photo - MKS PWM Pulse Width Modulating Slice for Interfacing with Solid State Relays (SSR's)

Specifications

MFC Mass Flow Controller Module

More about the MKS PMFC Mass Flow Controller Module here

MKS MFC
Timing Valve override 100msec + response time
(Digital Output)
Power Requirement 24V±5%
Max Power Consumption Assuming each MFC consumes 250mA and all AOs are fully loaded ≥24V_IO@1.5Amp, 24V_CORE@ 0.15Amp
Auxiliary Power Supply 24V or 15V ±5%
This input will be used to power MFCs connected through IO connector.
Each power output to MFC should be protected separately.
Digital Output
Number of DO Channels 12 (3 for each MFC: valve open, valve close, flow zero)
Logic Level and I/O Type 5V TTL tri state DO for valve override function
Active HIGH and LOW.
HIGH opens MFC control valve
Low closes the valve and floating allows for set point to control
5V TTL Active Low for valve close
Valve open or Flow zero functions referenced to signal ground
Min available current ON 6mA
Max Leakage Current OFF 30µA
Max Voltage Drop when ON 0.2V into 30kOhm Impedance
Protection 5V TVS, resettable Fuse (25mA PTC)
Analog Input
Number of AO Channels. 16 , Single Ended,
(4 for each MFC: Valve test point, Flow signal output, Optional input, Pressure output)
ADC Native Resolution 14-bits
Voltage Range -2V to 14V
Sampling Rate 6.25 kHz (160µSec , for all 16 channels)
(ADC oversampling is set to x32)
Min Input CMRR 50dB, 0-1kHz
Max Error Over Full Range ±0.05% of FS (over 20°C - 30°C)
Max Integral Non-linearity ±2LSB (14bit @ 14v)
Min Input Impedance 150 kOhm
Anti-alias HW Filtering 200Hz ±20%, 6dB/octave minimum
Protection ESD to IEC 61000-4-2 ±4kV contact, short to 24V, +15V, or -15V
Analog Output
Number of AO Channels 4 Single Ended (1 for each MFC: Set Point Input)
DAC Native Resolution 14-bits
Range Voltage : 0-5V @ 13bits, 0-10V @ 14bits
Output Accuracy at 25°C Ambient ±0.1% of FS @5v, ±0.05% of FS @10v
Output Accuracy Temp Drift 32ppm/°C typical (20°C - 30°C)
Max Output Current 5mA, into a 2kOhm, 10nF load
Settling Time ±2.5mV in 1msec into 2kOhm, 10nF load
Protection ESD to IEC 61000-4-2 ±4kV contact, short to 24V, +15V, or -15V
Certifications UL, CE, RoHS
Operating Temperature 0 to +55°C
Storage -40 to +85°C
Humidity 5 to 85% non-condensing
Altitude Up to 2000 meters
Dimensions 52.5 mm x 125 mm x 92.3 mm (W x H x D)
Mounting DIN rail

Specifications are subject to change without notice.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 512-719-8000.