 DO11 B11
12 DIN12 A12 12 DO12 B12
na Ground/24V A13 na Ground/24V B13
na Ground/24V A14 na Ground/24V B14
na Ground/24V A15 na Ground/24V B15
na Ground/24V A16 na Ground/24V B16
na Ground/24V A17 na Ground/24V B17

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.