IM100A Metal-sealed, Digital Mass Flow Controller

Full Scale Flow Ranges 50,000 - 100,000 sccm
(N2 equivalent)
Maximum Inlet Pressure 150 psig
(can not exceed pressure differential requirement across MFC)
Normal Operating Pressure Differential 50,000 - 100,000 sccm; 40 to 80 psid
(N2 Full Scale with atmospheric pressure at the MFC outlet)
Proof Pressure 1000 psig
Burst Pressure 1500 psig
Control Range 2% to 100% of Full Scale (range on mech.)
Typical Accuracy ±1% of set point for 20 to 100% Full Scale
±0.2% of Full Scale for 2 to 20% Full Scale
(with N2 calibration gas)
Repeatability ±0.3% of Reading
Resolution 0.1% of Full Scale
Temperature Coefficients
Zero <0.05% of Full Scale/°C
Span <0.08% of Rdg./°C
Inlet Pressure Coefficient <0.02% of Rdg./psi
Typical Controller Settling Time <750 msec., typical above 10% Full Scale
(per SEMI Guideline E-17-0600)
Warm-up Time 30 min
(to within 0.2% of Full Scale of steady state performance)
Operating Temperature Range 10°C to 50°C (Ambient)
Storage Humidity 0 to 95% Relative Humidity, non-condensing
Storage Temperature -20° to 80°C (-4° to 149° F)
Fittings Compatible with Swagelok® 4 VCR® high flow male, Swagelok 8 VCR male, 1/2 inch Swagelok, 10mm Swagelok, KF-16, 12 mm Swagelok, 3/8inch Swagelok, Swagelok 8 VCO male
Leak Integrity
External <1 x 10-10
(scc/sec He)
Through closed valve <1.0% of Full Scale at 40 psig inlet to atmosphere
(To assure no flow-through, a separate positive shut-off valve is required.)
Wetted Materials
Standard 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality)
316 S.S., Elgiloy®
Valve Seat EPDM (Class VI), EPDM, Viton® (Class VI), Viton, Buna, or Neoprene
(MFC only)
Surface Finish
MFC 10µ inch average Ra (electropolished)
MFM 16µ inch average Ra
Weight <3 lbs (1.4kg)
Electrical Analog I/O
Input Power Required +15 to +24 VDC @ (<4 watts)
Flow Input/Output Signal Voltage: (0 to 5 VDC) 15 pin Type "D" male
Current: (4 to 20 mA) 15 pin Type "D" male
Digital I/O
Digital I/O Profibus®
Input Power Required +15 to +24 VDC (<4 watts)
Connector 9 pin Type D male (power)
9 pin Type D female (comm.)
Data Rate Switch/Selection No switch
Set Data Rate via Profibus
Data Rate Data Rate (User Selectable)
9.6 Kbps to 12 Mbps
MAC ID Switches/Addresses 2 switches, 10 positions
Network Size Up to 99 nodes
Network Topology Master/slave
Visual Communication Indicators LED Comm (green/red)
LED Error (green/red)
Compliance CE

Specifications are subject to change without notice.
VCR® is a registered trademark of Swagelok® Company.
VCR® and VCO® are registered trademarks of Swagelok Marketing Co., Solon, OH.
Viton® is a registered trademark of E.I. Dupont Company, Wilmington, DE.
Elgiloy® is a registered trademark of Elgiloy Specialty Metals, Elgin, IL.
Copyright MKS Instruments, Inc. unless noted otherwise.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.