MC20 ALTA™ Digital, Metal-sealed, High Flow Rate Mass Flow Controller

More about the MC20 ALTA™ Digital, Metal-sealed, High Flow Rate Mass Flow Controller here

50 slm Swagelok® 4 VCR® male
50, 100, 200 slm Swagelok® 8 VCR® male
Leak Integrity
External (scc/sec He) <1 x 10-10
Through Closed Valve <1.0% of F.S. at 25 psig to vacuum.
(To assure no flow-through, a separate positive shut-off valve is required.)
Wetted Materials
Standard 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality),
316L S.S., Elgiloy®, Nickel
Valve Seat Viton®, Buna-N, Kalrez®
Surface Finish 16µ inch average Ra
Weight less than 2 lbs. (0.9 kg)
Analog I/O
Input Voltage Required ±15 VDC
Max. steady state current 300 mA (9 Watts)
In-rush current at start-up See user manual
Set Point Command Signal 0 to 5 VDC
Output Signal 0 to 5 VDC
Output Impedance <1 Ω
Connectors 15-pin Type "D"
Digital I/O (DeviceNet)
Data Rate/Network Length Data Rate (user selectable)
125 Kbps, 500m (1,640 ft.)
250 Kbps, 250m (820 ft.)
500 Kbps, 100m (328 ft.)
Level of Filtering User software adjustable
Digital Functions Select units: counts, slm, sccm, % of F.S.
Remote Zero
Set/read flow rate
Up to 20 gas calibration tables with gas correction factors and up to 21 points per table
Flow totalizer and run hours
Valve soft start
Monitor MFC status - valve drive level and trip points
Reset factory defaults
Report run time hours
Change user tags and device address
Device Identification Storage includes manufacturer information, model and serial number, original factory calibration, software and hardware revision numbers.
Data Rate Switch 4 positions: 125, 250, 500K, PGM (programmable over the network)
MAC ID Switches 2 switches, 10 positions; 0,0 to 6,3 are hardware ID numbers; 7,0 to 9,9 are software ID numbers (6,4 to 6,9 are unused and, if selected will default to hardware ID number 6,3)
Input Voltage Required 11 to 25 VDC (24 nominal) per DeviceNet specification
   Max. steady state current 475 mA (11 Watts)
   In-rush current at start-up See user manual
Network Size Up to 64 nodes
Network Topology Linear (trunkline/dropline) power and signal on same network cable
Visual Communication Indicators LED network status (green/red)
LED module status (green/red)

Specifications are subject to change without notice.
VCR® is a registered trademark of Swagelok® Company.
Teflon®, Viton® and Kalrez® are registered trademarks of E.I. Dupont Co., Inc., Wilmington, DE. Chemraz® is a registered trademark of Greene, Tweed & Co., Kulpsville, PA.
Swagelok® and VCR® are registered trademarks of Swagelok Marketing Co., Solon, OH.
Elgiloy® is a registered trademark of Elgin® LTD Partnership, Elgin, IL.,
DeviceNet™ is a trademark of the Open DeviceNet Vendor Association, Coral Springs, FL.
Copyright MKS Instruments, Inc. unless noted otherwise.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.