Metal-sealed, Ultra-high Bellows-sealed Vacuum Valves
MKS UHV Ultra-high Vacuum Valves are lightweight and have a compact profile, fitting easily into vacuum systems where space is tight. UHV design limits outgassing and permeation for lower base system pressure.
- Limits outgassing and permeation for lower base system pressure
- Compact design
- Angle and inline body styles
- Port diameters of 1, 1½, & 2 inches
- ISO-KF or CF flanges
UHV Valves are designed for use in ultra-high vacuum systems, for physical vapor deposition, high energy physics, mass spectrometry and applications requiring an ultraclean environment.
UHV Ultra-high Vacuum Valve data sheet
Vacuum Valve selection guide
Vacuum Isolation Valve Frequently Asked Questions
Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.