Specifications

IM50A Metal-sealed, Digital Mass Flow Controller

More about the IM50A here

IM50A
Full Scale Flow Ranges 5 - 50000 sccm Full Scale (N2 equivalent)
Maximum Inlet Pressure 150 psig
(cannot exceed pressure differential requirement across MFC)
Normal Operating Pressure Differential 5 to 5000 sccm: 10 to 40 psid
10000 to 20000 sccm: 15 to 40 psid
30000 to 50000 sccm: 25 to 40 psid
(N2 Full Scale)
(with atmospheric pressure at the MFC outlet)
Proof Pressure 1000 psig
Burst Pressure 1500 psig
Control Range 2% to 100% of Full Scale
(range on mech.)
Typical Accuracy ±1% of set point for 20 to 100% Full Scale
±0.2% of Full Scale for 2 to 20% Full Scale
(with N2 calibration gas)
Repeatability ±0.3% of Reading
Resolution 0.1% of Full Scale
Temperature Coefficients
Zero <0.05% of Full Scale/°C
Span <0.08% of Reading/°C
Inlet Pressure Coefficient <0.02% of Reading/psi
Typical Controller Settling Time <750 msec., typical above 5% Full Scale
(per SEMI Guideline E-17-0600)
Warm-up Time <30 min
(to within 0.2% of Full Scale of steady state performance)
Operating Temperature Range 10°C to 50°C (Ambient)
Storage Humidity 0 to 95% Relative Humidity, non-condensing
Storage Temperature -20° to 80°C (-4° to 149° F)
Fittings Swagelok® 4 VCR® male, 1/4 inch Swagelok compression seal, Swagelok 8 VCR male, 1/8 inch Swagelok, 1/2 inch Swagelok, 6 mm Swagelok, 8 mm Swagelok, 10mm Swagelok, 12mm Swagelok, 3/8 inch Swagelok, Swagelok 2 VCR Male, KF-16, C-Seal, W-Seal
Leak Integrity
External <1 x 10-10
(scc/sec He)
Through Closed Valve <1.0% of Full Scale at 40 psig inlet to atmosphere
(to assure no flow-through, a separate positive shut-off valve is required)
Wetted Materials
Standard 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality)
316 S.S., Elgiloy®, Nickel
Seals & Valve Seat Viton, Buna-N, Neoprene, Kalrez®, EPDM (Class VI), Viton (Class VI)
Surface Finish MFC: 10µ inch average Ra (electropolished)
MFM: 16µ inch average Ra
Analog I/O
Input Power Required +15 to +24 VDC @ (<4 watts)
Flow Input/Output Signal 0 to 5 VDC
Connector 15-pin Type "D" male, 9-pin Type "D" Male
Profibus® Digital I/O
Input Power Required +15 to +24 VDC (<4 watts)
Connector 9 pin Type D male (power) and 9 pin Type D female (comm.)
Data Rate Switch/Selection No switch
Set Data Rate via Profibus®
Data Rate Data Rate (User Selectable)
9.6 Kbps to 12 Mbps
MAC ID Switches/Addresses Station Addresses 0,0 to 9,9
Network Size Up to 99 nodes
Network Topology Master/slave
Weight less than 3 lbs (1.4kg)
Enclosure Rating IP66
Compliance EMC Directive 2014/30/EU

Specifications are subject to change without notice.
VCR® is a registered trademark of Swagelok® Company.
VCR® and VCO® are registered trademarks of Swagelok Marketing Co., Solon, OH.
Viton® is a registered trademark of E.I. Dupont Company, Wilmington, DE.
Elgiloy® is a registered trademark of Elgiloy Specialty Metals, Elgin, IL.
Copyright MKS Instruments, Inc. unless noted otherwise.

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Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.