IE50A Elastomer-sealed, Digital Mass Flow Controller

More about the IE50A here

Full Scale Flow Ranges 5 - 50000 sccm Full Scale (N2 equivalent)
Maximum Inlet Pressure 150 psig
(cannot exceed pressure differential requirement across MFC)
Normal Operating Pressure Differential 5 to 5000 sccm: 10 to 40 psid
10000 to 20000 sccm: 15 to 40 psid
30000 to 50000 sccm: 25 to 40 psid
(N2 Full Scale)
(with atmospheric pressure at the MFC outlet)
Proof Pressure 1000 psig
Burst Pressure 1500 psig
Control Range 2% to 100% of Full Scale
(range on mech.)
Typical Accuracy ±1% of set point for 20 to 100% Full Scale
±0.2% of Full Scale for 2 to 20% Full Scale
(with N2 calibration gas)
Repeatability ±0.3% of Reading
Resolution 0.1% of Full Scale
Temperature Coefficients
Zero <0.05% of Full Scale/°C
Span <0.08% of Reading/°C
Inlet Pressure Coefficient <0.02% of Reading/psi
Typical Controller Settling Time <750 msec., typical above 5% Full Scale
(per SEMI Guideline E-17-0600)
Warm-up Time 30 min
(to within 0.2% of Full Scale of steady state performance)
Operating Temperature Range 10°C to 50°C (Ambient)
Storage Humidity 0 to 95% Relative Humidity, non-condensing
Storage Temperature -20° to 80°C (-4° to 149° F)
Fittings Swagelok® 4 VCR® male , Swagelok 4 VCO® male , 1/4 inch Swagelok compression seal, Swagelok 8 VCR male, 1/8 inch Swagelok, 1/2 inch Swagelok, 6 mm Swagelok, 8 mm Swagelok, KF-16, 3/8 inch Swagelok, 8 VCO Male, 10mm Swagelok, 12mm Swagelok, 2 VCR Male, C-Seal
Leak Integrity
External <1 x 10-09
(scc/sec He)
Through Closed Valve Up to 10K valve <0.1% of Full Scale at 40 psig to atmosphere
20K - 50K valve <1.0% of Full Scale at 40 psig to atmosphere
(to assure no flow-through, a separate positive shut-off valve is required)
Wetted Materials
Standard 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality)
316 S.S., Elgiloy®, Nickel
Seals and Valve Seat Viton, Buna-N, Neoprene, Kalrez®, EPDM
Surface Finish 16µ inch average Ra
Analog I/O
Input Power Required +15 to +24 VDC @ (<4 watts)
Flow Input/Output Signal 0 to 5 VDC
Connector 15-pin Type "D" male, 9-pin Type "D" Male
Profibus® Digital I/O
Input Power Required +15 to +24 VDC (<4 watts)
Connector 9 pin Type D male (power) and 9 pin Type D female (comm.)
Data Rate Switch/Selection No switch
Set Data Rate via Profibus®
Data Rate Data Rate (User Selectable)
9.6 Kbps to 12 Mbps
MAC ID Switches/Addresses Station Addresses 0,0 to 9,9
Network Size Up to 99 nodes
Network Topology Master/slave
Weight less than 3 lbs (1.4kg)
Enclosure Rating IP66
Compliance CE

Specifications are subject to change without notice.
VCR® is a registered trademark of Swagelok® Company.
VCR® and VCO® are registered trademarks of Swagelok Marketing Co., Solon, OH.
Viton® is a registered trademark of E.I. Dupont Company, Wilmington, DE.
Elgiloy® is a registered trademark of Elgiloy Specialty Metals, Elgin, IL.
Copyright MKS Instruments, Inc. unless noted otherwise.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.