Discontinued Mass Flow Controllers and Meters

While the products below have been discontinued in the past year, many of the units shipped over the years are still in use. As part of MKS's ongoing support, MKS is making available certain information regarding those products which users may need to reference. In addition, MKS has listed its latest available product which should serve as an excellent replacement for the products that have been discontinued. For other discontinued mass flow control products not found below, see: "Recommended Replacements for Discontinued Products"

For additional assistance contact MKS Sales & Applications.

photo - 180A ALTA Digital, Metal-sealed Mass Flow Meter

180A ALTA™
Digital, Metal-sealed Mass Flow Meter for Flow Rates up to 30 slm

Data Sheet
Pin-outs
Dimensional Drawing
Manual
Profibus Manual

Recommended Replacement:
GM50A General Purpose Mass Flow Controller

photo - 558 Mass-Flo Mass Flow Meter

558 Mass-Flo®
Mass Flow Meter

Manual

Recommended Replacement:
GE250A Multi-gas, Multi-range Elastomer-sealed Mass Flow Controller

photo - 647C Four/Eight-channel Mass Flow and Pressure Programmer/Display

647C
Four/Eight-channel Mass Flow and Pressure Programmer/Display

Data Sheet
Manual

Recommended Replacement:
946 Vacuum System Controller

photo - 1479A General Purpose, Metal-sealed Mass Flow Controller

1479A
General Purpose, Metal-sealed Mass Flow Controller

Data Sheet
Pin-outs
Dimensional Drawing
1479A Manual
1479B Manual

Recommended Replacement:
GM50A General Purpose Mass Flow Controller

photo - 1480A ALTA Metal-sealed Mass Flow Controller for Flow Rates up to 30 slm

1480A ALTA™
Metal-sealed Mass Flow Controller for Flow Rates up to 30 slm

Data Sheet
Pin-outs
1480-dim.pdf
Manual
Profibus Manual

Recommended Replacement:
GM50A General Purpose Mass Flow Controller

photo - 1559A General Purpose, Elastomer-sealed Mass Flow Controllers for Flow Rates up to 200 slm

1559A
General Purpose, Elastomer-sealed Mass Flow Controllers for Flow Rates up to 200 slm

Data Sheet
Dimensional Drawing
Manual

Recommended Replacement:
GE250A General Purpose Multi-gas, Multi-range Elastomer-sealed Mass Flow Controller

photo - 2179A General Purpose, Elastomer-sealed Mass Flow Controller with Integral Shut-off Valve

2179A
General Purpose, Elastomer-sealed Mass Flow Controller with Integral Shut-off Valve for Flow Rates up to 20 slm

Data Sheet
Pin-outs
Manual

Recommended Replacement:
GV50A General Purpose Multi-gas, Multi-range, Elastomer sealed Mass Flow Controller with Integral Shut-off Valve

photo - M10MB General Purpose, Elastomer-sealed Mass Flow Meter

M10MB
General Purpose, Elastomer-sealed Mass Flow Meter for Flow Rates up to 20 slm

Data Sheet
Pin-outs
Dimensional Drawing
Manual

Recommended Replacement:
GM50A General Purpose Mass Flow Controller

photo - M100B General Purpose, Elastomer-sealed Mass Flow Controller

M100B
General Purpose, Elastomer-sealed Mass Flow Controller for Flow Rates up to 20 slm

Data Sheet
Pin-outs
Dimensional Drawing
Manual

Recommended Replacement:
GE50A General Purpose Multi-gas, Multi-range Elastomer-sealed Mass Flow Controller

photo - P5A High Performance, Multi-gas, Multi-range Metal-sealed MFC

P5A (PFC-50 piMFC)
High Performance, Multi-gas, Multi-range Metal-sealed MFC for Flow Rates up to 50 slm

Data Sheet
Pin-outs
Manual

Recommended Replacement:
P4B High Performance Multi-gas, Multi-range Mass Flow Controllers

photo - P6A High Performance, Multi-gas, Pressure-insensitive Metal-sealed MFC

P6A (PFC-60 piMFC)
High Performance, Multi-gas, Pressure-insensitive Metal-sealed MFC for Flow Rates up to 50 slm

Data Sheet
Pin-outs
Manual

Recommended Replacement:
P9B High Performance Pressure-insensitive, Multi-gas, Multi-range Mass Flow Controllers

photo - P8A High Performance, Multi-gas, Multi-range, Pressure-insensitive Metal-sealed Mass Flow Controller

P8A (PFC-80 piMFC)
High Performance, Multi-gas, Multi-range, Pressure-insensitive Metal-sealed Mass Flow Controller for Flow Rates up to 50 slm

Data Sheet
Pin-outs

Recommended Replacement:
P9B High Performance Pressure-insensitive, Multi-gas, Multi-range Mass Flow Controllers

Specifications are subject to change without notice.
Copyright MKS Instruments, Inc. unless noted otherwise.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.