Specifications

Microvision 2 Residual Gas Analyzer (RGA)

More about the Microvision 2 here

Microvision 2 Electronics
Mounted Weight on flange 1.7kg
Power 24V DC, 3A external universal voltage supply (included)
Maximum Operating Conditions 10-40°C, 80% RH (non condensing)
Communication 10/100 Base-T Ethernet, static or automatically assigned IP addresses
Data Acquisition Method Dedicated real time acquisition processor
Data Collection Methods Analog scanning, full mass range 8, 16 or 32 points/amu
Barchart scanning
Peak-jump collection of up to 15 peaks per scan
Complete recipe control to link multiple acquisition into a single scan
(Process Eye Professional and TOOLweb RGA only)
Number of Stored Source Settings 6 sets including ion source parameters, alignment, resolution, detector calibrations
Stored in electronics and recalled by EasyView, Process Eye Professional or TOOLweb RGA
Software Controlled Tuning Parameters Electron energy, 20 to 100eV
Emission current, 0 to 2 mA (5 mA degas)
Ion energy, 0 to 10V
Ion extraction, 0 to -130V
Filter pole bias, 0 to -10V to +10V
Multiplier Protection Automatic removal of over-range peaks from all scan modes, dedicated multiplier inhibit line for over temperature or over-pressure and x-trip fi lament and multiplier protect for over-pressure
Data Acquisition Speed <3ms per point for analog scanning
Settling Time to 1 ppm of Maximum Signal <20ms
Control Method CE operating system processor with web-server interface
Command Structure Documented ASCII command protocols
Software Built-in web applications allowing RGA control and data acquisition using a platform independent web browser without the need for dedicated installed software
EasyView, Process Eye Professional and TOOLweb RGA Windows software packages for Windows 2000, xP, or Vista
Interfaces RJ45 socket: 10/100 Base-T Ethernet
25 way D-type female: 16 confi gurable TTL I/O, one dedicated multiplier over temperature inhibit input, includes power for ±15V (100mA), +24V (100mA) and ±3.3V (100mA)
15 way D-type female: 4 analog in (-11V to +11V 22bit), 2 analog outputs (0-10V 12bit), includes power for ±15V (100mA), compound output from detector pre-amplifi er
9 way D-type female dedicated vacuum gauge port: -11 to +11V 22bit analog input, 1 digital input (gauge OK), 1 digital output (gauge enable) and gauge power +24V (100mA)
3.5mm jack socket: Opto-isolated input for fi lament protect or control with auto detection of presence of the jack plug as failsafe
2.5mm jack socket: Audio output for use with speaker and wired or wireless headphones
Compliance Compliant to RoHS Directive 2002/95/EC (control unit)
Microvision 2 Analyzers Double (standard configuration) 5" Single Triple
Ranges, amu 100, 200, 300 100, 200 100, 200, 300
Max. operating pressure 7.6e-5 Torr (1e-4 mbar) 7.6e-5 Torr (1e-4 mbar) 7.6e-5 Torr (1e-4 mbar)
Ion source sensitivity 2e-4 A/mbar 2e-4 A/mbar 2e-4 A/mbar
Min. detectable partial pressure, open ion source 3 standard deviations of baseline noise at 300ms integration 3 standard deviations of baseline noise at 300ms integration 3 standard deviations of baseline noise at 300ms integration
Faraday 1.5e-11 Torr (2e-11 mbar) 1.5e-11 Torr (2e-11 mbar) 1.5e-11 Torr (2e-11 mbar)
Microchannel plate 3.8e-14 Torr (5e-14 mbar) 3.8e-14 Torr (5e-14 mbar) 3.8e-14 Torr (5e-14 mbar)
Single channel EM n/a n/a 7.6e-15 Torr (1e-14 mbar)
Bake out temperature 250°C (with extender or electronics removed) 250°C (with extender or electronics removed) 250°C (with extender or electronics removed)
Operating temperature 200°C Faraday only with electronics 10-40°C
150°C Multiplier with electronics 10-40°C and pressure <1e-8 mbar
90°C Multiplier with electronics 10-40°C and pressure <1e-5 mbar
200°C Faraday only with electronics 10-40°C
150°C Multiplier with electronics 10-40°C and pressure <1e-8 mbar
90°C Multiplier with electronics 10-40°C and pressure <1e-5 mbar
200°C Faraday only with electronics 10-40°C
150°C Multiplier with electronics 10-40°C and pressure <1e-8 mbar
90°C Multiplier with electronics 10-40°C and pressure <1e-5 mbar
Filament materials Tungsten or Thoria coated Iridium Tungsten or Thoria coated Iridium Tungsten or Thoria coated Iridium
UHV ion source Option Standard Option
UHV out-gassing rate <1e-9 mbar -l/s <1e-9 mbar -l/s <1e-9 mbar -l/s
PVD ion source Option n/a Option
Cross beam ion source Option n/a Option
Resolution Better than 10% valley for peaks of equal height across mass range Better than 10% valley for peaks of equal height across mass range Better than 10% valley for peaks of equal height across mass range
Peak position drift ±0.1 amu over 8 hours at stable flange temperature ±0.1 amu over 8 hours at stable flange temperature ±0.1 amu over 8 hours at stable flange temperature
Zero blast effect at mass 2 (closed ion source) <5 ppm baseline levels next to mass 2 n/a <5 ppm baseline levels next to mass 2
Flange fitting DN 40 CF-F DN 40 CF-F DN 40 CF-F

Specifications are subject to change without notice.
Copyright MKS Instruments, Inc. unless noted otherwise.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments or call 408-750-0300.