Recommended Replacements
for Discontinued Flow Measurement & Control Products

Below is a list of discontinued MKS Flow Measurement and Control products and a link to the recommended replacement products. The recommended replacement product is the closest match for most common applications. In some cases, the newer product is not a direct replacement for the older product. Contact MKS Instruments for assistance in these situations.

See a list of current MKS Instruments Flow, Measurement, Control & Verification Products

Product Recommended Replacement
1153A Pressure Based Mass Flow Controller Contact MKS Applications Engineering
1159B Mass Flow Controller GE50A General Purpose Mass Flow Controller
1160B Mass Flow Controller GE50A General Purpose Mass Flow Controller
Contact MKS Applications Engineering for Adapter Cable
1161B Mass Flow Controller GE50A General Purpose Mass Flow Controller
Contact MKS Applications Engineering for Adapter Cable
1162B Mass Flow Controller GE50A General Purpose Mass Flow Controller
1258C Mass Flow Controller Contact MKS Applications Engineering
1259C Mass Flow Controller GE50A General Purpose Mass Flow Controller
Contact MKS Applications Engineering for Length Adapter
1449A Metal-sealed Mass Flow Controller
with Positive Shut-off
Contact MKS Applications Engineering
1459C Metal-sealed Mass Flow Controller GM50A General Purpose Mass Flow Controller
1461C Metal-sealed Mass Flow Controller GM50A General Purpose Mass Flow Controller
Contact MKS Applications Engineering for Adapter Cable
1462C Metal-sealed Mass Flow Controller GM50A General Purpose Mass Flow Controller
1479A Metal-sealed Mass Flow Controller GM50A General Purpose Mass Flow Controller
1479B Metal-sealed Mass Flow Controller GM50A General Purpose Mass Flow Controller
1480A Metal-sealed Mass Flow Controller GM50A General Purpose Mass Flow Controller
1661A Metal-sealed Mass Flow Controller P4B Metal-sealed Mass Flow Controller
1679B Metal-sealed Mass Flow Controller GM50A General Purpose Mass Flow Controller
1679B Metal-sealed Mass Flow Controller GM50A General Purpose Mass Flow Controller
1679B Metal-sealed Mass Flow Controller GM50A General Purpose Mass Flow Controller
1749A Elastomer Sealed Mass Flow Controller GE50A General Purpose Mass Flow Controller
1759A Elastomer Sealed Mass Flow Controller GE50A General Purpose Mass Flow Controller
for flow rates up to 50 slm, N2 Equivalent, otherwise
Contact MKS Applications Engineering
180A Metal-sealed Mass Flow Meter GM50A General Purpose Mass Flow Meter
2159B Mass Flow Controller
with Shut-off Valve
GV50A General Purpose Mass Flow Controller with Shut-off Valve
2179A Elastomer Sealed Mass Flow Controller
with Integral Shut-off Valve
GV50A General Purpose Mass Flow Controller with Shut-off Valve
2179B Elastomer Sealed Mass Flow Controller
with Integral Shut-off Valve
GV50A General Purpose Mass Flow Controller with Shut-off Valve
2258C Mass Flow Controller Contact MKS Applications Engineering
2259C Mass Flow Controller
with Shut-off Valve
GV50A General Purpose Mass Flow Controller with Shut-off Valve
Contact MKS Applications Engineering for Length Adapter
258C Elastomer Sealed Mass Flow Meter GM50A General Purpose Mass Flow Meter
748A Elastomer Sealed Mass Flow Meter GM50A General Purpose Mass Flow Meter
758A Elastomer Sealed Mass Flow Meter GM50A General Purpose Mass Flow Meter
for flow rates up to 50 slm, N2 Equivalent, otherwise
Contact MKS Applications Engineering
M100B Elastomer Sealed Mass Flow Controller GE50A General Purpose Mass Flow Controller
M10MB Elastomer Sealed Mass Flow Meter GM50A General Purpose Mass Flow Meter
M200 Metal-sealed Mass Flow Controller P4B Metal-sealed Mass Flow Controller
M330A Metal-sealed Mass Flow Controller P4B Metal-sealed Mass Flow Controller or,
P2A Metal-sealed Mass Flow Controller
M330AH Metal-sealed Mass Flow Controller
with Remote Electronics
Contact MKS Applications Engineering
M330B Metal-sealed Mass Flow Controller P4B Metal-sealed Mass Flow Controller or,
P2A Metal-sealed Mass Flow Controller
M330H Metal-sealed Mass Flow Controller
with Remote Electronics
Contact MKS Applications Engineering

Information is subject to change without notice.
Copyright MKS Instruments, Inc. unless noted otherwise.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.