MF1 General Purpose Mass Flow Controller

More about the MF1 here

Full Scale Ranges 10, 20, 50, 100, 200, 500, 1,000, 2,000, 5,000, 10,000, 20,000, 30,000, 50,000 sccm
(N2 equivalent)
Maximum Inlet Pressure 10 bar(g) (both MFC and MFM)
Normal Operating Pressure Differential 10 to 5000 sccm: 0.7 to 2.7 bar (d)
10000 to 20000 sccm: 1.0 to 2.7 bar (d)
(with atmospheric pressure at the MFC outlet)
Proof Pressure 10 bar
Burst Pressure 50 bar
Control Range 2% to 100% of Full Scale
Measurement (Dynamic) Range 1% to 100% of Full Scale
Typical Accuracy ±(0.5% of reading +0.2% of Full Scale)
(with N2 calibration gas)
(including non-linearity, hysteresis and repeatability referenced to 1013 mbar and 0°C)
Repeatability ±0.2% of Full Scale
Resolution 0.1% of Full Scale
Temperature Coefficients
Zero <0.04% of Full Scale/°C
Span <0.08% of Reading/°C
Pressure Coefficient <0.02% of reading/psi
Controller Settling Time <800 msec
(per SEMI Guideline E17-91)
Warm-up Time ~ 15 minutes
Normal Operating Temperature Range 0°C to 40°C
Humidity 0 to 95% Relative Humidity, non-condensing
Temperature -20° to 80°C
Fittings 4 VCR®
1/4 inch Swagelok®
1/8 inch Swagelok®
4 VCO®
6 mm Swagelok®
DN 16 KF
MKS Surface Mount
Leak Integrity
External <1 x 10-9 mbar l/sec (He)
(scc/sec He)
Through Closed Control Valve <1 x 10-5 mbar l/sec (He) at 1.7 bar(g) inlet to atmosphere (To assure no flow-through, a separate positive shut-off valve is required)
(MFC only)
Wetted Materials
MFC, Standard 1.4301 S.S. (V2A, ANSI 304), FKM, Nickel
MFC, Optional NBR, FFKM (seals and valve seal)
Surface Finish 6.3µ Rz
Weight ~ 0.7 kg (1.6 lbs)
Input Voltage Required ±15 VDC or +24 VDC
(20.0 to 31.5 VDC)
Maximum Supply Current 300mA @ +24VDC
Analog Set Point Command Signal Configurable:
Default: 0 to 5 VDC
Zero: 0 to 2 VDC
Full Scale: 5 to 10VDC
(Analog interface versions only)
Analog Output Signal Configurable:
Default: 0 to 5 VDC
Zero: 0 to 2 VDC
Full Scale: 5 to 10VDC
(Analog interface versions only)
Power Standard Industrial Terminal, 3.81 mm pitch
(Phoenix Contact MC-series, 3.81 mm pitch)
Setup USB Setup Interface micro-B
Signal Analog: 9-pin D-Sub pin
Analog: 15-pin D-Sub pin
Profibus-DPV0/DPV1: 9-pin D-Sub socket
Modbus: 9-pin D-Sub socket
EtherCAT, Profinet, Modbus TCP: 2x RJ45
USB Process Interface: B
Compliance CE

Specifications are subject to change without notice.
Swagelok®, VCR® and VCO® are registered trademarks of Swagelok® Company.
Copyright MKS Instruments, Inc. unless noted otherwise.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.