Specifications

IM250 Multi-gas/Multi-range, IP66-rated, Metal-sealed, Digital Mass Flow Controller for Flow Rates up to 250 slm

More about the IM250 here

IM50A
Full Scale Flow Ranges 100 to 250 slm (N2 equivalent)
Maximum Inlet Pressure 150 psig
(cannot exceed pressure differential requirement across MFC)
Normal Operating Pressure Differential 25 to 45 psid
Proof Pressure 1000 psig
Burst Pressure 1500 psig
Control Range 2% to 100% of Full Scale
(range on mech.)
Typical Accuracy ±1% of set point for > 20 to 100% Full Scale
±0.2% of Full Scale for 2 to 20% Full Scale
Repeatability ±0.3% of Reading
Resolution 0.1% of Full Scale
Temperature Coefficients
Zero <0.05% of Full Scale/°C
Span <0.08% of Reading/°C
Inlet Pressure Coefficient <0.02% of Reading/psi
Typical Controller Settling Time <3 sec typical above 10% Full Scale @ 50 psi
(per SEMI Guideline E-17-0600)
Warm-up Time <30 min
(to within 0.2% of Full Scale of steady state performance)
Operating Temperature Range 10°C to 50°C (Ambient)
Storage Humidity 0 to 95% Relative Humidity, non-condensing
Storage Temperature -20° to 80°C (-4° to 149° F)
Temperature Display 0 to 85°C
Temperature Readout Units °C
Temperature Accuracy ±2°C
Temperature Resolution 0.1°C
Fittings Compatible with Swagelok® 8 VCR®
Leak Integrity
External <1 x 10-10
(scc/sec He)
Through Closed Valve <1.0% of Full Scale at 40 psia to vac (<500 mTorr)
(to assure no flow-through, a separate positive shut-off valve is required)
Wetted Materials 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality)
316 S.S., Elgiloy, 430FR, Buna-N, nickel, polyimide
(standard)
Surface Finish 10µ inch average Ra
Analog I/O
Input Power Required +15 to +24 VDC @ (<4 watts)
Flow Input/Output Signal Voltage (0 to 5 VDC)
Current (4 to 20 mA)
Connector 15-pin Type "D" male
Weight less than 3 lbs (1.4kg)
Enclosure Rating IP66
Compliance EMC Directive 2014/30/EU

Specifications are subject to change without notice.
VCR® is a registered trademark of Swagelok® Company.
VCR® and VCO® are registered trademarks of Swagelok Marketing Co., Solon, OH.
Viton® is a registered trademark of E.I. Dupont Company, Wilmington, DE.
Elgiloy® is a registered trademark of Elgiloy Specialty Metals, Elgin, IL.
Copyright MKS Instruments, Inc. unless noted otherwise.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.