P250A Multi-gas/Multi-range Mass Flow Controller for Flow Rates Up to 250 SLM

More about the P250A Multi-gas/Multi-range Mass Flow Controller here

Flow Range 100 to 250 slm
(N2 equivalent) Full Scale
Maximum Inlet Pressure 150 psig (can not exceed pressure differential requirement across MFC)
Normal Operating Pressure Differential 25 to 45 psid
(with atmospheric pressure at the MFC outlet)
Proof Pressure 1000 psig
Burst Pressure 1500 psig
Control Range 2% to 100% of Full Scale (range on mech.)
Typical Accuracy ± 1% of set point for > 20% to 100% Full Scale
± 0.2% of Full Scale for 2% to 20% Full Scale
Repeatability ± 0.3% of Reading
Resolution 0.1% of Reading
Temperature Coefficients
Zero < 0.05% of Full Scale/°C
Span < 0.08% of Reading/°C
Inlet Pressure Coefficient < 0.02% of Reading/psi
Typical Controller Settling Time < 3 sec typical above 10% Full Scale @ 50 psi
(per SEMI Guideline E-17-0600)
Warm-up Time < 30 min
(to within 0.2% of Full Scale of steady state performance)
Operating Temperature Range 10°C to 50°C (Ambient)
Storage Humidity 0 to 95% Relative Humidity, non-condensing
Storage Temperature -20° to 80°C (-4° to 149° F)
Temperature Display 0 to 85°C
Temperature Readout Units °C
Temperature Accuracy ± 2°C
Temperature Resolution 0.1°C
Fittings Compatible with Swagelok® 8 VCR®
Display 4 digits for value, 4 characters for unit
Leak Integrity
External < 1 x 10-10 (scc/sec He)
Through Closed Valve < 1.0% of configured Full Scale at 40 psia to vac (<500 mTorr)
To assure no flow-through, a separate positive shut-off valve is required.
Wetted Materials 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy, 430FR, Buna-N, nickel, polyimide
Surface Finish 10 µinch average Ra
Weight less than 3 lbs (1.4kg)
Complaince CE Compliant to 89/336/EEC
Digital I/O DeviceNet™
Input Power Required +11 to +25 VDC per DeviceNet™ specification (@ < 9 watts)
Connector 5 pin microconnnector (DeviceNet™)
Data Rate Switch 4 positions: 125, 250, 500K (Default), GM (programmable over the network)
Data Rate/Network Length Data Rate (User Selectable)
125 Kbps, 500 meters (1,640 feet)
250 Kbps, 250 meters (820 feet)
500 Kbps, 100 meters (328 feet)
MAC ID Switches 2 switches, 10 positions
0,0 to 6,3 are hardware ID numbers
7,0 to 9,9 are software ID numbers
(6,4 to 6,9 are unused and, if selected will default to hardware ID number 6,3)
Network Size Up to 64 nodes
Network Topology Linear (trunkline/dropline) power and signal on same network cable
Visual Communication Indicators LED network status (green/red)
LED module status (green/red)
Scrolling LED displays(MFC Type, Flow Full Scale, Gas Type, IP address, Instance Number (1 to 31))

Specifications are subject to change without notice.
VCR® is a registered trademark of Swagelok® Company.
Swagelok® and VCR® are registered trademarks of Swagelok Marketing Co., Solon, OH.
Inconel® and Incoloy® are registered trademarks of Inco Alloys, Huntington, WV.
Teflon® is a registered trademark of E.I. Dupont, Wilmington, DE.
DeviceNet™ is a trademark of the Open DeviceNet Vendor Association, Coral Springs, FL.
Copyright MKS Instruments, Inc. unless noted otherwise.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.