Specifications

PFC-20 πMFC Low Pressure, Metal-sealed, Multi-gas, Multi-range, Digital Mass Flow Controller

More about the PFC-20 πMFC Low Pressure, Metal-sealed, Multi-gas, Multi-range, Digital Mass Flow Controller here

PFC-20 πMFC
Full Scale Ranges 2 - 20 sccm
(N2 equivalent)
Inlet Pressure Range 4 - 1200 Torr
(with vacuum at the outlet)
Normal Operating Pressure Differential <10 Torr at Full Scale flow (with vacuum at the outlet)
(N2 equivalent)
Maximum Purge Pressure 150 psig
Burst Pressure 1500 psig
Control Range 2 to 100% of Full Scale
Typical Accuracy ±1% of set point for >10 to 100% Full Scale and ±0.2% of Full Scale for 2 to 10% of Full Scale at inlet pressures >20 Torr
Repeatability 0.2% of Full Scale
Resolution 0.1% of Reading
Temperature Coefficients
Zero ±0.08% of Full Scale /°C
Span ±0.08% of Rdg/°C
Controller Settling Time <2 sec. typical above 10% of Full Scale at inlet pressures >10 Torr
(per Semi Guideline E17-0600)
Warm-up Time <30 min.
(to within 0.2% of Full Scale of steady state performance)
Normal Operating Temperature 10 to 50°C
Storage Humidity 0 to 95% Relative Humidity, no condensing
Storage Temperature -20 to 65°C
Temperature Display 0 to 100°C
Temperature Readout Units °C
Temperature Accuracy ±2°C
Temperature Resolution 0.1°C
Fittings Swagelok® 4 VCR®
Display 4 digits for value, 4 characters for unit
Leak Integrity
External <1x10-10 (scc/sec He)
Through Closed Valve <1.0% of FS at 25 psig to atmosphere
Wetted Materials 316 S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy, KM-45, NiTi
(Standard)
Surface Finish 5 microinch average Ra
Weight Less than 2 lbs. (0.9 kg)
Electrical Connectors
Analog (power & I/O) 9 pin "D" male or 15 pin "D" male
Diagnostics Ethernet
Input Voltage 15-24 VDC ±5%VDC @ 350mA peak, 250 mA steady state
Set Point Command Signal 0 to 5 VDC
Output Signal 0 to 5 VDC
Compliance CE Compliant to 89/336/EEC

Specifications are subject to change without notice.
VCR® is a registered trademark of Swagelok® Company.
Swagelok® and Elgiloy® are registered trademarks of Swagelok Marketing Co., Solon, OH.
Inconel® and Incoloy® are registered trademarks of Inco Alloys, Huntington, WV.

Copyright MKS Instruments, Inc. unless noted otherwise.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.